Matches in SemOpenAlex for { <https://semopenalex.org/work/W2087491118> ?p ?o ?g. }
Showing items 1 to 98 of
98
with 100 items per page.
- W2087491118 endingPage "55" @default.
- W2087491118 startingPage "S1_52" @default.
- W2087491118 abstract "This paper describes a method and results of in situ measurement of stress for Co/Pd multilayer films deposited by rf sputtering. An optical non-contact displacement detector is set at the behind of the substrate. The substrate is hold at one of the ends of the substrate and the detector is set at near the free end of substrate. Change of displacement (d) between the detector and the substrate caused by the bending of the substrate which corresponds to the stress in the film. For Co single film, stress is tensile and its value is almost constant with increasing film thickness, while in Pd single film, stress is also tensile at the beginning of the deposition and it takes a minimum value at near the 80 Å of Pd thickness and then it changes to compressive. For Co(4Å)/Pd(30Å) multilayer films deposited directly on the glass substrate, at very beginning of the deposition, the stress in Pd and Co layers are tensile and compressive, respectively. This distribution of stress is gradually changed with the progress of deposition. After the deposition of over 20 periods of Co/Pd, the stress in the Pd and Co layers are changed to compressive and tensile, respectively." @default.
- W2087491118 created "2016-06-24" @default.
- W2087491118 creator A5039109862 @default.
- W2087491118 creator A5043008768 @default.
- W2087491118 creator A5059583471 @default.
- W2087491118 creator A5077172159 @default.
- W2087491118 date "1993-01-01" @default.
- W2087491118 modified "2023-09-26" @default.
- W2087491118 title "In-situ MEASUREMENT OF STRESS FOR Co/Pd MULTILAYER FILMS DURING FABRICATION BY RF-SPUTTERING" @default.
- W2087491118 cites W1996667398 @default.
- W2087491118 cites W1997778079 @default.
- W2087491118 cites W2036172701 @default.
- W2087491118 cites W2044971723 @default.
- W2087491118 cites W2052407301 @default.
- W2087491118 cites W2066874036 @default.
- W2087491118 cites W2086997426 @default.
- W2087491118 cites W2104675313 @default.
- W2087491118 cites W2175921085 @default.
- W2087491118 doi "https://doi.org/10.3379/jmsjmag.17.s1_52" @default.
- W2087491118 hasPublicationYear "1993" @default.
- W2087491118 type Work @default.
- W2087491118 sameAs 2087491118 @default.
- W2087491118 citedByCount "0" @default.
- W2087491118 crossrefType "journal-article" @default.
- W2087491118 hasAuthorship W2087491118A5039109862 @default.
- W2087491118 hasAuthorship W2087491118A5043008768 @default.
- W2087491118 hasAuthorship W2087491118A5059583471 @default.
- W2087491118 hasAuthorship W2087491118A5077172159 @default.
- W2087491118 hasBestOaLocation W20874911181 @default.
- W2087491118 hasConcept C111368507 @default.
- W2087491118 hasConcept C112950240 @default.
- W2087491118 hasConcept C127313418 @default.
- W2087491118 hasConcept C136525101 @default.
- W2087491118 hasConcept C138885662 @default.
- W2087491118 hasConcept C142724271 @default.
- W2087491118 hasConcept C151730666 @default.
- W2087491118 hasConcept C159985019 @default.
- W2087491118 hasConcept C171250308 @default.
- W2087491118 hasConcept C186068551 @default.
- W2087491118 hasConcept C19067145 @default.
- W2087491118 hasConcept C192562407 @default.
- W2087491118 hasConcept C204787440 @default.
- W2087491118 hasConcept C21036866 @default.
- W2087491118 hasConcept C22423302 @default.
- W2087491118 hasConcept C2777289219 @default.
- W2087491118 hasConcept C2816523 @default.
- W2087491118 hasConcept C30407753 @default.
- W2087491118 hasConcept C41895202 @default.
- W2087491118 hasConcept C61427134 @default.
- W2087491118 hasConcept C64297162 @default.
- W2087491118 hasConcept C71924100 @default.
- W2087491118 hasConcept C86803240 @default.
- W2087491118 hasConcept C87210426 @default.
- W2087491118 hasConceptScore W2087491118C111368507 @default.
- W2087491118 hasConceptScore W2087491118C112950240 @default.
- W2087491118 hasConceptScore W2087491118C127313418 @default.
- W2087491118 hasConceptScore W2087491118C136525101 @default.
- W2087491118 hasConceptScore W2087491118C138885662 @default.
- W2087491118 hasConceptScore W2087491118C142724271 @default.
- W2087491118 hasConceptScore W2087491118C151730666 @default.
- W2087491118 hasConceptScore W2087491118C159985019 @default.
- W2087491118 hasConceptScore W2087491118C171250308 @default.
- W2087491118 hasConceptScore W2087491118C186068551 @default.
- W2087491118 hasConceptScore W2087491118C19067145 @default.
- W2087491118 hasConceptScore W2087491118C192562407 @default.
- W2087491118 hasConceptScore W2087491118C204787440 @default.
- W2087491118 hasConceptScore W2087491118C21036866 @default.
- W2087491118 hasConceptScore W2087491118C22423302 @default.
- W2087491118 hasConceptScore W2087491118C2777289219 @default.
- W2087491118 hasConceptScore W2087491118C2816523 @default.
- W2087491118 hasConceptScore W2087491118C30407753 @default.
- W2087491118 hasConceptScore W2087491118C41895202 @default.
- W2087491118 hasConceptScore W2087491118C61427134 @default.
- W2087491118 hasConceptScore W2087491118C64297162 @default.
- W2087491118 hasConceptScore W2087491118C71924100 @default.
- W2087491118 hasConceptScore W2087491118C86803240 @default.
- W2087491118 hasConceptScore W2087491118C87210426 @default.
- W2087491118 hasIssue "S_1_MORIS_92" @default.
- W2087491118 hasLocation W20874911181 @default.
- W2087491118 hasOpenAccess W2087491118 @default.
- W2087491118 hasPrimaryLocation W20874911181 @default.
- W2087491118 hasRelatedWork W1485904692 @default.
- W2087491118 hasRelatedWork W1791462888 @default.
- W2087491118 hasRelatedWork W1968373997 @default.
- W2087491118 hasRelatedWork W2024909825 @default.
- W2087491118 hasRelatedWork W2086744665 @default.
- W2087491118 hasRelatedWork W2089085266 @default.
- W2087491118 hasRelatedWork W2373012329 @default.
- W2087491118 hasRelatedWork W2526521535 @default.
- W2087491118 hasRelatedWork W2593200884 @default.
- W2087491118 hasRelatedWork W2795554382 @default.
- W2087491118 hasVolume "17" @default.
- W2087491118 isParatext "false" @default.
- W2087491118 isRetracted "false" @default.
- W2087491118 magId "2087491118" @default.
- W2087491118 workType "article" @default.