Matches in SemOpenAlex for { <https://semopenalex.org/work/W2088258137> ?p ?o ?g. }
Showing items 1 to 88 of
88
with 100 items per page.
- W2088258137 abstract "X -ray lithography on Beam Line III -IV (3 °) at SSRLR. Tatchyn and I. LindauStanford Electronics Laboratories and Stanford Synchrotron Radiation LaboratoryStanford University, Stanford, California 94305, USAY. G. SuUniversity of Science and Technology, Hefei, PRCR. Gutcheck and J. MurayStanford Research Institute, Menlo Park, California 94025, USAP. L. CsonkaInstitute of Theoretical Science and Department of PhysicsUniversity of Oregon, Eugene, Oregon 97403, USAAbstractIn recent months at SSRL, we have tested the feasibility of in vacuo x -ray lithographicstudies using synchrotron radiation by exposing the resists PMMA and FBM -120 to the white -light radiation in Beam Line III -IV (3 °) during parasitic operation. Frequency selection" @default.
- W2088258137 created "2016-06-24" @default.
- W2088258137 creator A5048663732 @default.
- W2088258137 creator A5052198137 @default.
- W2088258137 creator A5054675293 @default.
- W2088258137 creator A5075425170 @default.
- W2088258137 creator A5083577934 @default.
- W2088258137 creator A5088289638 @default.
- W2088258137 date "1983-11-07" @default.
- W2088258137 modified "2023-09-27" @default.
- W2088258137 title "<title>X-Ray Lithography On Beam Line III-IV (3°) At SSRL</title>" @default.
- W2088258137 doi "https://doi.org/10.1117/12.935102" @default.
- W2088258137 hasPublicationYear "1983" @default.
- W2088258137 type Work @default.
- W2088258137 sameAs 2088258137 @default.
- W2088258137 citedByCount "0" @default.
- W2088258137 crossrefType "proceedings-article" @default.
- W2088258137 hasAuthorship W2088258137A5048663732 @default.
- W2088258137 hasAuthorship W2088258137A5052198137 @default.
- W2088258137 hasAuthorship W2088258137A5054675293 @default.
- W2088258137 hasAuthorship W2088258137A5075425170 @default.
- W2088258137 hasAuthorship W2088258137A5083577934 @default.
- W2088258137 hasAuthorship W2088258137A5088289638 @default.
- W2088258137 hasConcept C120665830 @default.
- W2088258137 hasConcept C121332964 @default.
- W2088258137 hasConcept C136959337 @default.
- W2088258137 hasConcept C147120987 @default.
- W2088258137 hasConcept C16332341 @default.
- W2088258137 hasConcept C168834538 @default.
- W2088258137 hasConcept C171250308 @default.
- W2088258137 hasConcept C185544564 @default.
- W2088258137 hasConcept C192562407 @default.
- W2088258137 hasConcept C198352243 @default.
- W2088258137 hasConcept C200274948 @default.
- W2088258137 hasConcept C204223013 @default.
- W2088258137 hasConcept C21368211 @default.
- W2088258137 hasConcept C2524010 @default.
- W2088258137 hasConcept C2779227376 @default.
- W2088258137 hasConcept C2780089451 @default.
- W2088258137 hasConcept C33923547 @default.
- W2088258137 hasConcept C53524968 @default.
- W2088258137 hasConcept C95312477 @default.
- W2088258137 hasConceptScore W2088258137C120665830 @default.
- W2088258137 hasConceptScore W2088258137C121332964 @default.
- W2088258137 hasConceptScore W2088258137C136959337 @default.
- W2088258137 hasConceptScore W2088258137C147120987 @default.
- W2088258137 hasConceptScore W2088258137C16332341 @default.
- W2088258137 hasConceptScore W2088258137C168834538 @default.
- W2088258137 hasConceptScore W2088258137C171250308 @default.
- W2088258137 hasConceptScore W2088258137C185544564 @default.
- W2088258137 hasConceptScore W2088258137C192562407 @default.
- W2088258137 hasConceptScore W2088258137C198352243 @default.
- W2088258137 hasConceptScore W2088258137C200274948 @default.
- W2088258137 hasConceptScore W2088258137C204223013 @default.
- W2088258137 hasConceptScore W2088258137C21368211 @default.
- W2088258137 hasConceptScore W2088258137C2524010 @default.
- W2088258137 hasConceptScore W2088258137C2779227376 @default.
- W2088258137 hasConceptScore W2088258137C2780089451 @default.
- W2088258137 hasConceptScore W2088258137C33923547 @default.
- W2088258137 hasConceptScore W2088258137C53524968 @default.
- W2088258137 hasConceptScore W2088258137C95312477 @default.
- W2088258137 hasLocation W20882581371 @default.
- W2088258137 hasOpenAccess W2088258137 @default.
- W2088258137 hasPrimaryLocation W20882581371 @default.
- W2088258137 hasRelatedWork W1989836256 @default.
- W2088258137 hasRelatedWork W1995407079 @default.
- W2088258137 hasRelatedWork W2016422587 @default.
- W2088258137 hasRelatedWork W2027991615 @default.
- W2088258137 hasRelatedWork W2050486048 @default.
- W2088258137 hasRelatedWork W2057622994 @default.
- W2088258137 hasRelatedWork W2071910516 @default.
- W2088258137 hasRelatedWork W2076882559 @default.
- W2088258137 hasRelatedWork W2082143708 @default.
- W2088258137 hasRelatedWork W2084417531 @default.
- W2088258137 hasRelatedWork W2089739473 @default.
- W2088258137 hasRelatedWork W2315706762 @default.
- W2088258137 hasRelatedWork W2325054918 @default.
- W2088258137 hasRelatedWork W2333171041 @default.
- W2088258137 hasRelatedWork W2367339021 @default.
- W2088258137 hasRelatedWork W2479582394 @default.
- W2088258137 hasRelatedWork W2607489297 @default.
- W2088258137 hasRelatedWork W3095717435 @default.
- W2088258137 hasRelatedWork W3163757082 @default.
- W2088258137 hasRelatedWork W3179219295 @default.
- W2088258137 isParatext "false" @default.
- W2088258137 isRetracted "false" @default.
- W2088258137 magId "2088258137" @default.
- W2088258137 workType "article" @default.