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- W2088370641 abstract "A GaAs/AIGaAs fiber-optic interconnect structure for high-density applications is discussed. The vertical approach, which employs reactive-ion-etched cavities to couple fibers to the semiconductor substrate, permits interconnect arrays with densities up to 1600 sites/cm2. Factors affecting the applicability of the fiber coupler and the achievable packing density are considered." @default.
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- W2088370641 date "1989-02-09" @default.
- W2088370641 modified "2023-09-26" @default.
- W2088370641 title "Vertical Fiber Coupling For High-Density Optical Interconnection" @default.
- W2088370641 doi "https://doi.org/10.1117/12.960107" @default.
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