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- W2087680492 abstract "Buried Si1−xGex layers grown on Si at elevated temperatures of 700 to 800 °C generally exhibit x-ray rocking curves which are significantly broader than those predicted for perfect crystals, suggesting that the layers are strain-relieved. However, calculations using these rocking curves show the materials to be either nearly- or fully-strained. The source of x-ray broadening accompanied by high strain is found to be an abrupt, thermally-induced fragmentation of the layer into small, slightly misoriented regions during the cool-down, such that the as-grown strain remains unchanged. The fragments are typically rectangles a few micrometers wide, with well-defined boundaries along [110]-type directions." @default.
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- W2087680492 date "1995-10-30" @default.
- W2087680492 modified "2023-09-23" @default.
- W2087680492 title "Thermal stress-induced, high-strain fragmentation of buried SiGe layers grown on Si" @default.
- W2087680492 doi "https://doi.org/10.1063/1.114290" @default.
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