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• W2088759658 abstract "By means of large-scale molecular dynamics simulations we provide a thorough atomic-scale picture of boron incorporation in crystalline silicon upon solid-phase epitaxy. The present results show that boron can either be incorporated as a substitutional dopant or form clusters with a low content of silicon self-interstitials. A full characterization of the formation process of boron-interstitial clusters and their stoichiometry is presented. The present results are consistent with available experimental information and also provide a deep physical insight into B-doped silicon solid-phase epitaxy." @default.
• W2088759658 created "2016-06-24" @default.
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• W2088759658 date "2004-01-22" @default.
• W2088759658 modified "2023-09-27" @default.
• W2088759658 title "Boron ripening during solid-phase epitaxy of amorphous silicon" @default.
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• W2088759658 doi "https://doi.org/10.1103/physrevb.69.045204" @default.
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