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- W2087978654 abstract "Reactive sputtering of targets of certain noble (Au, Pt) and oxidizable metals (Co, Sn) are studied by glow discharge mass spectrometry (GDMS) and by x-ray diffraction. It is concluded that (1) oxidation of the target occurs for Sn and Co, (2) a plasma reaction occurs for every metal, especially Au, and (3) a chemical decomposition of AuO and an oxidation to higher states occurs on the substrate for Pt, Co, and Sn." @default.
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- W2087978654 date "1978-12-01" @default.
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- W2087978654 title "Some experimental aspects of dc reactive sputtering" @default.
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- W2087978654 doi "https://doi.org/10.1063/1.324546" @default.
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