Matches in SemOpenAlex for { <https://semopenalex.org/work/W2087740339> ?p ?o ?g. }
Showing items 1 to 86 of
86
with 100 items per page.
- W2087740339 endingPage "264" @default.
- W2087740339 startingPage "258" @default.
- W2087740339 abstract "PZT piezoelectric very thin films suitable for a microactuator have been deposited onto Invar alloy substrate using a high-temperature RF magnetron sputtering technique. PZT thin films must be deposited onto conductive substrate for a monomorph or a bimorph actuator. The chemical composition and the crystalline structure of these films were measured by ESCA and XRD, respectively. The chemical composition of PZT deposited stoichiometrically was almost the same as commercially-produced bulk PZT. Crystal planes (1 1 0) and (1 1 1) of PZT perovskite structure were observed in XRD analysis. When the substrate was heated to above 600 °C, SEM revealed only a very small number of pinholes on the surface. A thin (500 nm) film actuator has been characterized by measuring the piezoelectric property using a Laser Doppler Vibrograph. It was confirmed that the piezoelectric property has a linear relationship with the grain size, which also increased with the substrate temperature. The piezoelectric property of deposited PZT thin films showed a good agreement with a quoted value of bulk PZT, when the substrates were heated to 600 °C." @default.
- W2087740339 created "2016-06-24" @default.
- W2087740339 creator A5013070173 @default.
- W2087740339 creator A5047012722 @default.
- W2087740339 creator A5059114308 @default.
- W2087740339 date "2003-07-01" @default.
- W2087740339 modified "2023-10-16" @default.
- W2087740339 title "Development of RF magnetron sputtering method to fabricate PZT thin film actuator" @default.
- W2087740339 cites W1967406975 @default.
- W2087740339 cites W1992937992 @default.
- W2087740339 cites W2001416172 @default.
- W2087740339 cites W2004612084 @default.
- W2087740339 cites W2043045331 @default.
- W2087740339 cites W2079393022 @default.
- W2087740339 doi "https://doi.org/10.1016/s0141-6359(03)00006-0" @default.
- W2087740339 hasPublicationYear "2003" @default.
- W2087740339 type Work @default.
- W2087740339 sameAs 2087740339 @default.
- W2087740339 citedByCount "21" @default.
- W2087740339 countsByYear W20877403392012 @default.
- W2087740339 countsByYear W20877403392013 @default.
- W2087740339 countsByYear W20877403392014 @default.
- W2087740339 countsByYear W20877403392015 @default.
- W2087740339 countsByYear W20877403392017 @default.
- W2087740339 countsByYear W20877403392018 @default.
- W2087740339 countsByYear W20877403392019 @default.
- W2087740339 countsByYear W20877403392021 @default.
- W2087740339 countsByYear W20877403392022 @default.
- W2087740339 crossrefType "journal-article" @default.
- W2087740339 hasAuthorship W2087740339A5013070173 @default.
- W2087740339 hasAuthorship W2087740339A5047012722 @default.
- W2087740339 hasAuthorship W2087740339A5059114308 @default.
- W2087740339 hasConcept C100082104 @default.
- W2087740339 hasConcept C111368507 @default.
- W2087740339 hasConcept C119599485 @default.
- W2087740339 hasConcept C127313418 @default.
- W2087740339 hasConcept C127413603 @default.
- W2087740339 hasConcept C159985019 @default.
- W2087740339 hasConcept C171250308 @default.
- W2087740339 hasConcept C172707124 @default.
- W2087740339 hasConcept C19067145 @default.
- W2087740339 hasConcept C192562407 @default.
- W2087740339 hasConcept C22423302 @default.
- W2087740339 hasConcept C2777289219 @default.
- W2087740339 hasConcept C2778393539 @default.
- W2087740339 hasConcept C49040817 @default.
- W2087740339 hasConcept C58373989 @default.
- W2087740339 hasConcept C61427134 @default.
- W2087740339 hasConceptScore W2087740339C100082104 @default.
- W2087740339 hasConceptScore W2087740339C111368507 @default.
- W2087740339 hasConceptScore W2087740339C119599485 @default.
- W2087740339 hasConceptScore W2087740339C127313418 @default.
- W2087740339 hasConceptScore W2087740339C127413603 @default.
- W2087740339 hasConceptScore W2087740339C159985019 @default.
- W2087740339 hasConceptScore W2087740339C171250308 @default.
- W2087740339 hasConceptScore W2087740339C172707124 @default.
- W2087740339 hasConceptScore W2087740339C19067145 @default.
- W2087740339 hasConceptScore W2087740339C192562407 @default.
- W2087740339 hasConceptScore W2087740339C22423302 @default.
- W2087740339 hasConceptScore W2087740339C2777289219 @default.
- W2087740339 hasConceptScore W2087740339C2778393539 @default.
- W2087740339 hasConceptScore W2087740339C49040817 @default.
- W2087740339 hasConceptScore W2087740339C58373989 @default.
- W2087740339 hasConceptScore W2087740339C61427134 @default.
- W2087740339 hasFunder F4320320912 @default.
- W2087740339 hasIssue "3" @default.
- W2087740339 hasLocation W20877403391 @default.
- W2087740339 hasOpenAccess W2087740339 @default.
- W2087740339 hasPrimaryLocation W20877403391 @default.
- W2087740339 hasRelatedWork W1964409163 @default.
- W2087740339 hasRelatedWork W1971345677 @default.
- W2087740339 hasRelatedWork W1974679589 @default.
- W2087740339 hasRelatedWork W1986358389 @default.
- W2087740339 hasRelatedWork W2000254325 @default.
- W2087740339 hasRelatedWork W2027557284 @default.
- W2087740339 hasRelatedWork W2073652605 @default.
- W2087740339 hasRelatedWork W2666796473 @default.
- W2087740339 hasRelatedWork W3136669922 @default.
- W2087740339 hasRelatedWork W319229185 @default.
- W2087740339 hasVolume "27" @default.
- W2087740339 isParatext "false" @default.
- W2087740339 isRetracted "false" @default.
- W2087740339 magId "2087740339" @default.
- W2087740339 workType "article" @default.