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- W2088558326 abstract "We have applied atomic force microscopy and x-ray photoemission spectroscopy to the study of SiGe intermixing in Ge/Si(100) self-assembled islands. We have quantified the Ge/Si alloying as a function of the deposition temperature in the 500–850 °C range. The Si content inside the islands varies from 0% at 550 °C up to 72% at 850 °C. As a consequence of the reduction of the effective mismatch due to the observed SiGe intermixing, the critical base width for island nucleation increases from 25 nm for Tdep<600 °C up to 270 nm for Tdep=850 °C." @default.
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- W2088558326 date "2001-01-15" @default.
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- W2088558326 title "SiGe intermixing in Ge/Si(100) islands" @default.
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- W2088558326 doi "https://doi.org/10.1063/1.1339263" @default.
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