Matches in SemOpenAlex for { <https://semopenalex.org/work/W2088020372> ?p ?o ?g. }
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98
with 100 items per page.
- W2088020372 endingPage "1866" @default.
- W2088020372 startingPage "1862" @default.
- W2088020372 abstract "This paper presents the effects imposed on the reliability of advanced-process CMOS devices, specifically the NBTI degradation, subsequent to the integration of laser annealing (LA) in the process flow of a 45nm HfO 2 /TiN gate stack PMOS device. The laser annealing temperatures were varied from 900°C to 1350°C. The effects imposed on the NBTI degradation of the device were comprehensively analyzed in which the shifts of the threshold voltage and drain current degradation were observed. The analysis was extended to the effects of the conventional RTA as opposed to the advanced laser annealing process. It was observed that the incorporation of laser annealing in the process flow of the device enhances the NBTI degradation rate of the device, in contrast to the integration of the conventional RTA. Laser annealing subsequent to spike-anneal is observed to improve the reliability performance of the transistor at high negative biases." @default.
- W2088020372 created "2016-06-24" @default.
- W2088020372 creator A5014004954 @default.
- W2088020372 creator A5067355528 @default.
- W2088020372 creator A5087105725 @default.
- W2088020372 date "2011-02-01" @default.
- W2088020372 modified "2023-09-27" @default.
- W2088020372 title "Laser Anneal-Induced Effects on the NBTI Degradation of Advanced-Process 45nm High-K PMOS" @default.
- W2088020372 cites W1973659025 @default.
- W2088020372 cites W1985909315 @default.
- W2088020372 cites W2007962180 @default.
- W2088020372 cites W2038985542 @default.
- W2088020372 cites W2046906956 @default.
- W2088020372 cites W2066958331 @default.
- W2088020372 cites W2073480887 @default.
- W2088020372 cites W2076334008 @default.
- W2088020372 cites W2083349737 @default.
- W2088020372 cites W2090544540 @default.
- W2088020372 cites W2101408257 @default.
- W2088020372 cites W2135358483 @default.
- W2088020372 cites W2146818893 @default.
- W2088020372 cites W2167895436 @default.
- W2088020372 doi "https://doi.org/10.4028/www.scientific.net/amr.189-193.1862" @default.
- W2088020372 hasPublicationYear "2011" @default.
- W2088020372 type Work @default.
- W2088020372 sameAs 2088020372 @default.
- W2088020372 citedByCount "5" @default.
- W2088020372 countsByYear W20880203722012 @default.
- W2088020372 countsByYear W20880203722015 @default.
- W2088020372 countsByYear W20880203722017 @default.
- W2088020372 crossrefType "journal-article" @default.
- W2088020372 hasAuthorship W2088020372A5014004954 @default.
- W2088020372 hasAuthorship W2088020372A5067355528 @default.
- W2088020372 hasAuthorship W2088020372A5087105725 @default.
- W2088020372 hasConcept C119599485 @default.
- W2088020372 hasConcept C120665830 @default.
- W2088020372 hasConcept C121332964 @default.
- W2088020372 hasConcept C127413603 @default.
- W2088020372 hasConcept C163258240 @default.
- W2088020372 hasConcept C165801399 @default.
- W2088020372 hasConcept C172385210 @default.
- W2088020372 hasConcept C191897082 @default.
- W2088020372 hasConcept C192562407 @default.
- W2088020372 hasConcept C195370968 @default.
- W2088020372 hasConcept C2361726 @default.
- W2088020372 hasConcept C24326235 @default.
- W2088020372 hasConcept C27050352 @default.
- W2088020372 hasConcept C2777855556 @default.
- W2088020372 hasConcept C2779679103 @default.
- W2088020372 hasConcept C43214815 @default.
- W2088020372 hasConcept C46362747 @default.
- W2088020372 hasConcept C49040817 @default.
- W2088020372 hasConcept C51140833 @default.
- W2088020372 hasConcept C520434653 @default.
- W2088020372 hasConcept C525849907 @default.
- W2088020372 hasConcept C62520636 @default.
- W2088020372 hasConceptScore W2088020372C119599485 @default.
- W2088020372 hasConceptScore W2088020372C120665830 @default.
- W2088020372 hasConceptScore W2088020372C121332964 @default.
- W2088020372 hasConceptScore W2088020372C127413603 @default.
- W2088020372 hasConceptScore W2088020372C163258240 @default.
- W2088020372 hasConceptScore W2088020372C165801399 @default.
- W2088020372 hasConceptScore W2088020372C172385210 @default.
- W2088020372 hasConceptScore W2088020372C191897082 @default.
- W2088020372 hasConceptScore W2088020372C192562407 @default.
- W2088020372 hasConceptScore W2088020372C195370968 @default.
- W2088020372 hasConceptScore W2088020372C2361726 @default.
- W2088020372 hasConceptScore W2088020372C24326235 @default.
- W2088020372 hasConceptScore W2088020372C27050352 @default.
- W2088020372 hasConceptScore W2088020372C2777855556 @default.
- W2088020372 hasConceptScore W2088020372C2779679103 @default.
- W2088020372 hasConceptScore W2088020372C43214815 @default.
- W2088020372 hasConceptScore W2088020372C46362747 @default.
- W2088020372 hasConceptScore W2088020372C49040817 @default.
- W2088020372 hasConceptScore W2088020372C51140833 @default.
- W2088020372 hasConceptScore W2088020372C520434653 @default.
- W2088020372 hasConceptScore W2088020372C525849907 @default.
- W2088020372 hasConceptScore W2088020372C62520636 @default.
- W2088020372 hasLocation W20880203721 @default.
- W2088020372 hasOpenAccess W2088020372 @default.
- W2088020372 hasPrimaryLocation W20880203721 @default.
- W2088020372 hasRelatedWork W1502432612 @default.
- W2088020372 hasRelatedWork W1547783441 @default.
- W2088020372 hasRelatedWork W1577459147 @default.
- W2088020372 hasRelatedWork W2023576449 @default.
- W2088020372 hasRelatedWork W2059692905 @default.
- W2088020372 hasRelatedWork W2060944147 @default.
- W2088020372 hasRelatedWork W2078760941 @default.
- W2088020372 hasRelatedWork W2338714185 @default.
- W2088020372 hasRelatedWork W2505998680 @default.
- W2088020372 hasRelatedWork W2546770406 @default.
- W2088020372 hasVolume "189-193" @default.
- W2088020372 isParatext "false" @default.
- W2088020372 isRetracted "false" @default.
- W2088020372 magId "2088020372" @default.
- W2088020372 workType "article" @default.