Matches in SemOpenAlex for { <https://semopenalex.org/work/W2087146502> ?p ?o ?g. }
Showing items 1 to 94 of
94
with 100 items per page.
- W2087146502 endingPage "658" @default.
- W2087146502 startingPage "653" @default.
- W2087146502 abstract "Thermal stability of polycrystalline NiSi2 on high-dose BF+2-, Si+-, B+-, F+-, As+-, and P+-implanted (001) Si has been studied by both cross-sectional and plan-view transmission electron microscopy as well as by sheet resistance measurements. The surface coverage and grain size of polycrystalline NiSi2 were found to be significantly influenced by the implantation species in silicon substrate. In Si+-, B+-, As+-, and P+-implanted samples, agglomeration of NiSi2 became very severe after 800 °C, 1-h annealing. The average grain sizes were larger than 0.5 μm. In contrast, almost full surface coverage was found in F+- and BF+2-implanted samples after 900 °C, 1-h annealing. The growth of laterally uniform NiSi2 and resistance to agglomeration at high temperatures in BF+2- and F+-implanted samples are attributed to the retardation of the growth of NiSi2 grains by the presence of fluorine bubbles at the grain boundaries. Sheet resistance data were found to correlate well with the morphological and microstructural observation." @default.
- W2087146502 created "2016-06-24" @default.
- W2087146502 creator A5013163304 @default.
- W2087146502 creator A5040405304 @default.
- W2087146502 date "1992-01-15" @default.
- W2087146502 modified "2023-09-23" @default.
- W2087146502 title "Thermal stability of NiSi<sub>2</sub>on high‐dose ion‐implanted (001) Si" @default.
- W2087146502 cites W1507932478 @default.
- W2087146502 cites W1975149229 @default.
- W2087146502 cites W1981869649 @default.
- W2087146502 cites W1993935544 @default.
- W2087146502 cites W1998491451 @default.
- W2087146502 cites W1999171146 @default.
- W2087146502 cites W2002892235 @default.
- W2087146502 cites W2030952115 @default.
- W2087146502 cites W2068148003 @default.
- W2087146502 cites W2077374139 @default.
- W2087146502 cites W2089420856 @default.
- W2087146502 doi "https://doi.org/10.1063/1.351350" @default.
- W2087146502 hasPublicationYear "1992" @default.
- W2087146502 type Work @default.
- W2087146502 sameAs 2087146502 @default.
- W2087146502 citedByCount "18" @default.
- W2087146502 countsByYear W20871465022016 @default.
- W2087146502 crossrefType "journal-article" @default.
- W2087146502 hasAuthorship W2087146502A5013163304 @default.
- W2087146502 hasAuthorship W2087146502A5040405304 @default.
- W2087146502 hasConcept C113196181 @default.
- W2087146502 hasConcept C127413603 @default.
- W2087146502 hasConcept C137637335 @default.
- W2087146502 hasConcept C145148216 @default.
- W2087146502 hasConcept C146088050 @default.
- W2087146502 hasConcept C159985019 @default.
- W2087146502 hasConcept C171250308 @default.
- W2087146502 hasConcept C178790620 @default.
- W2087146502 hasConcept C185592680 @default.
- W2087146502 hasConcept C191897082 @default.
- W2087146502 hasConcept C192191005 @default.
- W2087146502 hasConcept C192562407 @default.
- W2087146502 hasConcept C199289684 @default.
- W2087146502 hasConcept C2777855556 @default.
- W2087146502 hasConcept C2779227376 @default.
- W2087146502 hasConcept C41823505 @default.
- W2087146502 hasConcept C42360764 @default.
- W2087146502 hasConcept C43617362 @default.
- W2087146502 hasConcept C544956773 @default.
- W2087146502 hasConcept C59061564 @default.
- W2087146502 hasConcept C66825105 @default.
- W2087146502 hasConcept C8010536 @default.
- W2087146502 hasConcept C98390173 @default.
- W2087146502 hasConceptScore W2087146502C113196181 @default.
- W2087146502 hasConceptScore W2087146502C127413603 @default.
- W2087146502 hasConceptScore W2087146502C137637335 @default.
- W2087146502 hasConceptScore W2087146502C145148216 @default.
- W2087146502 hasConceptScore W2087146502C146088050 @default.
- W2087146502 hasConceptScore W2087146502C159985019 @default.
- W2087146502 hasConceptScore W2087146502C171250308 @default.
- W2087146502 hasConceptScore W2087146502C178790620 @default.
- W2087146502 hasConceptScore W2087146502C185592680 @default.
- W2087146502 hasConceptScore W2087146502C191897082 @default.
- W2087146502 hasConceptScore W2087146502C192191005 @default.
- W2087146502 hasConceptScore W2087146502C192562407 @default.
- W2087146502 hasConceptScore W2087146502C199289684 @default.
- W2087146502 hasConceptScore W2087146502C2777855556 @default.
- W2087146502 hasConceptScore W2087146502C2779227376 @default.
- W2087146502 hasConceptScore W2087146502C41823505 @default.
- W2087146502 hasConceptScore W2087146502C42360764 @default.
- W2087146502 hasConceptScore W2087146502C43617362 @default.
- W2087146502 hasConceptScore W2087146502C544956773 @default.
- W2087146502 hasConceptScore W2087146502C59061564 @default.
- W2087146502 hasConceptScore W2087146502C66825105 @default.
- W2087146502 hasConceptScore W2087146502C8010536 @default.
- W2087146502 hasConceptScore W2087146502C98390173 @default.
- W2087146502 hasIssue "2" @default.
- W2087146502 hasLocation W20871465021 @default.
- W2087146502 hasOpenAccess W2087146502 @default.
- W2087146502 hasPrimaryLocation W20871465021 @default.
- W2087146502 hasRelatedWork W1975333773 @default.
- W2087146502 hasRelatedWork W1993559686 @default.
- W2087146502 hasRelatedWork W2042925312 @default.
- W2087146502 hasRelatedWork W2065258228 @default.
- W2087146502 hasRelatedWork W2088081281 @default.
- W2087146502 hasRelatedWork W2094221410 @default.
- W2087146502 hasRelatedWork W2135394413 @default.
- W2087146502 hasRelatedWork W2572423845 @default.
- W2087146502 hasRelatedWork W2606509029 @default.
- W2087146502 hasRelatedWork W2898717478 @default.
- W2087146502 hasVolume "71" @default.
- W2087146502 isParatext "false" @default.
- W2087146502 isRetracted "false" @default.
- W2087146502 magId "2087146502" @default.
- W2087146502 workType "article" @default.