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- W2088570886 abstract "Pr2O3 may be an alternative high-K gate dielectric material for silicon integrated circuits, i.e., it has a dielectric constant K⩾25 and is currently under consideration as potential replacement for SiO2 as the gate dielectric material for sub-0.1 μm complementary metal-oxide-semiconductor technology. Using scanning tunneling microscopy and X-ray photoelectron spectroscopy, we show that the initial stages of heteroepitaxial Pr2O3 grown on Si(0 0 1) consist of a mixed PrO2/Pr2O3 phase. First ab initio calculation results also indicate the formation of an ultra-thin Si–O interlayer between the Si substrate and Pr2O3. In the monolayer range of deposited Pr2O3, Auger electron spectroscopy measurements show that the oxide is completely decomposed above 780 °C." @default.
- W2088570886 created "2016-06-24" @default.
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- W2088570886 date "2002-04-01" @default.
- W2088570886 modified "2023-10-18" @default.
- W2088570886 title "Initial stages of praseodymium oxide film formation on Si()" @default.
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- W2088570886 doi "https://doi.org/10.1016/s0039-6028(01)01961-6" @default.
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