Matches in SemOpenAlex for { <https://semopenalex.org/work/W2088392833> ?p ?o ?g. }
- W2088392833 endingPage "536" @default.
- W2088392833 startingPage "531" @default.
- W2088392833 abstract "Low-resistivity tantalum nitride (TaN) films were deposited by low-pressure metal-organic chemical vapor deposition (MOCVD) using a new precursor tertbutylimidotrisdiethylamidotantalum. The surface morphology and the step coverage of TaN films were characterized by scanning electron microscopy. The film deposited at 450 °C had nearly 100% step coverage and the step coverage decreased to 25% for the films deposited at 650 °C. The carbon and oxygen concentrations are about 10 at.% in the CVD TaN films, as determined by Auger electron spectroscopy. From Rutherford backscattering spectroscopy and secondary ion mass spectroscopy analysis, TaN films were found to be effective diffusion barriers between aluminum and silicon up to 550 °C. The electrical measurements of diode-leakage current indicate that the Al/TaNSi structure remained stable up to 500 °C, after which Al started to diffuse through the TaN layer and resulted in a higher leakage current." @default.
- W2088392833 created "2016-06-24" @default.
- W2088392833 creator A5003795817 @default.
- W2088392833 creator A5024142181 @default.
- W2088392833 creator A5028977488 @default.
- W2088392833 creator A5033566119 @default.
- W2088392833 creator A5040103418 @default.
- W2088392833 creator A5040990850 @default.
- W2088392833 creator A5069735402 @default.
- W2088392833 date "1995-12-01" @default.
- W2088392833 modified "2023-10-17" @default.
- W2088392833 title "Metal-organic chemical vapor deposition of tantalum nitride barrier layers for ULSI applications" @default.
- W2088392833 cites W1983406786 @default.
- W2088392833 cites W1998039840 @default.
- W2088392833 cites W1999703222 @default.
- W2088392833 cites W2000482538 @default.
- W2088392833 cites W2001018259 @default.
- W2088392833 cites W2002651922 @default.
- W2088392833 cites W2007551590 @default.
- W2088392833 cites W2024026957 @default.
- W2088392833 cites W2038208723 @default.
- W2088392833 cites W2047767157 @default.
- W2088392833 cites W2058838733 @default.
- W2088392833 cites W2068183291 @default.
- W2088392833 cites W2082299438 @default.
- W2088392833 cites W2089123633 @default.
- W2088392833 cites W2091545311 @default.
- W2088392833 doi "https://doi.org/10.1016/0040-6090(95)06752-3" @default.
- W2088392833 hasPublicationYear "1995" @default.
- W2088392833 type Work @default.
- W2088392833 sameAs 2088392833 @default.
- W2088392833 citedByCount "48" @default.
- W2088392833 countsByYear W20883928332014 @default.
- W2088392833 countsByYear W20883928332015 @default.
- W2088392833 countsByYear W20883928332016 @default.
- W2088392833 countsByYear W20883928332018 @default.
- W2088392833 countsByYear W20883928332019 @default.
- W2088392833 countsByYear W20883928332020 @default.
- W2088392833 countsByYear W20883928332021 @default.
- W2088392833 countsByYear W20883928332022 @default.
- W2088392833 crossrefType "journal-article" @default.
- W2088392833 hasAuthorship W2088392833A5003795817 @default.
- W2088392833 hasAuthorship W2088392833A5024142181 @default.
- W2088392833 hasAuthorship W2088392833A5028977488 @default.
- W2088392833 hasAuthorship W2088392833A5033566119 @default.
- W2088392833 hasAuthorship W2088392833A5040103418 @default.
- W2088392833 hasAuthorship W2088392833A5040990850 @default.
- W2088392833 hasAuthorship W2088392833A5069735402 @default.
- W2088392833 hasConcept C110738630 @default.
- W2088392833 hasConcept C113196181 @default.
- W2088392833 hasConcept C121332964 @default.
- W2088392833 hasConcept C159985019 @default.
- W2088392833 hasConcept C171250308 @default.
- W2088392833 hasConcept C175665537 @default.
- W2088392833 hasConcept C185544564 @default.
- W2088392833 hasConcept C185592680 @default.
- W2088392833 hasConcept C19067145 @default.
- W2088392833 hasConcept C191897082 @default.
- W2088392833 hasConcept C192562407 @default.
- W2088392833 hasConcept C194760766 @default.
- W2088392833 hasConcept C25442681 @default.
- W2088392833 hasConcept C26771246 @default.
- W2088392833 hasConcept C2778112282 @default.
- W2088392833 hasConcept C2778836790 @default.
- W2088392833 hasConcept C2779227376 @default.
- W2088392833 hasConcept C2780547777 @default.
- W2088392833 hasConcept C43617362 @default.
- W2088392833 hasConcept C514619126 @default.
- W2088392833 hasConcept C57410435 @default.
- W2088392833 hasConceptScore W2088392833C110738630 @default.
- W2088392833 hasConceptScore W2088392833C113196181 @default.
- W2088392833 hasConceptScore W2088392833C121332964 @default.
- W2088392833 hasConceptScore W2088392833C159985019 @default.
- W2088392833 hasConceptScore W2088392833C171250308 @default.
- W2088392833 hasConceptScore W2088392833C175665537 @default.
- W2088392833 hasConceptScore W2088392833C185544564 @default.
- W2088392833 hasConceptScore W2088392833C185592680 @default.
- W2088392833 hasConceptScore W2088392833C19067145 @default.
- W2088392833 hasConceptScore W2088392833C191897082 @default.
- W2088392833 hasConceptScore W2088392833C192562407 @default.
- W2088392833 hasConceptScore W2088392833C194760766 @default.
- W2088392833 hasConceptScore W2088392833C25442681 @default.
- W2088392833 hasConceptScore W2088392833C26771246 @default.
- W2088392833 hasConceptScore W2088392833C2778112282 @default.
- W2088392833 hasConceptScore W2088392833C2778836790 @default.
- W2088392833 hasConceptScore W2088392833C2779227376 @default.
- W2088392833 hasConceptScore W2088392833C2780547777 @default.
- W2088392833 hasConceptScore W2088392833C43617362 @default.
- W2088392833 hasConceptScore W2088392833C514619126 @default.
- W2088392833 hasConceptScore W2088392833C57410435 @default.
- W2088392833 hasIssue "1-2" @default.
- W2088392833 hasLocation W20883928331 @default.
- W2088392833 hasOpenAccess W2088392833 @default.
- W2088392833 hasPrimaryLocation W20883928331 @default.
- W2088392833 hasRelatedWork W1933256704 @default.
- W2088392833 hasRelatedWork W1972497710 @default.
- W2088392833 hasRelatedWork W1986407598 @default.
- W2088392833 hasRelatedWork W1987689269 @default.