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- W2087554700 abstract "We report, for the first time, the laser direct writing of high-conductivity aluminum interconnects from dimethylaluminum hydride (DMAlH). These lines were deposited from this metalorganic gas using a focused deep-ultraviolet laser beam, and the deposition process was studied as a function of several process parameters. Electrical measurements and Auger electron spectroscopy were used to characterize the quality of the laser-deposited films." @default.
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- W2087554700 date "1988-05-30" @default.
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- W2087554700 title "Laser direct writing of aluminum conductors" @default.
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- W2087554700 doi "https://doi.org/10.1063/1.99609" @default.
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