Matches in SemOpenAlex for { <https://semopenalex.org/work/W2086670309> ?p ?o ?g. }
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- W2086670309 endingPage "82" @default.
- W2086670309 startingPage "76" @default.
- W2086670309 abstract "Abstract We present an epitaxial overgrowth process for reducing threading dislocations in Al x Ga 1− x N over the entire compositional range. This process avoids the use of UV-absorbing GaN layers and results in a spatially uniform defect reduction which eliminates the need for precise alignment of devices to low-defect areas of the wafer. Using the described overgrowth process, we demonstrate Al 0.3 Ga 0.7 N and Al 0.6 Ga 0.4 N epilayers with a dislocation density of 2×10 8 cm −2 and 5×10 8 cm −2 respectively, rendering them suitable as templates for deep-UV bottom-emitting LEDs and laser diodes. The process involves patterning of submicron-wide-stripes, less than 1 μm in height, into an AlGaN/AlN/sapphire template and subsequent regrowth of a 5–10 μm thick AlGaN epilayer. The sub-micron width of the mesa allows for bending of threading dislocations that would continue to thread vertically through wider mesas. Utilizing 1.3 mm-thick sapphire substrates (3× thicker than commonly used), epilayer cracking from regrowth is eliminated and wafer bow over a 2-in. diameter substrate is reduced to less than 15 μm. We observed a 7× increase in photoluminescence intensity from GaN–AlGaN multi-quantum well structures emitting at 340 nm and a 15× increase in electroluminescence from laser diode heterostructures when grown on patterned Al 0.3 Ga 0.7 N templates." @default.
- W2086670309 created "2016-06-24" @default.
- W2086670309 creator A5024396179 @default.
- W2086670309 creator A5030090883 @default.
- W2086670309 creator A5049221263 @default.
- W2086670309 creator A5051101396 @default.
- W2086670309 date "2014-02-01" @default.
- W2086670309 modified "2023-10-17" @default.
- W2086670309 title "Low dislocation density AlGaN epilayers by epitaxial overgrowth of patterned templates" @default.
- W2086670309 cites W1970934313 @default.
- W2086670309 cites W1979462630 @default.
- W2086670309 cites W1983044743 @default.
- W2086670309 cites W1997988458 @default.
- W2086670309 cites W2012100581 @default.
- W2086670309 cites W2019573860 @default.
- W2086670309 cites W2020580497 @default.
- W2086670309 cites W2023537533 @default.
- W2086670309 cites W2045339781 @default.
- W2086670309 cites W2045646514 @default.
- W2086670309 cites W2047939155 @default.
- W2086670309 cites W2068766442 @default.
- W2086670309 cites W2069681511 @default.
- W2086670309 cites W2072666302 @default.
- W2086670309 cites W2078241188 @default.
- W2086670309 cites W2089142070 @default.
- W2086670309 cites W2091192734 @default.
- W2086670309 cites W2093703767 @default.
- W2086670309 cites W2116058070 @default.
- W2086670309 cites W2132947400 @default.
- W2086670309 cites W2158981978 @default.
- W2086670309 doi "https://doi.org/10.1016/j.jcrysgro.2013.11.052" @default.
- W2086670309 hasPublicationYear "2014" @default.
- W2086670309 type Work @default.
- W2086670309 sameAs 2086670309 @default.
- W2086670309 citedByCount "16" @default.
- W2086670309 countsByYear W20866703092015 @default.
- W2086670309 countsByYear W20866703092016 @default.
- W2086670309 countsByYear W20866703092017 @default.
- W2086670309 countsByYear W20866703092019 @default.
- W2086670309 countsByYear W20866703092020 @default.
- W2086670309 countsByYear W20866703092021 @default.
- W2086670309 crossrefType "journal-article" @default.
- W2086670309 hasAuthorship W2086670309A5024396179 @default.
- W2086670309 hasAuthorship W2086670309A5030090883 @default.
- W2086670309 hasAuthorship W2086670309A5049221263 @default.
- W2086670309 hasAuthorship W2086670309A5051101396 @default.
- W2086670309 hasConcept C110738630 @default.
- W2086670309 hasConcept C159122135 @default.
- W2086670309 hasConcept C159985019 @default.
- W2086670309 hasConcept C171250308 @default.
- W2086670309 hasConcept C185592680 @default.
- W2086670309 hasConcept C192562407 @default.
- W2086670309 hasConcept C2779227376 @default.
- W2086670309 hasConcept C49040817 @default.
- W2086670309 hasConcept C8010536 @default.
- W2086670309 hasConcept C82714645 @default.
- W2086670309 hasConceptScore W2086670309C110738630 @default.
- W2086670309 hasConceptScore W2086670309C159122135 @default.
- W2086670309 hasConceptScore W2086670309C159985019 @default.
- W2086670309 hasConceptScore W2086670309C171250308 @default.
- W2086670309 hasConceptScore W2086670309C185592680 @default.
- W2086670309 hasConceptScore W2086670309C192562407 @default.
- W2086670309 hasConceptScore W2086670309C2779227376 @default.
- W2086670309 hasConceptScore W2086670309C49040817 @default.
- W2086670309 hasConceptScore W2086670309C8010536 @default.
- W2086670309 hasConceptScore W2086670309C82714645 @default.
- W2086670309 hasLocation W20866703091 @default.
- W2086670309 hasOpenAccess W2086670309 @default.
- W2086670309 hasPrimaryLocation W20866703091 @default.
- W2086670309 hasRelatedWork W1982900012 @default.
- W2086670309 hasRelatedWork W1984667993 @default.
- W2086670309 hasRelatedWork W2002066087 @default.
- W2086670309 hasRelatedWork W2086670309 @default.
- W2086670309 hasRelatedWork W2161324291 @default.
- W2086670309 hasRelatedWork W2333777264 @default.
- W2086670309 hasRelatedWork W2795629792 @default.
- W2086670309 hasRelatedWork W3195910590 @default.
- W2086670309 hasRelatedWork W4246309204 @default.
- W2086670309 hasRelatedWork W4247914692 @default.
- W2086670309 hasVolume "388" @default.
- W2086670309 isParatext "false" @default.
- W2086670309 isRetracted "false" @default.
- W2086670309 magId "2086670309" @default.
- W2086670309 workType "article" @default.