Matches in SemOpenAlex for { <https://semopenalex.org/work/W2088346265> ?p ?o ?g. }
Showing items 1 to 91 of
91
with 100 items per page.
- W2088346265 endingPage "493" @default.
- W2088346265 startingPage "491" @default.
- W2088346265 abstract "The behaviour of nickel (Ni) contamination in silicon-on-insulator (SOI) wafers has been characterized by the Kelvin method combined with surface photovoltage (SPV) measurements. In order to characterize the SOI wafers contaminated with Ni atoms, we used the “patterned” separation by implanted oxygen (SIMOX) wafers with partially no buried oxide (BOX) region, which acts as an opening of the top-Si layer to the substrate. It is found that the smaller size of patterned SIMOX area help the gettering of Ni atoms in the top-Si layer through the openings to the substrate because of its shorter lateral migration distance for Ni atoms. In addition, it is found that the intensity of SPV for the SIMOX areas increases with increasing a line width of the openings because of its wider vertical diffusion path away from the top-Si layer toward the substrate. These results clearly suggest that the Ni atoms in the SOI layer even with the underneath BOX layer can diffuse laterally and escape to the bulk region through the BOX-less region." @default.
- W2088346265 created "2016-06-24" @default.
- W2088346265 creator A5015605858 @default.
- W2088346265 creator A5029321189 @default.
- W2088346265 creator A5064209240 @default.
- W2088346265 creator A5070157804 @default.
- W2088346265 creator A5085142320 @default.
- W2088346265 date "2004-07-01" @default.
- W2088346265 modified "2023-09-27" @default.
- W2088346265 title "Scanning kelvin-probe characterization of heavy metal contamination in patterned SIMOX wafers" @default.
- W2088346265 cites W2071336803 @default.
- W2088346265 cites W2074548443 @default.
- W2088346265 cites W2083173886 @default.
- W2088346265 cites W2086777284 @default.
- W2088346265 cites W2090209355 @default.
- W2088346265 doi "https://doi.org/10.1051/epjap:2004054" @default.
- W2088346265 hasPublicationYear "2004" @default.
- W2088346265 type Work @default.
- W2088346265 sameAs 2088346265 @default.
- W2088346265 citedByCount "0" @default.
- W2088346265 crossrefType "journal-article" @default.
- W2088346265 hasAuthorship W2088346265A5015605858 @default.
- W2088346265 hasAuthorship W2088346265A5029321189 @default.
- W2088346265 hasAuthorship W2088346265A5064209240 @default.
- W2088346265 hasAuthorship W2088346265A5070157804 @default.
- W2088346265 hasAuthorship W2088346265A5085142320 @default.
- W2088346265 hasConcept C111368507 @default.
- W2088346265 hasConcept C112570922 @default.
- W2088346265 hasConcept C121332964 @default.
- W2088346265 hasConcept C125099081 @default.
- W2088346265 hasConcept C127313418 @default.
- W2088346265 hasConcept C129396577 @default.
- W2088346265 hasConcept C160671074 @default.
- W2088346265 hasConcept C171250308 @default.
- W2088346265 hasConcept C18903297 @default.
- W2088346265 hasConcept C191897082 @default.
- W2088346265 hasConcept C192562407 @default.
- W2088346265 hasConcept C2777289219 @default.
- W2088346265 hasConcept C2779227376 @default.
- W2088346265 hasConcept C32891209 @default.
- W2088346265 hasConcept C49040817 @default.
- W2088346265 hasConcept C504270822 @default.
- W2088346265 hasConcept C53143962 @default.
- W2088346265 hasConcept C544153396 @default.
- W2088346265 hasConcept C544956773 @default.
- W2088346265 hasConcept C62520636 @default.
- W2088346265 hasConcept C86803240 @default.
- W2088346265 hasConcept C98446981 @default.
- W2088346265 hasConceptScore W2088346265C111368507 @default.
- W2088346265 hasConceptScore W2088346265C112570922 @default.
- W2088346265 hasConceptScore W2088346265C121332964 @default.
- W2088346265 hasConceptScore W2088346265C125099081 @default.
- W2088346265 hasConceptScore W2088346265C127313418 @default.
- W2088346265 hasConceptScore W2088346265C129396577 @default.
- W2088346265 hasConceptScore W2088346265C160671074 @default.
- W2088346265 hasConceptScore W2088346265C171250308 @default.
- W2088346265 hasConceptScore W2088346265C18903297 @default.
- W2088346265 hasConceptScore W2088346265C191897082 @default.
- W2088346265 hasConceptScore W2088346265C192562407 @default.
- W2088346265 hasConceptScore W2088346265C2777289219 @default.
- W2088346265 hasConceptScore W2088346265C2779227376 @default.
- W2088346265 hasConceptScore W2088346265C32891209 @default.
- W2088346265 hasConceptScore W2088346265C49040817 @default.
- W2088346265 hasConceptScore W2088346265C504270822 @default.
- W2088346265 hasConceptScore W2088346265C53143962 @default.
- W2088346265 hasConceptScore W2088346265C544153396 @default.
- W2088346265 hasConceptScore W2088346265C544956773 @default.
- W2088346265 hasConceptScore W2088346265C62520636 @default.
- W2088346265 hasConceptScore W2088346265C86803240 @default.
- W2088346265 hasConceptScore W2088346265C98446981 @default.
- W2088346265 hasIssue "1-3" @default.
- W2088346265 hasLocation W20883462651 @default.
- W2088346265 hasOpenAccess W2088346265 @default.
- W2088346265 hasPrimaryLocation W20883462651 @default.
- W2088346265 hasRelatedWork W1536397480 @default.
- W2088346265 hasRelatedWork W2000484147 @default.
- W2088346265 hasRelatedWork W2010481829 @default.
- W2088346265 hasRelatedWork W2021791336 @default.
- W2088346265 hasRelatedWork W2059915384 @default.
- W2088346265 hasRelatedWork W2319970007 @default.
- W2088346265 hasRelatedWork W2382519800 @default.
- W2088346265 hasRelatedWork W2770490537 @default.
- W2088346265 hasRelatedWork W2978057091 @default.
- W2088346265 hasRelatedWork W2187481787 @default.
- W2088346265 hasVolume "27" @default.
- W2088346265 isParatext "false" @default.
- W2088346265 isRetracted "false" @default.
- W2088346265 magId "2088346265" @default.
- W2088346265 workType "article" @default.