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- W2087396829 abstract "We have successfully demonstrated a misalignment-tolerant SRAM cell, whose layout has been created from consideration of narrow-transistor failure through physical and electrical analyses. To evaluate an advantage of the layout, we have performed an intentionally misaligned experiment using a test structure with each SRAM block featuring a neighbor alignment-inspection mark. Moreover, utilizing the result of the experiment, we have created a manufacturing-friendly methodology of misalignment-limit determination." @default.
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- W2087396829 date "2012-08-01" @default.
- W2087396829 modified "2023-10-14" @default.
- W2087396829 title "Fully Understanding the Mechanism of Misalignment-Induced Narrow-Transistor Failure and Carefully Evaluating the Misalignment-Tolerant SRAM-Cell Layout" @default.
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- W2087396829 doi "https://doi.org/10.1109/tsm.2012.2202769" @default.
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