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- W2087669444 abstract "A study of the deposition rates of W thin films by the simultaneous irradiation of a Si substrate with 20 keV ions of Ne, Ar, Kr, and Xe and a flux of molecular W(CO)6 and measurement of the incorporated fraction of the irradiating ion species is described. It is shown that the measured growth rate contains a contribution due to sputtering of the film and, when this is accounted for, the deposition rate increases with increasing ion mass. The ion incorporation rate, on the other hand, decreases with increasing mass and a simple model is developed to explain this behavior in terms of the ratio of individual ion incorporation probability to the net metal atomic growth rate, which compares favorably with the observations." @default.
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- W2087669444 date "1999-09-01" @default.
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- W2087669444 title "The species dependence of inert gas ion incorporation in the ion-induced deposition of tungsten" @default.
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- W2087669444 doi "https://doi.org/10.1063/1.371137" @default.
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