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- W2087166564 abstract "The microstructures of damascene-processed Al-1 wt. % Cu interconnects from 0.5 μm to 8.0 μm wide are reported. Fabrication consisted of high temperature magnetron sputter deposition of Ti/TiN/Al-Cu layers onto trench-patterned SiO2/single crystal Si substrates, followed by chemical-mechanical polishing. Al grain size, determined by transmission electron microscopy, decreased for the 0.5 μm lines. Al (111) crystallographic texture, determined by electron back-scatter diffraction analysis, decreased with decreasing line width. The narrowest 0.5 μm lines additionally showed a secondary (100) texture component. These results are described as due to the effects of trench geometry and width on the surface and interface energetics of Al nucleation and grain boundary motion. The implications for the reliability of damascene-processed interconnects in future integrated circuit technologies is discussed." @default.
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- W2087166564 date "1998-01-01" @default.
- W2087166564 modified "2023-09-26" @default.
- W2087166564 title "Microstructure of damascene processed Al-Cu interconnects for integrated circuit applications" @default.
- W2087166564 doi "https://doi.org/10.1063/1.54643" @default.
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