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- W2088406913 abstract "The extension of optical lithography to ever deeper sub-wavelength feature sizes has led to an alarming increase in photo-mask complexity and associated cost. Changes in design philosophy can play a key role in mitigating this trend. We propose the introduction of a new optimization cycle early in the physical design process based on minimizing pattern complexity. We study the use of a pattern complexity metric based on Fourier coding to accomplish such an optimization. The ultimate goal is simplification of resolution enhancement technology (RET) methods required for a given design and the generation of a correspondingly simpler and more cost effective mask set." @default.
- W2088406913 created "2016-06-24" @default.
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- W2088406913 date "2004-05-03" @default.
- W2088406913 modified "2023-09-23" @default.
- W2088406913 title "Minimizing mask complexity for advanced optical lithography" @default.
- W2088406913 doi "https://doi.org/10.1117/12.536369" @default.
- W2088406913 hasPublicationYear "2004" @default.
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