Matches in SemOpenAlex for { <https://semopenalex.org/work/W2087798383> ?p ?o ?g. }
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- W2087798383 endingPage "2393" @default.
- W2087798383 startingPage "2393" @default.
- W2087798383 abstract "One of the recent applications of ion sources is their use for ion beam assisted deposition of thin films and coatings. This method combines a coating technique such as evaporation or sputtering with bombardment with ions in the keV energy range. The required ions with defined energy, flux, and impact angle are delivered from an ion source. An apparatus for ion beam assisted evaporation with a duoplasmatron ion source is described. The features of the duoplasmatron with respect to application for ion beam assisted deposition such as beam shape, uniformity and intensity, ion-to-neutral ratio, and focused and defocused mode are discussed." @default.
- W2087798383 created "2016-06-24" @default.
- W2087798383 creator A5026401402 @default.
- W2087798383 creator A5055325600 @default.
- W2087798383 creator A5057056257 @default.
- W2087798383 creator A5074479063 @default.
- W2087798383 creator A5076405449 @default.
- W2087798383 creator A5078885733 @default.
- W2087798383 creator A5083177557 @default.
- W2087798383 date "1992-04-01" @default.
- W2087798383 modified "2023-09-27" @default.
- W2087798383 title "Ion beam assisted deposition with a duoplasmatron (abstract)<sup>a)</sup>" @default.
- W2087798383 doi "https://doi.org/10.1063/1.1142938" @default.
- W2087798383 hasPublicationYear "1992" @default.
- W2087798383 type Work @default.
- W2087798383 sameAs 2087798383 @default.
- W2087798383 citedByCount "2" @default.
- W2087798383 crossrefType "journal-article" @default.
- W2087798383 hasAuthorship W2087798383A5026401402 @default.
- W2087798383 hasAuthorship W2087798383A5055325600 @default.
- W2087798383 hasAuthorship W2087798383A5057056257 @default.
- W2087798383 hasAuthorship W2087798383A5074479063 @default.
- W2087798383 hasAuthorship W2087798383A5076405449 @default.
- W2087798383 hasAuthorship W2087798383A5078885733 @default.
- W2087798383 hasAuthorship W2087798383A5083177557 @default.
- W2087798383 hasConcept C107920040 @default.
- W2087798383 hasConcept C113196181 @default.
- W2087798383 hasConcept C121332964 @default.
- W2087798383 hasConcept C145148216 @default.
- W2087798383 hasConcept C151730666 @default.
- W2087798383 hasConcept C159985019 @default.
- W2087798383 hasConcept C161866238 @default.
- W2087798383 hasConcept C171250308 @default.
- W2087798383 hasConcept C184779094 @default.
- W2087798383 hasConcept C185592680 @default.
- W2087798383 hasConcept C188224857 @default.
- W2087798383 hasConcept C19067145 @default.
- W2087798383 hasConcept C192562407 @default.
- W2087798383 hasConcept C204323151 @default.
- W2087798383 hasConcept C22423302 @default.
- W2087798383 hasConcept C2781463530 @default.
- W2087798383 hasConcept C2816523 @default.
- W2087798383 hasConcept C41823505 @default.
- W2087798383 hasConcept C43617362 @default.
- W2087798383 hasConcept C50774322 @default.
- W2087798383 hasConcept C61441594 @default.
- W2087798383 hasConcept C62520636 @default.
- W2087798383 hasConcept C64297162 @default.
- W2087798383 hasConcept C79176676 @default.
- W2087798383 hasConcept C86803240 @default.
- W2087798383 hasConcept C93106096 @default.
- W2087798383 hasConcept C97355855 @default.
- W2087798383 hasConceptScore W2087798383C107920040 @default.
- W2087798383 hasConceptScore W2087798383C113196181 @default.
- W2087798383 hasConceptScore W2087798383C121332964 @default.
- W2087798383 hasConceptScore W2087798383C145148216 @default.
- W2087798383 hasConceptScore W2087798383C151730666 @default.
- W2087798383 hasConceptScore W2087798383C159985019 @default.
- W2087798383 hasConceptScore W2087798383C161866238 @default.
- W2087798383 hasConceptScore W2087798383C171250308 @default.
- W2087798383 hasConceptScore W2087798383C184779094 @default.
- W2087798383 hasConceptScore W2087798383C185592680 @default.
- W2087798383 hasConceptScore W2087798383C188224857 @default.
- W2087798383 hasConceptScore W2087798383C19067145 @default.
- W2087798383 hasConceptScore W2087798383C192562407 @default.
- W2087798383 hasConceptScore W2087798383C204323151 @default.
- W2087798383 hasConceptScore W2087798383C22423302 @default.
- W2087798383 hasConceptScore W2087798383C2781463530 @default.
- W2087798383 hasConceptScore W2087798383C2816523 @default.
- W2087798383 hasConceptScore W2087798383C41823505 @default.
- W2087798383 hasConceptScore W2087798383C43617362 @default.
- W2087798383 hasConceptScore W2087798383C50774322 @default.
- W2087798383 hasConceptScore W2087798383C61441594 @default.
- W2087798383 hasConceptScore W2087798383C62520636 @default.
- W2087798383 hasConceptScore W2087798383C64297162 @default.
- W2087798383 hasConceptScore W2087798383C79176676 @default.
- W2087798383 hasConceptScore W2087798383C86803240 @default.
- W2087798383 hasConceptScore W2087798383C93106096 @default.
- W2087798383 hasConceptScore W2087798383C97355855 @default.
- W2087798383 hasIssue "4" @default.
- W2087798383 hasLocation W20877983831 @default.
- W2087798383 hasOpenAccess W2087798383 @default.
- W2087798383 hasPrimaryLocation W20877983831 @default.
- W2087798383 hasRelatedWork W1239185118 @default.
- W2087798383 hasRelatedWork W1978936450 @default.
- W2087798383 hasRelatedWork W1993156593 @default.
- W2087798383 hasRelatedWork W2001828908 @default.
- W2087798383 hasRelatedWork W2004648794 @default.
- W2087798383 hasRelatedWork W2013592421 @default.
- W2087798383 hasRelatedWork W2022893473 @default.
- W2087798383 hasRelatedWork W2058938207 @default.
- W2087798383 hasRelatedWork W2087798383 @default.
- W2087798383 hasRelatedWork W633375570 @default.
- W2087798383 hasVolume "63" @default.
- W2087798383 isParatext "false" @default.
- W2087798383 isRetracted "false" @default.
- W2087798383 magId "2087798383" @default.
- W2087798383 workType "article" @default.