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- W2087890669 abstract "We describe the detailed design of a geometrically desensitized interferometer using two transmission diffraction gratings. A number of models of the instrument are used to eliminate object ghosts and stray light contributions. We then investigate analytically the influence of object slope variations on the instrument precision. We show that the part can be located at a measurement location where the metrology is optimized. Analytical and raytracing models demonstrate excellent agreement with experiment." @default.
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- W2087890669 date "1998-12-29" @default.
- W2087890669 modified "2023-09-23" @default.
- W2087890669 title "<title>Characterization of a geometrically desensitized interferometer for flatness testing</title>" @default.
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- W2087890669 doi "https://doi.org/10.1117/12.334344" @default.
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