Matches in SemOpenAlex for { <https://semopenalex.org/work/W2087712681> ?p ?o ?g. }
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with 100 items per page.
- W2087712681 endingPage "2658" @default.
- W2087712681 startingPage "2651" @default.
- W2087712681 abstract "While off-axis illumination has been demonstrated to improve contrast and depth of focus for low k1, packed line–space (L/S) patterns [S. Asai, I. Hanyu, and K. Hikosaka, J. Vac. Sci. Technol. B 9, 2788 (1991); K. Kamon et al., Jpn. Appl. Phys. 30, 3021 (1991); K. Tounai et al., Proc. SPIE 1674, 753 (1992)], application of this approach to the more discordant patternings associated with random logic levels is suspect. We introduce a conventional mask ‘‘assist’’ feature technique that extends the off-axis L/S enhancements to more isolated features (both spaces and lines). It will be shown that the effective process window is substantially improved and exhibited proximity effects are mitigated for this technique. Also, a comparison to a phase-shifting mask solution for the patterning mix expected in random logic layouts is performed. Simulation results are verified on a 0.53 NA, DUV stepper." @default.
- W2087712681 created "2016-06-24" @default.
- W2087712681 creator A5014951315 @default.
- W2087712681 creator A5049646262 @default.
- W2087712681 creator A5056670721 @default.
- W2087712681 creator A5076298154 @default.
- W2087712681 date "1993-11-01" @default.
- W2087712681 modified "2023-10-06" @default.
- W2087712681 title "Mask assisted off-axis illumination technique for random logic" @default.
- W2087712681 doi "https://doi.org/10.1116/1.586579" @default.
- W2087712681 hasPublicationYear "1993" @default.
- W2087712681 type Work @default.
- W2087712681 sameAs 2087712681 @default.
- W2087712681 citedByCount "32" @default.
- W2087712681 countsByYear W20877126812012 @default.
- W2087712681 countsByYear W20877126812013 @default.
- W2087712681 countsByYear W20877126812014 @default.
- W2087712681 countsByYear W20877126812016 @default.
- W2087712681 countsByYear W20877126812018 @default.
- W2087712681 countsByYear W20877126812021 @default.
- W2087712681 countsByYear W20877126812022 @default.
- W2087712681 crossrefType "journal-article" @default.
- W2087712681 hasAuthorship W2087712681A5014951315 @default.
- W2087712681 hasAuthorship W2087712681A5049646262 @default.
- W2087712681 hasAuthorship W2087712681A5056670721 @default.
- W2087712681 hasAuthorship W2087712681A5076298154 @default.
- W2087712681 hasConcept C11413529 @default.
- W2087712681 hasConcept C120665830 @default.
- W2087712681 hasConcept C121332964 @default.
- W2087712681 hasConcept C138885662 @default.
- W2087712681 hasConcept C187504802 @default.
- W2087712681 hasConcept C192209626 @default.
- W2087712681 hasConcept C198352243 @default.
- W2087712681 hasConcept C199360897 @default.
- W2087712681 hasConcept C2524010 @default.
- W2087712681 hasConcept C2776401178 @default.
- W2087712681 hasConcept C2777441419 @default.
- W2087712681 hasConcept C33923547 @default.
- W2087712681 hasConcept C41008148 @default.
- W2087712681 hasConcept C41895202 @default.
- W2087712681 hasConcept C98045186 @default.
- W2087712681 hasConceptScore W2087712681C11413529 @default.
- W2087712681 hasConceptScore W2087712681C120665830 @default.
- W2087712681 hasConceptScore W2087712681C121332964 @default.
- W2087712681 hasConceptScore W2087712681C138885662 @default.
- W2087712681 hasConceptScore W2087712681C187504802 @default.
- W2087712681 hasConceptScore W2087712681C192209626 @default.
- W2087712681 hasConceptScore W2087712681C198352243 @default.
- W2087712681 hasConceptScore W2087712681C199360897 @default.
- W2087712681 hasConceptScore W2087712681C2524010 @default.
- W2087712681 hasConceptScore W2087712681C2776401178 @default.
- W2087712681 hasConceptScore W2087712681C2777441419 @default.
- W2087712681 hasConceptScore W2087712681C33923547 @default.
- W2087712681 hasConceptScore W2087712681C41008148 @default.
- W2087712681 hasConceptScore W2087712681C41895202 @default.
- W2087712681 hasConceptScore W2087712681C98045186 @default.
- W2087712681 hasIssue "6" @default.
- W2087712681 hasLocation W20877126811 @default.
- W2087712681 hasOpenAccess W2087712681 @default.
- W2087712681 hasPrimaryLocation W20877126811 @default.
- W2087712681 hasRelatedWork W1979532301 @default.
- W2087712681 hasRelatedWork W2006894606 @default.
- W2087712681 hasRelatedWork W2051634624 @default.
- W2087712681 hasRelatedWork W2063782820 @default.
- W2087712681 hasRelatedWork W2069042492 @default.
- W2087712681 hasRelatedWork W2079742202 @default.
- W2087712681 hasRelatedWork W2086507131 @default.
- W2087712681 hasRelatedWork W2136802091 @default.
- W2087712681 hasRelatedWork W2270310794 @default.
- W2087712681 hasRelatedWork W3180935739 @default.
- W2087712681 hasVolume "11" @default.
- W2087712681 isParatext "false" @default.
- W2087712681 isRetracted "false" @default.
- W2087712681 magId "2087712681" @default.
- W2087712681 workType "article" @default.