Matches in SemOpenAlex for { <https://semopenalex.org/work/W2087298720> ?p ?o ?g. }
- W2087298720 endingPage "6264" @default.
- W2087298720 startingPage "6258" @default.
- W2087298720 abstract "Hydrogen elimination mechanisms involved in the low-pressure chemical vapor deposition of silica films from SiH4/O2/N2 mixtures are investigated. The main purpose of this work is to elucidate the mechanisms that limit hydrogen elimination in the silica deposition process under the mass-transport and gas-phase kinetic regimes. To this end, different gas-phase, surface, and mass-diffusion processes relevant to the SiH4 oxidation and silica growth chemistry are considered and discussed on the basis of the influence of temperature, total gas flow rate and O2-to-SiH4 flow ratio on deposition rate and hydrogen content in the film, as determined by infrared spectroscopy and elastic recoil detection analysis. Our results indicate a clear relationship between the growth and hydrogen elimination kinetics, and support a hydrogen elimination model based on radical-surface interactions." @default.
- W2087298720 created "2016-06-24" @default.
- W2087298720 creator A5012002871 @default.
- W2087298720 creator A5013894057 @default.
- W2087298720 creator A5046425891 @default.
- W2087298720 date "2002-06-01" @default.
- W2087298720 modified "2023-09-27" @default.
- W2087298720 title "Hydrogen Elimination Kinetics during Chemical Vapor Deposition of Silica Films" @default.
- W2087298720 cites W1597867341 @default.
- W2087298720 cites W1639235488 @default.
- W2087298720 cites W1655406381 @default.
- W2087298720 cites W1965406278 @default.
- W2087298720 cites W1966480312 @default.
- W2087298720 cites W1978316181 @default.
- W2087298720 cites W1981228913 @default.
- W2087298720 cites W1981424567 @default.
- W2087298720 cites W1983803615 @default.
- W2087298720 cites W1984633746 @default.
- W2087298720 cites W1986933464 @default.
- W2087298720 cites W1990186048 @default.
- W2087298720 cites W1992159522 @default.
- W2087298720 cites W1993139953 @default.
- W2087298720 cites W2004989661 @default.
- W2087298720 cites W2005860031 @default.
- W2087298720 cites W2006801626 @default.
- W2087298720 cites W2011407402 @default.
- W2087298720 cites W2016435926 @default.
- W2087298720 cites W2022493339 @default.
- W2087298720 cites W2023477921 @default.
- W2087298720 cites W2028204810 @default.
- W2087298720 cites W2028316328 @default.
- W2087298720 cites W2034705052 @default.
- W2087298720 cites W2039050472 @default.
- W2087298720 cites W2048864592 @default.
- W2087298720 cites W2049352443 @default.
- W2087298720 cites W2052495097 @default.
- W2087298720 cites W2053515004 @default.
- W2087298720 cites W2061062349 @default.
- W2087298720 cites W2063298793 @default.
- W2087298720 cites W2064531164 @default.
- W2087298720 cites W2074821643 @default.
- W2087298720 cites W2076031446 @default.
- W2087298720 cites W2082582137 @default.
- W2087298720 cites W2086192758 @default.
- W2087298720 cites W2088213265 @default.
- W2087298720 cites W2089774321 @default.
- W2087298720 cites W2089919098 @default.
- W2087298720 cites W2091046058 @default.
- W2087298720 cites W2091146614 @default.
- W2087298720 cites W2091793042 @default.
- W2087298720 cites W2092414914 @default.
- W2087298720 cites W2128779092 @default.
- W2087298720 cites W2135590988 @default.
- W2087298720 cites W2141444263 @default.
- W2087298720 cites W2143421867 @default.
- W2087298720 cites W2146002752 @default.
- W2087298720 cites W1995052289 @default.
- W2087298720 cites W2469177800 @default.
- W2087298720 cites W2501892996 @default.
- W2087298720 cites W2510456684 @default.
- W2087298720 doi "https://doi.org/10.1021/jp0255381" @default.
- W2087298720 hasPublicationYear "2002" @default.
- W2087298720 type Work @default.
- W2087298720 sameAs 2087298720 @default.
- W2087298720 citedByCount "1" @default.
- W2087298720 crossrefType "journal-article" @default.
- W2087298720 hasAuthorship W2087298720A5012002871 @default.
- W2087298720 hasAuthorship W2087298720A5013894057 @default.
- W2087298720 hasAuthorship W2087298720A5046425891 @default.
- W2087298720 hasConcept C113196181 @default.
- W2087298720 hasConcept C121332964 @default.
- W2087298720 hasConcept C127413603 @default.
- W2087298720 hasConcept C148898269 @default.
- W2087298720 hasConcept C151730666 @default.
- W2087298720 hasConcept C178790620 @default.
- W2087298720 hasConcept C179104552 @default.
- W2087298720 hasConcept C185592680 @default.
- W2087298720 hasConcept C2776523803 @default.
- W2087298720 hasConcept C2816523 @default.
- W2087298720 hasConcept C42360764 @default.
- W2087298720 hasConcept C512968161 @default.
- W2087298720 hasConcept C57410435 @default.
- W2087298720 hasConcept C62520636 @default.
- W2087298720 hasConcept C64297162 @default.
- W2087298720 hasConcept C69357855 @default.
- W2087298720 hasConcept C86803240 @default.
- W2087298720 hasConcept C97355855 @default.
- W2087298720 hasConceptScore W2087298720C113196181 @default.
- W2087298720 hasConceptScore W2087298720C121332964 @default.
- W2087298720 hasConceptScore W2087298720C127413603 @default.
- W2087298720 hasConceptScore W2087298720C148898269 @default.
- W2087298720 hasConceptScore W2087298720C151730666 @default.
- W2087298720 hasConceptScore W2087298720C178790620 @default.
- W2087298720 hasConceptScore W2087298720C179104552 @default.
- W2087298720 hasConceptScore W2087298720C185592680 @default.
- W2087298720 hasConceptScore W2087298720C2776523803 @default.
- W2087298720 hasConceptScore W2087298720C2816523 @default.
- W2087298720 hasConceptScore W2087298720C42360764 @default.