Matches in SemOpenAlex for { <https://semopenalex.org/work/W2086914328> ?p ?o ?g. }
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- W2086914328 endingPage "L2158" @default.
- W2086914328 startingPage "L2158" @default.
- W2086914328 abstract "A new titanium-disilicide/polysilicon gate system using a nitrogen ion-implanted buffer layer which has high dielectric strength and low resistivity has been developed. The buffer layer of a nonstoichiometric silicon nitride layer approximately 30 nm-thick is formed with a N 2 + dose below 5.0×10 16 cm -2 at an acceleration energy of 15 keV. This layer can prevent intermixing of a titanium-disilicide film and a polysilicon film even after high-temperature annealing. Therefore, it can improve dielectric strength without increasing series resistances through those films." @default.
- W2086914328 created "2016-06-24" @default.
- W2086914328 creator A5009668207 @default.
- W2086914328 creator A5012887532 @default.
- W2086914328 creator A5050357130 @default.
- W2086914328 creator A5057387097 @default.
- W2086914328 date "1988-11-01" @default.
- W2086914328 modified "2023-09-27" @default.
- W2086914328 title "A High Integrity and Low Resistance Ti-Polycide Gate Using a Nitrogen Ion-Implanted Buffer Layer" @default.
- W2086914328 cites W2004599534 @default.
- W2086914328 doi "https://doi.org/10.1143/jjap.27.l2158" @default.
- W2086914328 hasPublicationYear "1988" @default.
- W2086914328 type Work @default.
- W2086914328 sameAs 2086914328 @default.
- W2086914328 citedByCount "0" @default.
- W2086914328 crossrefType "journal-article" @default.
- W2086914328 hasAuthorship W2086914328A5009668207 @default.
- W2086914328 hasAuthorship W2086914328A5012887532 @default.
- W2086914328 hasAuthorship W2086914328A5050357130 @default.
- W2086914328 hasAuthorship W2086914328A5057387097 @default.
- W2086914328 hasConcept C113196181 @default.
- W2086914328 hasConcept C119599485 @default.
- W2086914328 hasConcept C127413603 @default.
- W2086914328 hasConcept C133386390 @default.
- W2086914328 hasConcept C145018004 @default.
- W2086914328 hasConcept C145148216 @default.
- W2086914328 hasConcept C159985019 @default.
- W2086914328 hasConcept C178790620 @default.
- W2086914328 hasConcept C185592680 @default.
- W2086914328 hasConcept C191897082 @default.
- W2086914328 hasConcept C192562407 @default.
- W2086914328 hasConcept C194760766 @default.
- W2086914328 hasConcept C2777431650 @default.
- W2086914328 hasConcept C2777855556 @default.
- W2086914328 hasConcept C2778489163 @default.
- W2086914328 hasConcept C2779227376 @default.
- W2086914328 hasConcept C41823505 @default.
- W2086914328 hasConcept C43617362 @default.
- W2086914328 hasConcept C49040817 @default.
- W2086914328 hasConcept C506065880 @default.
- W2086914328 hasConcept C537208039 @default.
- W2086914328 hasConcept C544956773 @default.
- W2086914328 hasConcept C69990965 @default.
- W2086914328 hasConcept C70401718 @default.
- W2086914328 hasConceptScore W2086914328C113196181 @default.
- W2086914328 hasConceptScore W2086914328C119599485 @default.
- W2086914328 hasConceptScore W2086914328C127413603 @default.
- W2086914328 hasConceptScore W2086914328C133386390 @default.
- W2086914328 hasConceptScore W2086914328C145018004 @default.
- W2086914328 hasConceptScore W2086914328C145148216 @default.
- W2086914328 hasConceptScore W2086914328C159985019 @default.
- W2086914328 hasConceptScore W2086914328C178790620 @default.
- W2086914328 hasConceptScore W2086914328C185592680 @default.
- W2086914328 hasConceptScore W2086914328C191897082 @default.
- W2086914328 hasConceptScore W2086914328C192562407 @default.
- W2086914328 hasConceptScore W2086914328C194760766 @default.
- W2086914328 hasConceptScore W2086914328C2777431650 @default.
- W2086914328 hasConceptScore W2086914328C2777855556 @default.
- W2086914328 hasConceptScore W2086914328C2778489163 @default.
- W2086914328 hasConceptScore W2086914328C2779227376 @default.
- W2086914328 hasConceptScore W2086914328C41823505 @default.
- W2086914328 hasConceptScore W2086914328C43617362 @default.
- W2086914328 hasConceptScore W2086914328C49040817 @default.
- W2086914328 hasConceptScore W2086914328C506065880 @default.
- W2086914328 hasConceptScore W2086914328C537208039 @default.
- W2086914328 hasConceptScore W2086914328C544956773 @default.
- W2086914328 hasConceptScore W2086914328C69990965 @default.
- W2086914328 hasConceptScore W2086914328C70401718 @default.
- W2086914328 hasIssue "11A" @default.
- W2086914328 hasLocation W20869143281 @default.
- W2086914328 hasOpenAccess W2086914328 @default.
- W2086914328 hasPrimaryLocation W20869143281 @default.
- W2086914328 hasRelatedWork W2008018654 @default.
- W2086914328 hasRelatedWork W2016467079 @default.
- W2086914328 hasRelatedWork W2023353327 @default.
- W2086914328 hasRelatedWork W2069037159 @default.
- W2086914328 hasRelatedWork W2094221410 @default.
- W2086914328 hasRelatedWork W2318714940 @default.
- W2086914328 hasRelatedWork W2319082507 @default.
- W2086914328 hasRelatedWork W2321679454 @default.
- W2086914328 hasRelatedWork W38123767 @default.
- W2086914328 hasRelatedWork W4377139143 @default.
- W2086914328 hasVolume "27" @default.
- W2086914328 isParatext "false" @default.
- W2086914328 isRetracted "false" @default.
- W2086914328 magId "2086914328" @default.
- W2086914328 workType "article" @default.