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• W2086940583 endingPage "3498" @default.
• W2086940583 startingPage "3496" @default.
• W2086940583 abstract "We demonstrate that epitaxial layers with a wide range of controllable dopant densities (7 × 1015–3 × 1018/cm3 and 1017–1018/cm3 for n-type and p-type, respectively) can be grown on wafer substrates at 700 ± 25 °C by hot-wire chemical vapor deposition. Phosphorus from PH3 is incorporated into the film more efficiently than silicon from SiH4, leading to efficient doping. Comparison of Hall carrier concentrations to secondary ion mass spectrometry atomic dopant concentration shows that all incorporated dopants are electrically active. The Hall measurements also reveal that the electron mobility in the P-doped films is close to the impurity-scattering limit for crystal Si wafers at room temperature, indicating that our deposited epitaxial materials are high quality." @default.
• W2086940583 created "2016-06-24" @default.
• W2086940583 creator A5031110030 @default.
• W2086940583 creator A5044557611 @default.
• W2086940583 creator A5048334317 @default.
• W2086940583 creator A5057233289 @default.
• W2086940583 creator A5068349523 @default.
• W2086940583 creator A5018391876 @default.
• W2086940583 date "2009-04-01" @default.
• W2086940583 modified "2023-09-27" @default.
• W2086940583 title "Doping of high-quality epitaxial silicon grown by hot-wire chemical vapor deposition near 700 °C" @default.
• W2086940583 cites W1479946182 @default.
• W2086940583 cites W1640356651 @default.
• W2086940583 cites W1973339006 @default.
• W2086940583 cites W1977424041 @default.
• W2086940583 cites W1991084552 @default.
• W2086940583 cites W2009866305 @default.
• W2086940583 cites W2010045447 @default.
• W2086940583 cites W2015654638 @default.
• W2086940583 cites W2029064474 @default.
• W2086940583 cites W2058129143 @default.
• W2086940583 cites W2074563283 @default.
• W2086940583 cites W2079610472 @default.
• W2086940583 cites W2088698049 @default.
• W2086940583 doi "https://doi.org/10.1016/j.tsf.2009.01.059" @default.
• W2086940583 hasPublicationYear "2009" @default.
• W2086940583 type Work @default.
• W2086940583 sameAs 2086940583 @default.
• W2086940583 citedByCount "19" @default.
• W2086940583 countsByYear W20869405832012 @default.
• W2086940583 countsByYear W20869405832013 @default.
• W2086940583 countsByYear W20869405832016 @default.
• W2086940583 crossrefType "journal-article" @default.
• W2086940583 hasAuthorship W2086940583A5018391876 @default.
• W2086940583 hasAuthorship W2086940583A5031110030 @default.
• W2086940583 hasAuthorship W2086940583A5044557611 @default.
• W2086940583 hasAuthorship W2086940583A5048334317 @default.
• W2086940583 hasAuthorship W2086940583A5057233289 @default.
• W2086940583 hasAuthorship W2086940583A5068349523 @default.
• W2086940583 hasConcept C106782819 @default.
• W2086940583 hasConcept C110738630 @default.
• W2086940583 hasConcept C113196181 @default.
• W2086940583 hasConcept C119599485 @default.
• W2086940583 hasConcept C127413603 @default.
• W2086940583 hasConcept C134112204 @default.
• W2086940583 hasConcept C160671074 @default.
• W2086940583 hasConcept C162356407 @default.
• W2086940583 hasConcept C171250308 @default.
• W2086940583 hasConcept C178790620 @default.
• W2086940583 hasConcept C185592680 @default.
• W2086940583 hasConcept C191952053 @default.
• W2086940583 hasConcept C192562407 @default.
• W2086940583 hasConcept C2779227376 @default.
• W2086940583 hasConcept C43617362 @default.
• W2086940583 hasConcept C49040817 @default.
• W2086940583 hasConcept C544956773 @default.
• W2086940583 hasConcept C57410435 @default.
• W2086940583 hasConcept C57863236 @default.
• W2086940583 hasConcept C69990965 @default.
• W2086940583 hasConcept C71987851 @default.
• W2086940583 hasConcept C77671233 @default.
• W2086940583 hasConceptScore W2086940583C106782819 @default.
• W2086940583 hasConceptScore W2086940583C110738630 @default.
• W2086940583 hasConceptScore W2086940583C113196181 @default.
• W2086940583 hasConceptScore W2086940583C119599485 @default.
• W2086940583 hasConceptScore W2086940583C127413603 @default.
• W2086940583 hasConceptScore W2086940583C134112204 @default.
• W2086940583 hasConceptScore W2086940583C160671074 @default.
• W2086940583 hasConceptScore W2086940583C162356407 @default.
• W2086940583 hasConceptScore W2086940583C171250308 @default.
• W2086940583 hasConceptScore W2086940583C178790620 @default.
• W2086940583 hasConceptScore W2086940583C185592680 @default.
• W2086940583 hasConceptScore W2086940583C191952053 @default.
• W2086940583 hasConceptScore W2086940583C192562407 @default.
• W2086940583 hasConceptScore W2086940583C2779227376 @default.
• W2086940583 hasConceptScore W2086940583C43617362 @default.
• W2086940583 hasConceptScore W2086940583C49040817 @default.
• W2086940583 hasConceptScore W2086940583C544956773 @default.
• W2086940583 hasConceptScore W2086940583C57410435 @default.
• W2086940583 hasConceptScore W2086940583C57863236 @default.
• W2086940583 hasConceptScore W2086940583C69990965 @default.
• W2086940583 hasConceptScore W2086940583C71987851 @default.
• W2086940583 hasConceptScore W2086940583C77671233 @default.
• W2086940583 hasIssue "12" @default.
• W2086940583 hasLocation W20869405831 @default.
• W2086940583 hasOpenAccess W2086940583 @default.
• W2086940583 hasPrimaryLocation W20869405831 @default.
• W2086940583 hasRelatedWork W1500725270 @default.
• W2086940583 hasRelatedWork W1660854887 @default.
• W2086940583 hasRelatedWork W1965789664 @default.
• W2086940583 hasRelatedWork W1969716819 @default.
• W2086940583 hasRelatedWork W2028994635 @default.
• W2086940583 hasRelatedWork W2038183133 @default.
• W2086940583 hasRelatedWork W2045473732 @default.
• W2086940583 hasRelatedWork W2064244793 @default.
• W2086940583 hasRelatedWork W2543864017 @default.
• W2086940583 hasRelatedWork W2606657830 @default.
• W2086940583 hasVolume "517" @default.

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