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- W2088646951 abstract "The spectral properties of LaN/B and LaN/B4C multilayer mirrors have been investigated in the 6.5 to 6.9 nm wavelength range, based on measured B and B4C optical constants. We show that the wavelength of optimal reflectance for boron-based optics is between 6.63 and 6.65 nm, depending on the boron chemical state. The wavelength of the maximum reflectance of the LaN/B4C multilayer system is confirmed experimentally. Calculations of the wavelength-integrated reflectance for perfect ten-multilayer-mirror stacks show that a B-based optical column can be optimized for a wavelength larger than 6.65 nm." @default.
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- W2088646951 date "2012-10-19" @default.
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- W2088646951 title "Wavelength selection for multilayer coatings for lithography generation beyond extreme ultraviolet" @default.
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- W2088646951 doi "https://doi.org/10.1117/1.jmm.11.4.040501" @default.
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