Matches in SemOpenAlex for { <https://semopenalex.org/work/W2088141525> ?p ?o ?g. }
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- W2088141525 endingPage "4907" @default.
- W2088141525 startingPage "4907" @default.
- W2088141525 abstract "Fast deposition of hydrogenated chlorinated amorphous and microcrystalline silicon (a-Si:H(Cl), µ c-Si:H(Cl)) thin films is achieved without powder formation and deterioration of their optoelectronic properties by plasma-enhanced chemical vapor deposition (rf PECVD) from SiH 2 Cl 2 – SiH 4 – H 2 . The Si-network can be varied from microcrystalline to amorphous at high deposition rate of about 20 Å/s with addition of SiH 4 under steady flow of SiH 2 Cl 2 – H 2 plasma. The deposition rate strongly depends on the mixture ratio of SiH 2 Cl 2 and SiH 4 and the substrate temperature." @default.
- W2088141525 created "2016-06-24" @default.
- W2088141525 creator A5012256492 @default.
- W2088141525 creator A5015050591 @default.
- W2088141525 creator A5051350652 @default.
- W2088141525 date "1997-07-01" @default.
- W2088141525 modified "2023-10-18" @default.
- W2088141525 title "Fast Deposition of Amorphous and Microcrystalline Silicon Films from SiH<sub>2</sub>Cl<sub>2</sub>–SiH<sub>4</sub>–H<sub>2</sub> by Plasma-Enhanced Chemical Vapor Deposition" @default.
- W2088141525 cites W1981547394 @default.
- W2088141525 cites W1983336256 @default.
- W2088141525 cites W2010831980 @default.
- W2088141525 cites W2015680752 @default.
- W2088141525 cites W2019627607 @default.
- W2088141525 cites W2046051309 @default.
- W2088141525 cites W2083431783 @default.
- W2088141525 cites W2092517125 @default.
- W2088141525 cites W2094953483 @default.
- W2088141525 doi "https://doi.org/10.1143/jjap.36.4907" @default.
- W2088141525 hasPublicationYear "1997" @default.
- W2088141525 type Work @default.
- W2088141525 sameAs 2088141525 @default.
- W2088141525 citedByCount "10" @default.
- W2088141525 countsByYear W20881415252015 @default.
- W2088141525 countsByYear W20881415252016 @default.
- W2088141525 crossrefType "journal-article" @default.
- W2088141525 hasAuthorship W2088141525A5012256492 @default.
- W2088141525 hasAuthorship W2088141525A5015050591 @default.
- W2088141525 hasAuthorship W2088141525A5051350652 @default.
- W2088141525 hasConcept C111368507 @default.
- W2088141525 hasConcept C113196181 @default.
- W2088141525 hasConcept C127313418 @default.
- W2088141525 hasConcept C151730666 @default.
- W2088141525 hasConcept C171250308 @default.
- W2088141525 hasConcept C178790620 @default.
- W2088141525 hasConcept C185592680 @default.
- W2088141525 hasConcept C19067145 @default.
- W2088141525 hasConcept C192562407 @default.
- W2088141525 hasConcept C201370411 @default.
- W2088141525 hasConcept C2776390347 @default.
- W2088141525 hasConcept C2777289219 @default.
- W2088141525 hasConcept C2779667780 @default.
- W2088141525 hasConcept C2816523 @default.
- W2088141525 hasConcept C2993184922 @default.
- W2088141525 hasConcept C38347018 @default.
- W2088141525 hasConcept C49040817 @default.
- W2088141525 hasConcept C544956773 @default.
- W2088141525 hasConcept C56052488 @default.
- W2088141525 hasConcept C57410435 @default.
- W2088141525 hasConcept C64297162 @default.
- W2088141525 hasConcept C8010536 @default.
- W2088141525 hasConcept C86803240 @default.
- W2088141525 hasConceptScore W2088141525C111368507 @default.
- W2088141525 hasConceptScore W2088141525C113196181 @default.
- W2088141525 hasConceptScore W2088141525C127313418 @default.
- W2088141525 hasConceptScore W2088141525C151730666 @default.
- W2088141525 hasConceptScore W2088141525C171250308 @default.
- W2088141525 hasConceptScore W2088141525C178790620 @default.
- W2088141525 hasConceptScore W2088141525C185592680 @default.
- W2088141525 hasConceptScore W2088141525C19067145 @default.
- W2088141525 hasConceptScore W2088141525C192562407 @default.
- W2088141525 hasConceptScore W2088141525C201370411 @default.
- W2088141525 hasConceptScore W2088141525C2776390347 @default.
- W2088141525 hasConceptScore W2088141525C2777289219 @default.
- W2088141525 hasConceptScore W2088141525C2779667780 @default.
- W2088141525 hasConceptScore W2088141525C2816523 @default.
- W2088141525 hasConceptScore W2088141525C2993184922 @default.
- W2088141525 hasConceptScore W2088141525C38347018 @default.
- W2088141525 hasConceptScore W2088141525C49040817 @default.
- W2088141525 hasConceptScore W2088141525C544956773 @default.
- W2088141525 hasConceptScore W2088141525C56052488 @default.
- W2088141525 hasConceptScore W2088141525C57410435 @default.
- W2088141525 hasConceptScore W2088141525C64297162 @default.
- W2088141525 hasConceptScore W2088141525C8010536 @default.
- W2088141525 hasConceptScore W2088141525C86803240 @default.
- W2088141525 hasIssue "7S" @default.
- W2088141525 hasLocation W20881415251 @default.
- W2088141525 hasOpenAccess W2088141525 @default.
- W2088141525 hasPrimaryLocation W20881415251 @default.
- W2088141525 hasRelatedWork W2012198238 @default.
- W2088141525 hasRelatedWork W2030215518 @default.
- W2088141525 hasRelatedWork W2088084945 @default.
- W2088141525 hasRelatedWork W2089633568 @default.
- W2088141525 hasRelatedWork W2129859591 @default.
- W2088141525 hasRelatedWork W2131111587 @default.
- W2088141525 hasRelatedWork W2357982613 @default.
- W2088141525 hasRelatedWork W2379688728 @default.
- W2088141525 hasRelatedWork W2386801201 @default.
- W2088141525 hasRelatedWork W3144697431 @default.
- W2088141525 hasVolume "36" @default.
- W2088141525 isParatext "false" @default.
- W2088141525 isRetracted "false" @default.
- W2088141525 magId "2088141525" @default.
- W2088141525 workType "article" @default.