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• W2086979910 abstract "This paper describes the fabrication and characteristics of AlN piezoelectric MPG(micro power generator). The micro energy harvester was fabricated to convert ambient vibration energy to electrical power as a AlN piezoelectric cantilever with Si proof-mass. To be compatible with CMOS process, AlN thin film was grown at low temperature by RF magnetron sputtering and micro power generators were fabricated by MEMS technologies. X-ray diffraction pattern proved that the grown AlN film had highly(002) orientation with low value of FWHM(full width at the half maximum, $theta" @default.
• W2086979910 created "2016-06-24" @default.
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• W2086979910 date "2010-05-31" @default.
• W2086979910 modified "2023-09-27" @default.
• W2086979910 title "Fabrication of AlN piezoelectric micro power generator suitable with CMOS process and its characteristics" @default.
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• W2086979910 doi "https://doi.org/10.5369/jsst.2010.19.3.209" @default.
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