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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2087278129> ?p ?o ?g. }

• W2087278129 endingPage "2130" @default.
• W2087278129 startingPage "2127" @default.
• W2087278129 abstract "This paper focuses on the use of aluminium dimethylisopropoxide as a novel precursor for the chemical vapour deposition of alumina thin films. The fragmentation pattern of this compound was studied by mass spectrometry, while its volatility and decomposition route were analysed by in-line FT-IR spectroscopy. Aluminium oxide films were grown in the temperature range 540–600 °C at a total pressure of 100 Pa in a nitrogen–oxygen atmosphere. A kinetic model was developed which includes an overall heterogeneous reaction and a parasitic one in the gas phase with apparent activation energies of 130 kJ mol−1 and 209 kJ mol−1 respectively. The microstructure, composition and morphology of the obtained layers were analysed respectively by X-ray diffraction, X-ray photoelectron spectroscopy and atomic force microscopy. The aluminium oxide films obtained were transparent, amorphous, stoichiometric, carbon-free and smooth. An island growth was proposed. Uniform growth rates along the reactor of 16, 32 and 57 nm min−1 are found at deposition temperatures in the range of 560–570 °C, at precursor evaporation temperatures of 15, 25 and 35 °C respectively." @default.
• W2087278129 created "2016-06-24" @default.
• W2087278129 creator A5012412084 @default.
• W2087278129 creator A5018105924 @default.
• W2087278129 creator A5056273941 @default.
• W2087278129 creator A5083395405 @default.
• W2087278129 date "2000-01-01" @default.
• W2087278129 modified "2023-09-28" @default.
• W2087278129 title "Al2O3 thin films from aluminium dimethylisopropoxide by metal–organic chemical vapour deposition" @default.
• W2087278129 cites W1999924448 @default.
• W2087278129 cites W2003596601 @default.
• W2087278129 cites W2015496850 @default.
• W2087278129 cites W2019330888 @default.
• W2087278129 cites W2069020039 @default.
• W2087278129 cites W2141399311 @default.
• W2087278129 cites W2951947918 @default.
• W2087278129 doi "https://doi.org/10.1039/b002968h" @default.
• W2087278129 hasPublicationYear "2000" @default.
• W2087278129 type Work @default.
• W2087278129 sameAs 2087278129 @default.
• W2087278129 citedByCount "36" @default.
• W2087278129 countsByYear W20872781292012 @default.
• W2087278129 countsByYear W20872781292013 @default.
• W2087278129 countsByYear W20872781292015 @default.
• W2087278129 countsByYear W20872781292016 @default.
• W2087278129 countsByYear W20872781292017 @default.
• W2087278129 countsByYear W20872781292018 @default.
• W2087278129 countsByYear W20872781292022 @default.
• W2087278129 countsByYear W20872781292023 @default.
• W2087278129 crossrefType "journal-article" @default.
• W2087278129 hasAuthorship W2087278129A5012412084 @default.
• W2087278129 hasAuthorship W2087278129A5018105924 @default.
• W2087278129 hasAuthorship W2087278129A5056273941 @default.
• W2087278129 hasAuthorship W2087278129A5083395405 @default.
• W2087278129 hasConcept C106159729 @default.
• W2087278129 hasConcept C113196181 @default.
• W2087278129 hasConcept C127413603 @default.
• W2087278129 hasConcept C144082473 @default.
• W2087278129 hasConcept C147789679 @default.
• W2087278129 hasConcept C162324750 @default.
• W2087278129 hasConcept C171250308 @default.
• W2087278129 hasConcept C175708663 @default.
• W2087278129 hasConcept C178790620 @default.
• W2087278129 hasConcept C185592680 @default.
• W2087278129 hasConcept C19067145 @default.
• W2087278129 hasConcept C191897082 @default.
• W2087278129 hasConcept C192562407 @default.
• W2087278129 hasConcept C2777047311 @default.
• W2087278129 hasConcept C2779851234 @default.
• W2087278129 hasConcept C42360764 @default.
• W2087278129 hasConcept C513153333 @default.
• W2087278129 hasConcept C544153396 @default.
• W2087278129 hasConcept C56052488 @default.
• W2087278129 hasConcept C57410435 @default.
• W2087278129 hasConcept C75937256 @default.
• W2087278129 hasConcept C8010536 @default.
• W2087278129 hasConcept C87976508 @default.
• W2087278129 hasConcept C91602232 @default.
• W2087278129 hasConceptScore W2087278129C106159729 @default.
• W2087278129 hasConceptScore W2087278129C113196181 @default.
• W2087278129 hasConceptScore W2087278129C127413603 @default.
• W2087278129 hasConceptScore W2087278129C144082473 @default.
• W2087278129 hasConceptScore W2087278129C147789679 @default.
• W2087278129 hasConceptScore W2087278129C162324750 @default.
• W2087278129 hasConceptScore W2087278129C171250308 @default.
• W2087278129 hasConceptScore W2087278129C175708663 @default.
• W2087278129 hasConceptScore W2087278129C178790620 @default.
• W2087278129 hasConceptScore W2087278129C185592680 @default.
• W2087278129 hasConceptScore W2087278129C19067145 @default.
• W2087278129 hasConceptScore W2087278129C191897082 @default.
• W2087278129 hasConceptScore W2087278129C192562407 @default.
• W2087278129 hasConceptScore W2087278129C2777047311 @default.
• W2087278129 hasConceptScore W2087278129C2779851234 @default.
• W2087278129 hasConceptScore W2087278129C42360764 @default.
• W2087278129 hasConceptScore W2087278129C513153333 @default.
• W2087278129 hasConceptScore W2087278129C544153396 @default.
• W2087278129 hasConceptScore W2087278129C56052488 @default.
• W2087278129 hasConceptScore W2087278129C57410435 @default.
• W2087278129 hasConceptScore W2087278129C75937256 @default.
• W2087278129 hasConceptScore W2087278129C8010536 @default.
• W2087278129 hasConceptScore W2087278129C87976508 @default.
• W2087278129 hasConceptScore W2087278129C91602232 @default.
• W2087278129 hasIssue "9" @default.
• W2087278129 hasLocation W20872781291 @default.
• W2087278129 hasOpenAccess W2087278129 @default.
• W2087278129 hasPrimaryLocation W20872781291 @default.
• W2087278129 hasRelatedWork W1985064754 @default.
• W2087278129 hasRelatedWork W2021072995 @default.
• W2087278129 hasRelatedWork W2026713371 @default.
• W2087278129 hasRelatedWork W2062937542 @default.
• W2087278129 hasRelatedWork W2063557732 @default.
• W2087278129 hasRelatedWork W2070716949 @default.
• W2087278129 hasRelatedWork W2076904436 @default.
• W2087278129 hasRelatedWork W2080259365 @default.
• W2087278129 hasRelatedWork W2361156483 @default.
• W2087278129 hasRelatedWork W2790297317 @default.
• W2087278129 hasVolume "10" @default.
• W2087278129 isParatext "false" @default.

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