Matches in SemOpenAlex for { <https://semopenalex.org/work/W2087672208> ?p ?o ?g. }
- W2087672208 endingPage "185402" @default.
- W2087672208 startingPage "185402" @default.
- W2087672208 abstract "We measure the thermal conductivity of a 17.5-nm-thick single crystalline Si layer by using a suspended structure developed from a silicon-on-insulator wafer, in which the Si layer bridges the suspended platforms. The obtained value of 19 Wm(-1) K(-1) at room temperature represents a tenfold reduction with respect to bulk Si. This design paves the way for subsequent lateral nanostructuration of the layer with lithographic techniques, to define different geometries such as Si nanowires, nanostrips or phononic grids. As a proof of concept, nanostrips of 0.5 × 10 μm have been defined by focused ion beam (FIB) in the ultrathin Si layer. After the FIB cutting process with Ga ions at 30 kV and 100 pA, the measured thermal conductivity dramatically decreased to 1.7 Wm(-1) K(-1), indicating that the structure became severely damaged (amorphous). Re-crystallization of the structure was promoted by laser annealing while monitoring the Raman spectra. The thermal conductivity of the layer increased again to a value of 9.5 Wm(-1) K(-1) at room temperature, below that of the single crystalline material due to phonon scattering at the grain boundaries." @default.
- W2087672208 created "2016-06-24" @default.
- W2087672208 creator A5002711780 @default.
- W2087672208 creator A5005232497 @default.
- W2087672208 creator A5006455530 @default.
- W2087672208 creator A5007048139 @default.
- W2087672208 creator A5022704527 @default.
- W2087672208 creator A5025322259 @default.
- W2087672208 creator A5030311859 @default.
- W2087672208 creator A5039955431 @default.
- W2087672208 creator A5081489452 @default.
- W2087672208 creator A5085238006 @default.
- W2087672208 creator A5091361472 @default.
- W2087672208 date "2014-04-15" @default.
- W2087672208 modified "2023-10-18" @default.
- W2087672208 title "In-plane thermal conductivity of sub-20 nm thick suspended mono-crystalline Si layers" @default.
- W2087672208 cites W1511808748 @default.
- W2087672208 cites W1523572128 @default.
- W2087672208 cites W1981560184 @default.
- W2087672208 cites W1982145551 @default.
- W2087672208 cites W1994176775 @default.
- W2087672208 cites W2004751397 @default.
- W2087672208 cites W2008183415 @default.
- W2087672208 cites W2021208262 @default.
- W2087672208 cites W2028285928 @default.
- W2087672208 cites W2030086321 @default.
- W2087672208 cites W2040661631 @default.
- W2087672208 cites W2047507725 @default.
- W2087672208 cites W2047564017 @default.
- W2087672208 cites W2048779441 @default.
- W2087672208 cites W2064651168 @default.
- W2087672208 cites W2070093297 @default.
- W2087672208 cites W2071524594 @default.
- W2087672208 cites W2075567099 @default.
- W2087672208 cites W2075937489 @default.
- W2087672208 cites W2080296873 @default.
- W2087672208 cites W2080778956 @default.
- W2087672208 cites W2080802426 @default.
- W2087672208 cites W2083567041 @default.
- W2087672208 cites W2086218869 @default.
- W2087672208 cites W2092333682 @default.
- W2087672208 cites W2092941047 @default.
- W2087672208 cites W2094464727 @default.
- W2087672208 cites W2119450556 @default.
- W2087672208 cites W2145208973 @default.
- W2087672208 cites W2149435575 @default.
- W2087672208 cites W2165570339 @default.
- W2087672208 cites W2169740358 @default.
- W2087672208 cites W2314352428 @default.
- W2087672208 cites W3101746025 @default.
- W2087672208 cites W3104767360 @default.
- W2087672208 cites W4233734903 @default.
- W2087672208 cites W4256335425 @default.
- W2087672208 doi "https://doi.org/10.1088/0957-4484/25/18/185402" @default.
- W2087672208 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/24737220" @default.
- W2087672208 hasPublicationYear "2014" @default.
- W2087672208 type Work @default.
- W2087672208 sameAs 2087672208 @default.
- W2087672208 citedByCount "30" @default.
- W2087672208 countsByYear W20876722082014 @default.
- W2087672208 countsByYear W20876722082015 @default.
- W2087672208 countsByYear W20876722082016 @default.
- W2087672208 countsByYear W20876722082017 @default.
- W2087672208 countsByYear W20876722082018 @default.
- W2087672208 countsByYear W20876722082019 @default.
- W2087672208 countsByYear W20876722082020 @default.
- W2087672208 countsByYear W20876722082021 @default.
- W2087672208 countsByYear W20876722082022 @default.
- W2087672208 countsByYear W20876722082023 @default.
- W2087672208 crossrefType "journal-article" @default.
- W2087672208 hasAuthorship W2087672208A5002711780 @default.
- W2087672208 hasAuthorship W2087672208A5005232497 @default.
- W2087672208 hasAuthorship W2087672208A5006455530 @default.
- W2087672208 hasAuthorship W2087672208A5007048139 @default.
- W2087672208 hasAuthorship W2087672208A5022704527 @default.
- W2087672208 hasAuthorship W2087672208A5025322259 @default.
- W2087672208 hasAuthorship W2087672208A5030311859 @default.
- W2087672208 hasAuthorship W2087672208A5039955431 @default.
- W2087672208 hasAuthorship W2087672208A5081489452 @default.
- W2087672208 hasAuthorship W2087672208A5085238006 @default.
- W2087672208 hasAuthorship W2087672208A5091361472 @default.
- W2087672208 hasConcept C120665830 @default.
- W2087672208 hasConcept C121332964 @default.
- W2087672208 hasConcept C127413603 @default.
- W2087672208 hasConcept C131540310 @default.
- W2087672208 hasConcept C145148216 @default.
- W2087672208 hasConcept C147789679 @default.
- W2087672208 hasConcept C159985019 @default.
- W2087672208 hasConcept C160671074 @default.
- W2087672208 hasConcept C161866238 @default.
- W2087672208 hasConcept C185592680 @default.
- W2087672208 hasConcept C192562407 @default.
- W2087672208 hasConcept C203036418 @default.
- W2087672208 hasConcept C2777855556 @default.
- W2087672208 hasConcept C40003534 @default.
- W2087672208 hasConcept C42360764 @default.
- W2087672208 hasConcept C49040817 @default.
- W2087672208 hasConcept C50774322 @default.