FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2087277830> ?p ?o ?g. }

• W2087277830 endingPage "532" @default.
• W2087277830 startingPage "528" @default.
• W2087277830 abstract "Transparent amorphous oxide semiconductors (TAOSs), such as In-Ga-Zn-O (a-IGZO), are the subject of intensive experimental and theoretical research aimed at applications in transparent electronics. With the development of novel device applications came an increased demand for the understanding and control of a-IGZO Schottky contact properties. Rectifying contacts are suitable for the development of Schottky diodes and metal-semiconductor field-effect transistors (MESFETs) for fast and low power consumption integrated circuits and active-matrix displays. We propose fabrication of Schottky barrier to a-IGZO based on transparent conductive oxide (TCO), namely Ru-Si-O. We have found that atomic composition and microstructure of this TCO are effective in preventing interfacial reactions in the contact region which allows to avoid pre-treatment of the semiconductor surface. Ru-Si-O Schottky contacts to a-IGZO have been fabricated by means of reactive sputter-deposition. We provide comprehensive results on effects of Ru-Si-O chemical composition on properties of rectifying contacts to a-IGZO. Depending on oxygen content in Ru-Si-O sputtering atmosphere, for a specific process window (from 10% to 20% of O2 in sputtering atmosphere), highly rectifying transparent Schottky barriers are obtained without additional a-IGZO surface treatment." @default.
• W2087277830 created "2016-06-24" @default.
• W2087277830 creator A5028567931 @default.
• W2087277830 creator A5032704215 @default.
• W2087277830 creator A5039598706 @default.
• W2087277830 creator A5048548694 @default.
• W2087277830 creator A5077117457 @default.
• W2087277830 creator A5078048234 @default.
• W2087277830 creator A5083374114 @default.
• W2087277830 creator A5091216223 @default.
• W2087277830 date "2015-06-01" @default.
• W2087277830 modified "2023-10-18" @default.
• W2087277830 title "Transparent Amorphous Ru–Si–O Schottky Contacts to In–Ga–Zn–O" @default.
• W2087277830 cites W1761596348 @default.
• W2087277830 cites W1971729223 @default.
• W2087277830 cites W1973039071 @default.
• W2087277830 cites W1987931986 @default.
• W2087277830 cites W1991706717 @default.
• W2087277830 cites W1996630910 @default.
• W2087277830 cites W1999589524 @default.
• W2087277830 cites W2005855119 @default.
• W2087277830 cites W2011271712 @default.
• W2087277830 cites W2030195401 @default.
• W2087277830 cites W2050425329 @default.
• W2087277830 cites W2054030975 @default.
• W2087277830 cites W2063791226 @default.
• W2087277830 cites W2068603012 @default.
• W2087277830 cites W2069591696 @default.
• W2087277830 cites W2095074820 @default.
• W2087277830 cites W2131716975 @default.
• W2087277830 doi "https://doi.org/10.1109/jdt.2014.2361622" @default.
• W2087277830 hasPublicationYear "2015" @default.
• W2087277830 type Work @default.
• W2087277830 sameAs 2087277830 @default.
• W2087277830 citedByCount "7" @default.
• W2087277830 countsByYear W20872778302016 @default.
• W2087277830 countsByYear W20872778302018 @default.
• W2087277830 countsByYear W20872778302020 @default.
• W2087277830 countsByYear W20872778302022 @default.
• W2087277830 crossrefType "journal-article" @default.
• W2087277830 hasAuthorship W2087277830A5028567931 @default.
• W2087277830 hasAuthorship W2087277830A5032704215 @default.
• W2087277830 hasAuthorship W2087277830A5039598706 @default.
• W2087277830 hasAuthorship W2087277830A5048548694 @default.
• W2087277830 hasAuthorship W2087277830A5077117457 @default.
• W2087277830 hasAuthorship W2087277830A5078048234 @default.
• W2087277830 hasAuthorship W2087277830A5083374114 @default.
• W2087277830 hasAuthorship W2087277830A5091216223 @default.
• W2087277830 hasConcept C108225325 @default.
• W2087277830 hasConcept C136525101 @default.
• W2087277830 hasConcept C142724271 @default.
• W2087277830 hasConcept C16115445 @default.
• W2087277830 hasConcept C171250308 @default.
• W2087277830 hasConcept C178790620 @default.
• W2087277830 hasConcept C185592680 @default.
• W2087277830 hasConcept C19067145 @default.
• W2087277830 hasConcept C191897082 @default.
• W2087277830 hasConcept C192562407 @default.
• W2087277830 hasConcept C204787440 @default.
• W2087277830 hasConcept C205200001 @default.
• W2087277830 hasConcept C22423302 @default.
• W2087277830 hasConcept C2779227376 @default.
• W2087277830 hasConcept C2779851234 @default.
• W2087277830 hasConcept C49040817 @default.
• W2087277830 hasConcept C56052488 @default.
• W2087277830 hasConcept C5667319 @default.
• W2087277830 hasConcept C61427134 @default.
• W2087277830 hasConcept C71924100 @default.
• W2087277830 hasConcept C78434282 @default.
• W2087277830 hasConcept C87359718 @default.
• W2087277830 hasConceptScore W2087277830C108225325 @default.
• W2087277830 hasConceptScore W2087277830C136525101 @default.
• W2087277830 hasConceptScore W2087277830C142724271 @default.
• W2087277830 hasConceptScore W2087277830C16115445 @default.
• W2087277830 hasConceptScore W2087277830C171250308 @default.
• W2087277830 hasConceptScore W2087277830C178790620 @default.
• W2087277830 hasConceptScore W2087277830C185592680 @default.
• W2087277830 hasConceptScore W2087277830C19067145 @default.
• W2087277830 hasConceptScore W2087277830C191897082 @default.
• W2087277830 hasConceptScore W2087277830C192562407 @default.
• W2087277830 hasConceptScore W2087277830C204787440 @default.
• W2087277830 hasConceptScore W2087277830C205200001 @default.
• W2087277830 hasConceptScore W2087277830C22423302 @default.
• W2087277830 hasConceptScore W2087277830C2779227376 @default.
• W2087277830 hasConceptScore W2087277830C2779851234 @default.
• W2087277830 hasConceptScore W2087277830C49040817 @default.
• W2087277830 hasConceptScore W2087277830C56052488 @default.
• W2087277830 hasConceptScore W2087277830C5667319 @default.
• W2087277830 hasConceptScore W2087277830C61427134 @default.
• W2087277830 hasConceptScore W2087277830C71924100 @default.
• W2087277830 hasConceptScore W2087277830C78434282 @default.
• W2087277830 hasConceptScore W2087277830C87359718 @default.
• W2087277830 hasIssue "6" @default.
• W2087277830 hasLocation W20872778301 @default.
• W2087277830 hasOpenAccess W2087277830 @default.
• W2087277830 hasPrimaryLocation W20872778301 @default.
• W2087277830 hasRelatedWork W1966714478 @default.
• W2087277830 hasRelatedWork W1989398976 @default.

• next