Matches in SemOpenAlex for { <https://semopenalex.org/work/W2086968719> ?p ?o ?g. }
Showing items 1 to 66 of
66
with 100 items per page.
- W2086968719 abstract "I lighly sensitive resists have been developed from a combination of silsesquioxanes, acid photogenerators, and phenolic resins. The resist forms negative images and is developable with aqueous base. Both electron beam and deep-uv optical sensitivity was observed. The films displayed exceptionally high oxygen reactive ion etch resistance. Bilayer systems were developed with this resist as the imaging layer with either polyimide or hard baked novolac as the planarizing layer. Improved optical resists for single layer application have been obtained by using poly(4-hydroxystyrene) derivatives as the matrix resin." @default.
- W2086968719 created "2016-06-24" @default.
- W2086968719 creator A5009564795 @default.
- W2086968719 creator A5024507814 @default.
- W2086968719 creator A5041285546 @default.
- W2086968719 date "1990-06-01" @default.
- W2086968719 modified "2023-10-17" @default.
- W2086968719 title "Highly etch resistant, negative resist for deep-UV and electron beam lithography" @default.
- W2086968719 doi "https://doi.org/10.1117/12.20094" @default.
- W2086968719 hasPublicationYear "1990" @default.
- W2086968719 type Work @default.
- W2086968719 sameAs 2086968719 @default.
- W2086968719 citedByCount "6" @default.
- W2086968719 crossrefType "proceedings-article" @default.
- W2086968719 hasAuthorship W2086968719A5009564795 @default.
- W2086968719 hasAuthorship W2086968719A5024507814 @default.
- W2086968719 hasAuthorship W2086968719A5041285546 @default.
- W2086968719 hasConcept C105487726 @default.
- W2086968719 hasConcept C120665830 @default.
- W2086968719 hasConcept C121332964 @default.
- W2086968719 hasConcept C134406635 @default.
- W2086968719 hasConcept C171250308 @default.
- W2086968719 hasConcept C185592680 @default.
- W2086968719 hasConcept C192157962 @default.
- W2086968719 hasConcept C192562407 @default.
- W2086968719 hasConcept C200274948 @default.
- W2086968719 hasConcept C204223013 @default.
- W2086968719 hasConcept C2779227376 @default.
- W2086968719 hasConcept C2780965675 @default.
- W2086968719 hasConcept C41625074 @default.
- W2086968719 hasConcept C49040817 @default.
- W2086968719 hasConcept C53524968 @default.
- W2086968719 hasConcept C55493867 @default.
- W2086968719 hasConceptScore W2086968719C105487726 @default.
- W2086968719 hasConceptScore W2086968719C120665830 @default.
- W2086968719 hasConceptScore W2086968719C121332964 @default.
- W2086968719 hasConceptScore W2086968719C134406635 @default.
- W2086968719 hasConceptScore W2086968719C171250308 @default.
- W2086968719 hasConceptScore W2086968719C185592680 @default.
- W2086968719 hasConceptScore W2086968719C192157962 @default.
- W2086968719 hasConceptScore W2086968719C192562407 @default.
- W2086968719 hasConceptScore W2086968719C200274948 @default.
- W2086968719 hasConceptScore W2086968719C204223013 @default.
- W2086968719 hasConceptScore W2086968719C2779227376 @default.
- W2086968719 hasConceptScore W2086968719C2780965675 @default.
- W2086968719 hasConceptScore W2086968719C41625074 @default.
- W2086968719 hasConceptScore W2086968719C49040817 @default.
- W2086968719 hasConceptScore W2086968719C53524968 @default.
- W2086968719 hasConceptScore W2086968719C55493867 @default.
- W2086968719 hasLocation W20869687191 @default.
- W2086968719 hasOpenAccess W2086968719 @default.
- W2086968719 hasPrimaryLocation W20869687191 @default.
- W2086968719 hasRelatedWork W1990950348 @default.
- W2086968719 hasRelatedWork W1999595755 @default.
- W2086968719 hasRelatedWork W2004754773 @default.
- W2086968719 hasRelatedWork W2044269754 @default.
- W2086968719 hasRelatedWork W2045098484 @default.
- W2086968719 hasRelatedWork W2321285900 @default.
- W2086968719 hasRelatedWork W2376266960 @default.
- W2086968719 hasRelatedWork W2903898302 @default.
- W2086968719 hasRelatedWork W2920584510 @default.
- W2086968719 hasRelatedWork W4226294346 @default.
- W2086968719 isParatext "false" @default.
- W2086968719 isRetracted "false" @default.
- W2086968719 magId "2086968719" @default.
- W2086968719 workType "article" @default.