Matches in SemOpenAlex for { <https://semopenalex.org/work/W2087648467> ?p ?o ?g. }
Showing items 1 to 94 of
94
with 100 items per page.
- W2087648467 endingPage "2147" @default.
- W2087648467 startingPage "2144" @default.
- W2087648467 abstract "The LSU Center for Advanced Microstructures and Devices (CAMD) is a DOE-funded materials science and engineering laboratory which will include a normal-conducting compact electron storage ring optimized for the production of soft x rays. The focus of CAMD is the fundamental study of processing and analysis technologies—including x-ray lithography—important to microstructure fabrication and electronic device development. Design details of the storage ring, which is being acquired commercially, are presented in this article." @default.
- W2087648467 created "2016-06-24" @default.
- W2087648467 creator A5013331645 @default.
- W2087648467 creator A5020694756 @default.
- W2087648467 creator A5023568988 @default.
- W2087648467 creator A5028720077 @default.
- W2087648467 creator A5051868637 @default.
- W2087648467 creator A5078424323 @default.
- W2087648467 date "1989-07-01" @default.
- W2087648467 modified "2023-10-16" @default.
- W2087648467 title "LSU Center for Advanced Microstructures and Devices" @default.
- W2087648467 cites W1578730679 @default.
- W2087648467 cites W1631949105 @default.
- W2087648467 cites W1980740879 @default.
- W2087648467 cites W2000076116 @default.
- W2087648467 doi "https://doi.org/10.1063/1.1140804" @default.
- W2087648467 hasPublicationYear "1989" @default.
- W2087648467 type Work @default.
- W2087648467 sameAs 2087648467 @default.
- W2087648467 citedByCount "4" @default.
- W2087648467 crossrefType "journal-article" @default.
- W2087648467 hasAuthorship W2087648467A5013331645 @default.
- W2087648467 hasAuthorship W2087648467A5020694756 @default.
- W2087648467 hasAuthorship W2087648467A5023568988 @default.
- W2087648467 hasAuthorship W2087648467A5028720077 @default.
- W2087648467 hasAuthorship W2087648467A5051868637 @default.
- W2087648467 hasAuthorship W2087648467A5078424323 @default.
- W2087648467 hasConcept C120665830 @default.
- W2087648467 hasConcept C121332964 @default.
- W2087648467 hasConcept C127413603 @default.
- W2087648467 hasConcept C136525101 @default.
- W2087648467 hasConcept C142724271 @default.
- W2087648467 hasConcept C159985019 @default.
- W2087648467 hasConcept C168834538 @default.
- W2087648467 hasConcept C171250308 @default.
- W2087648467 hasConcept C178790620 @default.
- W2087648467 hasConcept C185592680 @default.
- W2087648467 hasConcept C192209626 @default.
- W2087648467 hasConcept C192562407 @default.
- W2087648467 hasConcept C204223013 @default.
- W2087648467 hasConcept C204787440 @default.
- W2087648467 hasConcept C2776595292 @default.
- W2087648467 hasConcept C2779463800 @default.
- W2087648467 hasConcept C2780378348 @default.
- W2087648467 hasConcept C41008148 @default.
- W2087648467 hasConcept C49040817 @default.
- W2087648467 hasConcept C61696701 @default.
- W2087648467 hasConcept C71924100 @default.
- W2087648467 hasConcept C8010536 @default.
- W2087648467 hasConcept C87976508 @default.
- W2087648467 hasConceptScore W2087648467C120665830 @default.
- W2087648467 hasConceptScore W2087648467C121332964 @default.
- W2087648467 hasConceptScore W2087648467C127413603 @default.
- W2087648467 hasConceptScore W2087648467C136525101 @default.
- W2087648467 hasConceptScore W2087648467C142724271 @default.
- W2087648467 hasConceptScore W2087648467C159985019 @default.
- W2087648467 hasConceptScore W2087648467C168834538 @default.
- W2087648467 hasConceptScore W2087648467C171250308 @default.
- W2087648467 hasConceptScore W2087648467C178790620 @default.
- W2087648467 hasConceptScore W2087648467C185592680 @default.
- W2087648467 hasConceptScore W2087648467C192209626 @default.
- W2087648467 hasConceptScore W2087648467C192562407 @default.
- W2087648467 hasConceptScore W2087648467C204223013 @default.
- W2087648467 hasConceptScore W2087648467C204787440 @default.
- W2087648467 hasConceptScore W2087648467C2776595292 @default.
- W2087648467 hasConceptScore W2087648467C2779463800 @default.
- W2087648467 hasConceptScore W2087648467C2780378348 @default.
- W2087648467 hasConceptScore W2087648467C41008148 @default.
- W2087648467 hasConceptScore W2087648467C49040817 @default.
- W2087648467 hasConceptScore W2087648467C61696701 @default.
- W2087648467 hasConceptScore W2087648467C71924100 @default.
- W2087648467 hasConceptScore W2087648467C8010536 @default.
- W2087648467 hasConceptScore W2087648467C87976508 @default.
- W2087648467 hasIssue "7" @default.
- W2087648467 hasLocation W20876484671 @default.
- W2087648467 hasOpenAccess W2087648467 @default.
- W2087648467 hasPrimaryLocation W20876484671 @default.
- W2087648467 hasRelatedWork W1503882589 @default.
- W2087648467 hasRelatedWork W1679770080 @default.
- W2087648467 hasRelatedWork W1972254111 @default.
- W2087648467 hasRelatedWork W2018305405 @default.
- W2087648467 hasRelatedWork W2053623882 @default.
- W2087648467 hasRelatedWork W2063388647 @default.
- W2087648467 hasRelatedWork W2353409022 @default.
- W2087648467 hasRelatedWork W2491222380 @default.
- W2087648467 hasRelatedWork W2899084033 @default.
- W2087648467 hasRelatedWork W3015963878 @default.
- W2087648467 hasVolume "60" @default.
- W2087648467 isParatext "false" @default.
- W2087648467 isRetracted "false" @default.
- W2087648467 magId "2087648467" @default.
- W2087648467 workType "article" @default.