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• W2087557950 endingPage "788" @default.
• W2087557950 startingPage "784" @default.
• W2087557950 abstract "MgO films were deposited by a mid frequency dual magnetron reactive sputtering system composed of two identical magnetrons and powered by a sinusoidal generator. Atomic force microscopy, scanning electron microscopy, X-ray diffraction, and a diode discharge device were used to characterize surface morphology, crystalline structure, and secondary electron emission (γ) coefficient of the films, respectively. The influence of O2 flow rate with a constant Ar flow rate of 120 sccm on the structure and properties of the films was systematically studied. As the O2 flow rate is increased from 5 to 14 sccm, the intensity ratio of the (111) to (200) peak of cubic MgO phase increases significantly, leading to a change of the film texture from a combined (100) and (111) preferred orientation to a highly (111) preferred orientation. The (111) peak center shifts to a larger angle, and the full width at half maximum of the (111) peak decreases greatly, indicating a considerable decrease of defect density in the films. The increases in the relative intensity of the (111) peak and the decrease in the defect density in the films contribute to a remarkable increase in the γ coefficient of the films. Furthermore increase of O2 flow rate results in no significant change in the crystalline structures and the γ coefficient of the MgO films." @default.
• W2087557950 created "2016-06-24" @default.
• W2087557950 creator A5000808995 @default.
• W2087557950 creator A5003875522 @default.
• W2087557950 creator A5012716205 @default.
• W2087557950 creator A5019359896 @default.
• W2087557950 creator A5049488402 @default.
• W2087557950 creator A5071465925 @default.
• W2087557950 date "2004-01-01" @default.
• W2087557950 modified "2023-10-14" @default.
• W2087557950 title "Influence of O2 flow rate on the structural properties of MgO films deposited by dual magnetron sputtering" @default.
• W2087557950 cites W1969595558 @default.
• W2087557950 cites W1970063438 @default.
• W2087557950 cites W1979126352 @default.
• W2087557950 cites W1980697133 @default.
• W2087557950 cites W1988218231 @default.
• W2087557950 cites W1998066767 @default.
• W2087557950 cites W1999461152 @default.
• W2087557950 cites W2010187591 @default.
• W2087557950 cites W2019112599 @default.
• W2087557950 cites W2019598089 @default.
• W2087557950 cites W2025977872 @default.
• W2087557950 cites W2034391726 @default.
• W2087557950 cites W2035149591 @default.
• W2087557950 cites W2045739779 @default.
• W2087557950 cites W2046669549 @default.
• W2087557950 cites W2064985825 @default.
• W2087557950 cites W2073102589 @default.
• W2087557950 cites W2082585574 @default.
• W2087557950 cites W2091446076 @default.
• W2087557950 cites W2303929922 @default.
• W2087557950 doi "https://doi.org/10.1016/j.surfcoat.2003.06.007" @default.
• W2087557950 hasPublicationYear "2004" @default.
• W2087557950 type Work @default.
• W2087557950 sameAs 2087557950 @default.
• W2087557950 citedByCount "19" @default.
• W2087557950 countsByYear W20875579502015 @default.
• W2087557950 countsByYear W20875579502017 @default.
• W2087557950 countsByYear W20875579502018 @default.
• W2087557950 countsByYear W20875579502021 @default.
• W2087557950 crossrefType "journal-article" @default.
• W2087557950 hasAuthorship W2087557950A5000808995 @default.
• W2087557950 hasAuthorship W2087557950A5003875522 @default.
• W2087557950 hasAuthorship W2087557950A5012716205 @default.
• W2087557950 hasAuthorship W2087557950A5019359896 @default.
• W2087557950 hasAuthorship W2087557950A5049488402 @default.
• W2087557950 hasAuthorship W2087557950A5071465925 @default.
• W2087557950 hasConcept C113196181 @default.
• W2087557950 hasConcept C115961682 @default.
• W2087557950 hasConcept C120665830 @default.
• W2087557950 hasConcept C121332964 @default.
• W2087557950 hasConcept C123408415 @default.
• W2087557950 hasConcept C154945302 @default.
• W2087557950 hasConcept C159985019 @default.
• W2087557950 hasConcept C171250308 @default.
• W2087557950 hasConcept C172120300 @default.
• W2087557950 hasConcept C185592680 @default.
• W2087557950 hasConcept C19067145 @default.
• W2087557950 hasConcept C192562407 @default.
• W2087557950 hasConcept C207114421 @default.
• W2087557950 hasConcept C22423302 @default.
• W2087557950 hasConcept C26771246 @default.
• W2087557950 hasConcept C2781195486 @default.
• W2087557950 hasConcept C41008148 @default.
• W2087557950 hasConcept C43617362 @default.
• W2087557950 hasConcept C61427134 @default.
• W2087557950 hasConcept C62520636 @default.
• W2087557950 hasConceptScore W2087557950C113196181 @default.
• W2087557950 hasConceptScore W2087557950C115961682 @default.
• W2087557950 hasConceptScore W2087557950C120665830 @default.
• W2087557950 hasConceptScore W2087557950C121332964 @default.
• W2087557950 hasConceptScore W2087557950C123408415 @default.
• W2087557950 hasConceptScore W2087557950C154945302 @default.
• W2087557950 hasConceptScore W2087557950C159985019 @default.
• W2087557950 hasConceptScore W2087557950C171250308 @default.
• W2087557950 hasConceptScore W2087557950C172120300 @default.
• W2087557950 hasConceptScore W2087557950C185592680 @default.
• W2087557950 hasConceptScore W2087557950C19067145 @default.
• W2087557950 hasConceptScore W2087557950C192562407 @default.
• W2087557950 hasConceptScore W2087557950C207114421 @default.
• W2087557950 hasConceptScore W2087557950C22423302 @default.
• W2087557950 hasConceptScore W2087557950C26771246 @default.
• W2087557950 hasConceptScore W2087557950C2781195486 @default.
• W2087557950 hasConceptScore W2087557950C41008148 @default.
• W2087557950 hasConceptScore W2087557950C43617362 @default.
• W2087557950 hasConceptScore W2087557950C61427134 @default.
• W2087557950 hasConceptScore W2087557950C62520636 @default.
• W2087557950 hasLocation W20875579501 @default.
• W2087557950 hasOpenAccess W2087557950 @default.
• W2087557950 hasPrimaryLocation W20875579501 @default.
• W2087557950 hasRelatedWork W1968373997 @default.
• W2087557950 hasRelatedWork W2020567181 @default.
• W2087557950 hasRelatedWork W2052710927 @default.
• W2087557950 hasRelatedWork W2054683571 @default.
• W2087557950 hasRelatedWork W2316948141 @default.
• W2087557950 hasRelatedWork W2367979151 @default.
• W2087557950 hasRelatedWork W2384738327 @default.
• W2087557950 hasRelatedWork W2393308622 @default.

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