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- W2088262023 abstract "This paper introduces a novel T-beam actuator fabricated by a piezoelectric MEMS fabrication process. ICP-RIE etching from the front and back of a bulk PZT chip is used to produce stair stepped structures through the thickness with complex inplane shapes. Masked electrode deposition creates active and passive regions in the PZT structure. With a T-shaped crosssection, and bottom and top flange and web electrodes, a cantilevered beam can bend in-plane and out-of-plane with bimorph actuation in both directions. One of these T-beam actuators is fabricated and experimentally tested. An experimentally validated model predicts that the cross-section geometry can be optimized to produce higher displacement and blocking force." @default.
- W2088262023 created "2016-06-24" @default.
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- W2088262023 date "2008-01-01" @default.
- W2088262023 modified "2023-09-27" @default.
- W2088262023 title "Piezoelectric T-Beam Microactuators" @default.
- W2088262023 doi "https://doi.org/10.1115/detc2008-49886" @default.
- W2088262023 hasPublicationYear "2008" @default.
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