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- W2087339770 abstract "Interferometric imaging has the potential to extend the usefulness of optical microscopes by encoding small phase shifts that reveal information about topology and materials. At the Oak Ridge National Laboratory (ORNL), we have developed an optical Spatial Heterodyne Interferometry (SHI) method that captures reflection images containing both phase and amplitude information at a high rate of speed. By measuring the phase of a wavefront reflected off or transmitted through a surface, the relative surface heights and some materials properties can be measured. In this paper we briefly review our historical application of SHI in the semiconductor industry, but the focus is on new research to adapt this technology to the inspection of MEMS devices, in particular to the characterization of motion elements such as microcantilevers and deformable mirror arrays." @default.
- W2087339770 created "2016-06-24" @default.
- W2087339770 creator A5048203015 @default.
- W2087339770 creator A5049719212 @default.
- W2087339770 creator A5083513907 @default.
- W2087339770 date "2007-01-01" @default.
- W2087339770 modified "2023-09-23" @default.
- W2087339770 title "Optical spatial heterodyned interferometry for inspection of microelectromechanical systems" @default.
- W2087339770 doi "https://doi.org/10.1117/12.736740" @default.
- W2087339770 hasPublicationYear "2007" @default.
- W2087339770 type Work @default.
- W2087339770 sameAs 2087339770 @default.
- W2087339770 citedByCount "1" @default.
- W2087339770 crossrefType "proceedings-article" @default.
- W2087339770 hasAuthorship W2087339770A5048203015 @default.
- W2087339770 hasAuthorship W2087339770A5049719212 @default.
- W2087339770 hasAuthorship W2087339770A5083513907 @default.
- W2087339770 hasConcept C100921725 @default.
- W2087339770 hasConcept C120665830 @default.
- W2087339770 hasConcept C121332964 @default.
- W2087339770 hasConcept C165699331 @default.
- W2087339770 hasConcept C166689943 @default.
- W2087339770 hasConcept C192209626 @default.
- W2087339770 hasConcept C192562407 @default.
- W2087339770 hasConcept C199360897 @default.
- W2087339770 hasConcept C23576306 @default.
- W2087339770 hasConcept C24890656 @default.
- W2087339770 hasConcept C2780497637 @default.
- W2087339770 hasConcept C37977207 @default.
- W2087339770 hasConcept C41008148 @default.
- W2087339770 hasConcept C44280652 @default.
- W2087339770 hasConcept C49040817 @default.
- W2087339770 hasConcept C62520636 @default.
- W2087339770 hasConcept C65682993 @default.
- W2087339770 hasConceptScore W2087339770C100921725 @default.
- W2087339770 hasConceptScore W2087339770C120665830 @default.
- W2087339770 hasConceptScore W2087339770C121332964 @default.
- W2087339770 hasConceptScore W2087339770C165699331 @default.
- W2087339770 hasConceptScore W2087339770C166689943 @default.
- W2087339770 hasConceptScore W2087339770C192209626 @default.
- W2087339770 hasConceptScore W2087339770C192562407 @default.
- W2087339770 hasConceptScore W2087339770C199360897 @default.
- W2087339770 hasConceptScore W2087339770C23576306 @default.
- W2087339770 hasConceptScore W2087339770C24890656 @default.
- W2087339770 hasConceptScore W2087339770C2780497637 @default.
- W2087339770 hasConceptScore W2087339770C37977207 @default.
- W2087339770 hasConceptScore W2087339770C41008148 @default.
- W2087339770 hasConceptScore W2087339770C44280652 @default.
- W2087339770 hasConceptScore W2087339770C49040817 @default.
- W2087339770 hasConceptScore W2087339770C62520636 @default.
- W2087339770 hasConceptScore W2087339770C65682993 @default.
- W2087339770 hasLocation W20873397701 @default.
- W2087339770 hasOpenAccess W2087339770 @default.
- W2087339770 hasPrimaryLocation W20873397701 @default.
- W2087339770 hasRelatedWork W1599561640 @default.
- W2087339770 hasRelatedWork W1963800875 @default.
- W2087339770 hasRelatedWork W2016416341 @default.
- W2087339770 hasRelatedWork W2029132029 @default.
- W2087339770 hasRelatedWork W2034676571 @default.
- W2087339770 hasRelatedWork W2043197055 @default.
- W2087339770 hasRelatedWork W2049924572 @default.
- W2087339770 hasRelatedWork W2115337580 @default.
- W2087339770 hasRelatedWork W2592278521 @default.
- W2087339770 hasRelatedWork W4247450098 @default.
- W2087339770 isParatext "false" @default.
- W2087339770 isRetracted "false" @default.
- W2087339770 magId "2087339770" @default.
- W2087339770 workType "article" @default.