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• W2087631354 abstract "The diffusion of antimony in fine-grained and coarse-grained polycrystalline silicon is studied in the temperature range from 930 to 1150 °C. The radioisotope 125Sb is used to measure concentration-depth profiles with the sectioning technique. Autoradiography is used for making the lateral distribution of the radioactivity over the sample surface visible and for quantitative analysis of the activity-depth profile of distinct grains in the coarse-grained samples. An important role is played by dislocation formation during the diffusion anneal.Die Diffusion des Antimons im feinkornigen und grobkornigen polykristallinen Silizium wird im Temperaturbereich von 930 bis 1150 °C untersucht. Das Radioisotop 125Sb wird in der “sectioning”-Technik fur die Bestimmung der Tiefenprofile der Aktivitat verwendet. Autoradiographie wird benutzt zur Sichtbarmachung der Verteilung von Radioaktivitat uber die Oberflache und fur die quantitative Analyse des Tiefenprofils von bestimmten Kornen in grobkornigen Proben. Die Entstehung von Versetzungen wahrend der Diffusionsheizung spielt eine wichtige Rolle." @default.
• W2087631354 created "2016-06-24" @default.
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• W2087631354 date "1985-05-16" @default.
• W2087631354 modified "2023-09-27" @default.
• W2087631354 title "Diffusion of Antimony (125Sb) in Polycrystalline Silicon" @default.
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• W2087631354 doi "https://doi.org/10.1002/pssa.2210890110" @default.
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