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- W2086861194 abstract "Some details of impurity profile evaluation in thin silicon layers by anodic oxidation and subsequent sheet resistivity measurement are presented. The experimental conditions for the oxidation process have been carefully chosen in order to obtain uniform silicon dioxide layers. The sheet resistivity versus depth have been recalculated into the antimony concentration profile in two different ways and are compared with a theoretical error function complement distribution and spreading resistance measurements." @default.
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- W2086861194 date "1978-10-01" @default.
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- W2086861194 title "Evaluation of the antimony concentration profile in p-n diffusion junctions by an anodization technique and sheet resistivity measurements" @default.
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- W2086861194 doi "https://doi.org/10.1016/0376-4583(78)90072-9" @default.
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