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• W2088476064 endingPage "033006" @default.
• W2088476064 startingPage "033006" @default.
• W2088476064 abstract "We present the details of our study on the internal stresses and adhesion strengths of SU-8 structures to different substrate seed layers. The effect of adhesion promoter-methacryloxy [propl] trimethoxysilane (MPTS), and OmniCoat-and different seed layer combinations (Ti/Cu/Ti, Ti/Cu, Cr/Au, and Cr/Au/Cr) was examined for internal stress and adhesion strength in 650-µm-thick SU-8 films. Increased stress and poor adhesion have led to the delamination of SU-8 in some cases. Adhesion and stress have proven to be the function of process parameters such as soft bake (time and temperature), exposure dose, post-exposure bake (time and temperature), and development time. We have found that a 100 silicon wafer containing a titanium-copper-titanium (Ti/Cu/Ti) seed layer with MPTS as the adhesion promoter yielded a thick SU-8 film with a lower value of stress and consequently better adhesion for processing in deep x-ray lithography (DXRL). A detailed correlation of the effects of adhesion and internal stress on the SU-8 film is discussed. An analysis of the possible chemical bonding interactions occurring between SU-8, and its adhesion promoter and/or substrate is also presented." @default.
• W2088476064 created "2016-06-24" @default.
• W2088476064 creator A5010053257 @default.
• W2088476064 creator A5023322008 @default.
• W2088476064 creator A5049769364 @default.
• W2088476064 creator A5055977869 @default.
• W2088476064 creator A5071473716 @default.
• W2088476064 date "2007-07-01" @default.
• W2088476064 modified "2023-09-23" @default.
• W2088476064 title "Study of stress and adhesion strength in SU-8 resist layers on silicon substrate with different seed layers" @default.
• W2088476064 cites W1963611005 @default.
• W2088476064 cites W1979618481 @default.
• W2088476064 cites W1982904495 @default.
• W2088476064 cites W1997362613 @default.
• W2088476064 cites W2001575447 @default.
• W2088476064 cites W2012843923 @default.
• W2088476064 cites W2017557174 @default.
• W2088476064 cites W2022860622 @default.
• W2088476064 cites W2024011249 @default.
• W2088476064 cites W2027785931 @default.
• W2088476064 cites W2028567428 @default.
• W2088476064 cites W2030010906 @default.
• W2088476064 cites W2030642882 @default.
• W2088476064 cites W2042232015 @default.
• W2088476064 cites W2062809380 @default.
• W2088476064 cites W2066613028 @default.
• W2088476064 cites W2071655927 @default.
• W2088476064 cites W2079169198 @default.
• W2088476064 cites W2079601321 @default.
• W2088476064 cites W2081793861 @default.
• W2088476064 cites W2087363161 @default.
• W2088476064 cites W2138547592 @default.
• W2088476064 cites W2152868651 @default.
• W2088476064 cites W2242006729 @default.
• W2088476064 cites W4245769860 @default.
• W2088476064 cites W1990798470 @default.
• W2088476064 doi "https://doi.org/10.1117/1.2778644" @default.
• W2088476064 hasPublicationYear "2007" @default.
• W2088476064 type Work @default.
• W2088476064 sameAs 2088476064 @default.
• W2088476064 citedByCount "11" @default.
• W2088476064 countsByYear W20884760642013 @default.
• W2088476064 countsByYear W20884760642015 @default.
• W2088476064 countsByYear W20884760642016 @default.
• W2088476064 countsByYear W20884760642018 @default.
• W2088476064 countsByYear W20884760642023 @default.
• W2088476064 crossrefType "journal-article" @default.
• W2088476064 hasAuthorship W2088476064A5010053257 @default.
• W2088476064 hasAuthorship W2088476064A5023322008 @default.
• W2088476064 hasAuthorship W2088476064A5049769364 @default.
• W2088476064 hasAuthorship W2088476064A5055977869 @default.
• W2088476064 hasAuthorship W2088476064A5071473716 @default.
• W2088476064 hasConcept C111368507 @default.
• W2088476064 hasConcept C127313418 @default.
• W2088476064 hasConcept C138885662 @default.
• W2088476064 hasConcept C151730666 @default.
• W2088476064 hasConcept C159985019 @default.
• W2088476064 hasConcept C160671074 @default.
• W2088476064 hasConcept C171250308 @default.
• W2088476064 hasConcept C191897082 @default.
• W2088476064 hasConcept C192562407 @default.
• W2088476064 hasConcept C21036866 @default.
• W2088476064 hasConcept C2777289219 @default.
• W2088476064 hasConcept C2779227376 @default.
• W2088476064 hasConcept C30239060 @default.
• W2088476064 hasConcept C41895202 @default.
• W2088476064 hasConcept C506065880 @default.
• W2088476064 hasConcept C544956773 @default.
• W2088476064 hasConcept C58097730 @default.
• W2088476064 hasConcept C68928338 @default.
• W2088476064 hasConcept C77928131 @default.
• W2088476064 hasConcept C84416704 @default.
• W2088476064 hasConcept C86803240 @default.
• W2088476064 hasConceptScore W2088476064C111368507 @default.
• W2088476064 hasConceptScore W2088476064C127313418 @default.
• W2088476064 hasConceptScore W2088476064C138885662 @default.
• W2088476064 hasConceptScore W2088476064C151730666 @default.
• W2088476064 hasConceptScore W2088476064C159985019 @default.
• W2088476064 hasConceptScore W2088476064C160671074 @default.
• W2088476064 hasConceptScore W2088476064C171250308 @default.
• W2088476064 hasConceptScore W2088476064C191897082 @default.
• W2088476064 hasConceptScore W2088476064C192562407 @default.
• W2088476064 hasConceptScore W2088476064C21036866 @default.
• W2088476064 hasConceptScore W2088476064C2777289219 @default.
• W2088476064 hasConceptScore W2088476064C2779227376 @default.
• W2088476064 hasConceptScore W2088476064C30239060 @default.
• W2088476064 hasConceptScore W2088476064C41895202 @default.
• W2088476064 hasConceptScore W2088476064C506065880 @default.
• W2088476064 hasConceptScore W2088476064C544956773 @default.
• W2088476064 hasConceptScore W2088476064C58097730 @default.
• W2088476064 hasConceptScore W2088476064C68928338 @default.
• W2088476064 hasConceptScore W2088476064C77928131 @default.
• W2088476064 hasConceptScore W2088476064C84416704 @default.
• W2088476064 hasConceptScore W2088476064C86803240 @default.
• W2088476064 hasIssue "3" @default.
• W2088476064 hasLocation W20884760641 @default.
• W2088476064 hasOpenAccess W2088476064 @default.
• W2088476064 hasPrimaryLocation W20884760641 @default.

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