FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2087518970> ?p ?o ?g. }

• W2087518970 endingPage "2805" @default.
• W2087518970 startingPage "2799" @default.
• W2087518970 abstract "Tantalum was etched in a downstream, atmospheric-pressure plasma. In this process, etching occurred without significant ion bombardment. An etching rate of 6.0±0.5 μm/min was achieved using 14.8 Torr oxygen, 22.4 Torr carbon tetrafluoride, 720±5 Torr helium, 685 W radio frequency power at 13.56 MHz, and a film temperature of 300 °C. The etching rate increased with the applied power, carbon tetrafluoride pressure, oxygen pressure, and residence time of the gas between the electrodes, indicating that the surface reaction depends on the density of reactive fluorine species generated in the plasma. X-ray photoemission spectroscopy revealed that the etched surface was covered with tantalum fluoride and to a lesser extent, tantalum oxide. Based on these observations, a mechanism for tantalum etching is proposed which involves the reaction between fluorine atoms and the adsorbed tantalum fluoride." @default.
• W2087518970 created "2016-06-24" @default.
• W2087518970 creator A5017638858 @default.
• W2087518970 creator A5033639173 @default.
• W2087518970 creator A5065660435 @default.
• W2087518970 creator A5066858153 @default.
• W2087518970 creator A5068738324 @default.
• W2087518970 creator A5072870426 @default.
• W2087518970 creator A5083062687 @default.
• W2087518970 date "2000-11-01" @default.
• W2087518970 modified "2023-09-24" @default.
• W2087518970 title "Tantalum etching with a nonthermal atmospheric-pressure plasma" @default.
• W2087518970 cites W17038012 @default.
• W2087518970 cites W1964108843 @default.
• W2087518970 cites W1971244602 @default.
• W2087518970 cites W1974931441 @default.
• W2087518970 cites W1984277646 @default.
• W2087518970 cites W1991853252 @default.
• W2087518970 cites W1993737814 @default.
• W2087518970 cites W2005571369 @default.
• W2087518970 cites W2021629622 @default.
• W2087518970 cites W2036812893 @default.
• W2087518970 cites W2048916710 @default.
• W2087518970 cites W2059230792 @default.
• W2087518970 cites W2067638071 @default.
• W2087518970 cites W2067639946 @default.
• W2087518970 cites W2080783277 @default.
• W2087518970 cites W2081283937 @default.
• W2087518970 cites W2094427838 @default.
• W2087518970 cites W2108543616 @default.
• W2087518970 cites W2125253611 @default.
• W2087518970 cites W2165759268 @default.
• W2087518970 cites W2204253879 @default.
• W2087518970 doi "https://doi.org/10.1116/1.1310652" @default.
• W2087518970 hasPublicationYear "2000" @default.
• W2087518970 type Work @default.
• W2087518970 sameAs 2087518970 @default.
• W2087518970 citedByCount "45" @default.
• W2087518970 countsByYear W20875189702012 @default.
• W2087518970 countsByYear W20875189702013 @default.
• W2087518970 countsByYear W20875189702015 @default.
• W2087518970 countsByYear W20875189702016 @default.
• W2087518970 countsByYear W20875189702017 @default.
• W2087518970 countsByYear W20875189702018 @default.
• W2087518970 countsByYear W20875189702019 @default.
• W2087518970 countsByYear W20875189702020 @default.
• W2087518970 countsByYear W20875189702021 @default.
• W2087518970 countsByYear W20875189702022 @default.
• W2087518970 crossrefType "journal-article" @default.
• W2087518970 hasAuthorship W2087518970A5017638858 @default.
• W2087518970 hasAuthorship W2087518970A5033639173 @default.
• W2087518970 hasAuthorship W2087518970A5065660435 @default.
• W2087518970 hasAuthorship W2087518970A5066858153 @default.
• W2087518970 hasAuthorship W2087518970A5068738324 @default.
• W2087518970 hasAuthorship W2087518970A5072870426 @default.
• W2087518970 hasAuthorship W2087518970A5083062687 @default.
• W2087518970 hasConcept C100460472 @default.
• W2087518970 hasConcept C107187091 @default.
• W2087518970 hasConcept C111368507 @default.
• W2087518970 hasConcept C113196181 @default.
• W2087518970 hasConcept C121332964 @default.
• W2087518970 hasConcept C127313418 @default.
• W2087518970 hasConcept C127413603 @default.
• W2087518970 hasConcept C130472188 @default.
• W2087518970 hasConcept C171250308 @default.
• W2087518970 hasConcept C175708663 @default.
• W2087518970 hasConcept C179104552 @default.
• W2087518970 hasConcept C185592680 @default.
• W2087518970 hasConcept C191897082 @default.
• W2087518970 hasConcept C192562407 @default.
• W2087518970 hasConcept C200239111 @default.
• W2087518970 hasConcept C2776187506 @default.
• W2087518970 hasConcept C2779227376 @default.
• W2087518970 hasConcept C2780828025 @default.
• W2087518970 hasConcept C2780904289 @default.
• W2087518970 hasConcept C30646810 @default.
• W2087518970 hasConcept C42360764 @default.
• W2087518970 hasConcept C43617362 @default.
• W2087518970 hasConcept C506198293 @default.
• W2087518970 hasConcept C514619126 @default.
• W2087518970 hasConcept C62520636 @default.
• W2087518970 hasConcept C82706917 @default.
• W2087518970 hasConcept C97355855 @default.
• W2087518970 hasConceptScore W2087518970C100460472 @default.
• W2087518970 hasConceptScore W2087518970C107187091 @default.
• W2087518970 hasConceptScore W2087518970C111368507 @default.
• W2087518970 hasConceptScore W2087518970C113196181 @default.
• W2087518970 hasConceptScore W2087518970C121332964 @default.
• W2087518970 hasConceptScore W2087518970C127313418 @default.
• W2087518970 hasConceptScore W2087518970C127413603 @default.
• W2087518970 hasConceptScore W2087518970C130472188 @default.
• W2087518970 hasConceptScore W2087518970C171250308 @default.
• W2087518970 hasConceptScore W2087518970C175708663 @default.
• W2087518970 hasConceptScore W2087518970C179104552 @default.
• W2087518970 hasConceptScore W2087518970C185592680 @default.
• W2087518970 hasConceptScore W2087518970C191897082 @default.
• W2087518970 hasConceptScore W2087518970C192562407 @default.
• W2087518970 hasConceptScore W2087518970C200239111 @default.

• next