Matches in SemOpenAlex for { <https://semopenalex.org/work/W2087052389> ?p ?o ?g. }
Showing items 1 to 98 of
98
with 100 items per page.
- W2087052389 abstract "Abstract A mathematical representation has been developed for a CVD reactor, involving a rotating substrate, in which gallium arsenide wafers are being produced by the thermal decomposition of arsene and trimethyl gallium. In the model axial symmetry has been assumed, but an allowance has been made for forced and thermal natural convection, for thermal diffusion, homogeneous gas phase kinetics and for a realistically complex geometry. The principal finding of the work is that the uniformity of the deposition in this system can be achieved only by the careful balancing of forced and natural convection and the depletion of the reactant. By a parametric study of the key process parameters, including the reactor geometry, the gas flow rate, the reactant concentration, the reactor pressure and the cooling arrangements for the side walls, directions may be obtained regarding this optimization process." @default.
- W2087052389 created "2016-06-24" @default.
- W2087052389 creator A5015005943 @default.
- W2087052389 creator A5089061502 @default.
- W2087052389 date "1989-10-01" @default.
- W2087052389 modified "2023-09-27" @default.
- W2087052389 title "Computed results for the deposition rates and transport phenomena for an MOCVD system with a conical rotating substrate" @default.
- W2087052389 cites W1577068214 @default.
- W2087052389 cites W1605702814 @default.
- W2087052389 cites W1902232508 @default.
- W2087052389 cites W1974293275 @default.
- W2087052389 cites W1979247067 @default.
- W2087052389 cites W1990382978 @default.
- W2087052389 cites W2004244278 @default.
- W2087052389 cites W2005090258 @default.
- W2087052389 cites W2018609918 @default.
- W2087052389 cites W2019433937 @default.
- W2087052389 cites W2025420767 @default.
- W2087052389 cites W2039778727 @default.
- W2087052389 cites W2042296595 @default.
- W2087052389 cites W2059417937 @default.
- W2087052389 cites W2139973256 @default.
- W2087052389 cites W2143808737 @default.
- W2087052389 cites W2965916475 @default.
- W2087052389 doi "https://doi.org/10.1016/0022-0248(89)90582-4" @default.
- W2087052389 hasPublicationYear "1989" @default.
- W2087052389 type Work @default.
- W2087052389 sameAs 2087052389 @default.
- W2087052389 citedByCount "15" @default.
- W2087052389 countsByYear W20870523892013 @default.
- W2087052389 crossrefType "journal-article" @default.
- W2087052389 hasAuthorship W2087052389A5015005943 @default.
- W2087052389 hasAuthorship W2087052389A5089061502 @default.
- W2087052389 hasConcept C110738630 @default.
- W2087052389 hasConcept C111368507 @default.
- W2087052389 hasConcept C121332964 @default.
- W2087052389 hasConcept C124961601 @default.
- W2087052389 hasConcept C127313418 @default.
- W2087052389 hasConcept C151730666 @default.
- W2087052389 hasConcept C159985019 @default.
- W2087052389 hasConcept C171250308 @default.
- W2087052389 hasConcept C175665537 @default.
- W2087052389 hasConcept C185592680 @default.
- W2087052389 hasConcept C18762648 @default.
- W2087052389 hasConcept C192562407 @default.
- W2087052389 hasConcept C2777289219 @default.
- W2087052389 hasConcept C2779227376 @default.
- W2087052389 hasConcept C2816523 @default.
- W2087052389 hasConcept C57879066 @default.
- W2087052389 hasConcept C64297162 @default.
- W2087052389 hasConcept C86803240 @default.
- W2087052389 hasConcept C97355855 @default.
- W2087052389 hasConceptScore W2087052389C110738630 @default.
- W2087052389 hasConceptScore W2087052389C111368507 @default.
- W2087052389 hasConceptScore W2087052389C121332964 @default.
- W2087052389 hasConceptScore W2087052389C124961601 @default.
- W2087052389 hasConceptScore W2087052389C127313418 @default.
- W2087052389 hasConceptScore W2087052389C151730666 @default.
- W2087052389 hasConceptScore W2087052389C159985019 @default.
- W2087052389 hasConceptScore W2087052389C171250308 @default.
- W2087052389 hasConceptScore W2087052389C175665537 @default.
- W2087052389 hasConceptScore W2087052389C185592680 @default.
- W2087052389 hasConceptScore W2087052389C18762648 @default.
- W2087052389 hasConceptScore W2087052389C192562407 @default.
- W2087052389 hasConceptScore W2087052389C2777289219 @default.
- W2087052389 hasConceptScore W2087052389C2779227376 @default.
- W2087052389 hasConceptScore W2087052389C2816523 @default.
- W2087052389 hasConceptScore W2087052389C57879066 @default.
- W2087052389 hasConceptScore W2087052389C64297162 @default.
- W2087052389 hasConceptScore W2087052389C86803240 @default.
- W2087052389 hasConceptScore W2087052389C97355855 @default.
- W2087052389 hasLocation W20870523891 @default.
- W2087052389 hasOpenAccess W2087052389 @default.
- W2087052389 hasPrimaryLocation W20870523891 @default.
- W2087052389 hasRelatedWork W1485962407 @default.
- W2087052389 hasRelatedWork W1577068214 @default.
- W2087052389 hasRelatedWork W1902232508 @default.
- W2087052389 hasRelatedWork W1965852544 @default.
- W2087052389 hasRelatedWork W1971544873 @default.
- W2087052389 hasRelatedWork W1973637035 @default.
- W2087052389 hasRelatedWork W1979247067 @default.
- W2087052389 hasRelatedWork W1984029644 @default.
- W2087052389 hasRelatedWork W1998563229 @default.
- W2087052389 hasRelatedWork W2005090258 @default.
- W2087052389 hasRelatedWork W2012068897 @default.
- W2087052389 hasRelatedWork W2018609918 @default.
- W2087052389 hasRelatedWork W2039778727 @default.
- W2087052389 hasRelatedWork W2049908562 @default.
- W2087052389 hasRelatedWork W2053673277 @default.
- W2087052389 hasRelatedWork W2074927273 @default.
- W2087052389 hasRelatedWork W2076312461 @default.
- W2087052389 hasRelatedWork W2105131245 @default.
- W2087052389 hasRelatedWork W2131476012 @default.
- W2087052389 hasRelatedWork W2139973256 @default.
- W2087052389 isParatext "false" @default.
- W2087052389 isRetracted "false" @default.
- W2087052389 magId "2087052389" @default.
- W2087052389 workType "article" @default.