FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2087249054> ?p ?o ?g. }

• W2087249054 endingPage "7006" @default.
• W2087249054 startingPage "6999" @default.
• W2087249054 abstract "In this work we used Raman spectroscopy to investigate the structural characteristics of as-deposited amorphous and micro-crystalline silicon films. For amorphous silicon films, the order (or disorder) of the silicon network was quantified using properties of the Raman spectra that were related to key deposition conditions. We found that a strong relationship exists between the structural order of the silicon matrix and the deposition temperature and deposition rate. A quantitative model was proposed relating the intensity ratio of transverse optical phonon peak to longitudinal optical phonon peak to the surface diffusion length, a parameter that was calculated from available data. It was found that optimization of the as-deposited silicon microstructure is possible by selecting deposition conditions yielding peak–ratio values in the vicinity of 0.53. For as-deposited micro-crystalline silicon films, Raman spectroscopy was used to estimate the initial crystalline fraction of the film and monitor the crystallization process during annealing. These data were used to confirm the crystallization mechanism in mixed-phase silicon films and identify the effect of different process parameters on the crystallization time of the annealed films." @default.
• W2087249054 created "2016-06-24" @default.
• W2087249054 creator A5009710795 @default.
• W2087249054 creator A5039160795 @default.
• W2087249054 creator A5066509724 @default.
• W2087249054 creator A5086698742 @default.
• W2087249054 date "1995-12-15" @default.
• W2087249054 modified "2023-10-02" @default.
• W2087249054 title "Raman spectroscopy of amorphous and microcrystalline silicon films deposited by low-pressure chemical vapor deposition" @default.
• W2087249054 cites W1965097855 @default.
• W2087249054 cites W1973098996 @default.
• W2087249054 cites W1989009072 @default.
• W2087249054 cites W1992902798 @default.
• W2087249054 cites W1999676354 @default.
• W2087249054 cites W2022051799 @default.
• W2087249054 cites W2029614805 @default.
• W2087249054 cites W2030145147 @default.
• W2087249054 cites W2044417559 @default.
• W2087249054 cites W2062308228 @default.
• W2087249054 cites W2069229520 @default.
• W2087249054 cites W2073349745 @default.
• W2087249054 cites W2086008429 @default.
• W2087249054 cites W2093517207 @default.
• W2087249054 doi "https://doi.org/10.1063/1.360468" @default.
• W2087249054 hasPublicationYear "1995" @default.
• W2087249054 type Work @default.
• W2087249054 sameAs 2087249054 @default.
• W2087249054 citedByCount "208" @default.
• W2087249054 countsByYear W20872490542012 @default.
• W2087249054 countsByYear W20872490542013 @default.
• W2087249054 countsByYear W20872490542014 @default.
• W2087249054 countsByYear W20872490542015 @default.
• W2087249054 countsByYear W20872490542016 @default.
• W2087249054 countsByYear W20872490542017 @default.
• W2087249054 countsByYear W20872490542018 @default.
• W2087249054 countsByYear W20872490542019 @default.
• W2087249054 countsByYear W20872490542020 @default.
• W2087249054 countsByYear W20872490542021 @default.
• W2087249054 countsByYear W20872490542022 @default.
• W2087249054 countsByYear W20872490542023 @default.
• W2087249054 crossrefType "journal-article" @default.
• W2087249054 hasAuthorship W2087249054A5009710795 @default.
• W2087249054 hasAuthorship W2087249054A5039160795 @default.
• W2087249054 hasAuthorship W2087249054A5066509724 @default.
• W2087249054 hasAuthorship W2087249054A5086698742 @default.
• W2087249054 hasConcept C113196181 @default.
• W2087249054 hasConcept C120665830 @default.
• W2087249054 hasConcept C121332964 @default.
• W2087249054 hasConcept C127413603 @default.
• W2087249054 hasConcept C159985019 @default.
• W2087249054 hasConcept C171250308 @default.
• W2087249054 hasConcept C185592680 @default.
• W2087249054 hasConcept C19067145 @default.
• W2087249054 hasConcept C192562407 @default.
• W2087249054 hasConcept C203036418 @default.
• W2087249054 hasConcept C2776390347 @default.
• W2087249054 hasConcept C2777855556 @default.
• W2087249054 hasConcept C2779667780 @default.
• W2087249054 hasConcept C40003534 @default.
• W2087249054 hasConcept C42360764 @default.
• W2087249054 hasConcept C43617362 @default.
• W2087249054 hasConcept C49040817 @default.
• W2087249054 hasConcept C544956773 @default.
• W2087249054 hasConcept C56052488 @default.
• W2087249054 hasConcept C57410435 @default.
• W2087249054 hasConcept C80086925 @default.
• W2087249054 hasConcept C8010536 @default.
• W2087249054 hasConceptScore W2087249054C113196181 @default.
• W2087249054 hasConceptScore W2087249054C120665830 @default.
• W2087249054 hasConceptScore W2087249054C121332964 @default.
• W2087249054 hasConceptScore W2087249054C127413603 @default.
• W2087249054 hasConceptScore W2087249054C159985019 @default.
• W2087249054 hasConceptScore W2087249054C171250308 @default.
• W2087249054 hasConceptScore W2087249054C185592680 @default.
• W2087249054 hasConceptScore W2087249054C19067145 @default.
• W2087249054 hasConceptScore W2087249054C192562407 @default.
• W2087249054 hasConceptScore W2087249054C203036418 @default.
• W2087249054 hasConceptScore W2087249054C2776390347 @default.
• W2087249054 hasConceptScore W2087249054C2777855556 @default.
• W2087249054 hasConceptScore W2087249054C2779667780 @default.
• W2087249054 hasConceptScore W2087249054C40003534 @default.
• W2087249054 hasConceptScore W2087249054C42360764 @default.
• W2087249054 hasConceptScore W2087249054C43617362 @default.
• W2087249054 hasConceptScore W2087249054C49040817 @default.
• W2087249054 hasConceptScore W2087249054C544956773 @default.
• W2087249054 hasConceptScore W2087249054C56052488 @default.
• W2087249054 hasConceptScore W2087249054C57410435 @default.
• W2087249054 hasConceptScore W2087249054C80086925 @default.
• W2087249054 hasConceptScore W2087249054C8010536 @default.
• W2087249054 hasIssue "12" @default.
• W2087249054 hasLocation W20872490541 @default.
• W2087249054 hasOpenAccess W2087249054 @default.
• W2087249054 hasPrimaryLocation W20872490541 @default.
• W2087249054 hasRelatedWork W1512442030 @default.
• W2087249054 hasRelatedWork W2003795045 @default.
• W2087249054 hasRelatedWork W2013783467 @default.
• W2087249054 hasRelatedWork W2037432217 @default.
• W2087249054 hasRelatedWork W2061728122 @default.

• next