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• W2088893533 endingPage "025024" @default.
• W2088893533 startingPage "025024" @default.
• W2088893533 abstract "This paper reports on the characterization of dry etching-based processes for the fabrication of silicon microneedles using a design of experiment (DoE) approach. The possibility of using such microneedles as protruding microelectrodes able to electroporate adherently growing cells and record intracellular potentials motivates the systematic analysis of the influence of etching parameters on the needle shape. Two processes are characterized: a fully isotropic etch process and a three-step etching approach. In the first case, the shape of the microneedles is defined by a single etch step. For the stepped method, the structures are realized using the following sequence: a first, isotropic step defines the tip; this is followed by anisotropic etching that increases the height of the needle; a final isotropic procedure thins the microneedle and sharpens its tip. From the various process parameters tested, it is concluded that the isotropic fabrication is influenced mostly by four process parameters, whereas six parameters dominantly govern the outcome of the stepped etching technique. The dependence of the needle shape on the etch mask diameter is also investigated. Microneedles with diameters down to the sub-micrometer range and heights below 10 µm are obtained. The experimental design is performed using the D-optimal method. The resulting geometry, i.e. heights, diameters and radii of curvature measured at different positions, is extracted from scanning electron micrographs of needle cross-sections obtained from cuts by focused ion beam. The process parameters are used as inputs and the geometry features of the microneedles as outputs for the analysis of the process." @default.
• W2088893533 created "2016-06-24" @default.
• W2088893533 creator A5016785291 @default.
• W2088893533 creator A5041040505 @default.
• W2088893533 creator A5060525702 @default.
• W2088893533 creator A5065208631 @default.
• W2088893533 creator A5067671469 @default.
• W2088893533 creator A5071900339 @default.
• W2088893533 creator A5089170586 @default.
• W2088893533 date "2010-01-20" @default.
• W2088893533 modified "2023-09-24" @default.
• W2088893533 title "Design of experiment characterization of microneedle fabrication processes based on dry silicon etching" @default.
• W2088893533 cites W1967093606 @default.
• W2088893533 cites W1989031585 @default.
• W2088893533 cites W1993703117 @default.
• W2088893533 cites W2009667219 @default.
• W2088893533 cites W2015724488 @default.
• W2088893533 cites W2022226757 @default.
• W2088893533 cites W2029592532 @default.
• W2088893533 cites W2036572805 @default.
• W2088893533 cites W2042857163 @default.
• W2088893533 cites W2060504095 @default.
• W2088893533 cites W2079357440 @default.
• W2088893533 cites W2082781273 @default.
• W2088893533 cites W2094366661 @default.
• W2088893533 cites W2104077037 @default.
• W2088893533 cites W2111937020 @default.
• W2088893533 cites W2155959292 @default.
• W2088893533 cites W2161272185 @default.
• W2088893533 cites W2168756522 @default.
• W2088893533 doi "https://doi.org/10.1088/0960-1317/20/2/025024" @default.
• W2088893533 hasPublicationYear "2010" @default.
• W2088893533 type Work @default.
• W2088893533 sameAs 2088893533 @default.
• W2088893533 citedByCount "21" @default.
• W2088893533 countsByYear W20888935332012 @default.
• W2088893533 countsByYear W20888935332013 @default.
• W2088893533 countsByYear W20888935332014 @default.
• W2088893533 countsByYear W20888935332016 @default.
• W2088893533 countsByYear W20888935332018 @default.
• W2088893533 countsByYear W20888935332019 @default.
• W2088893533 countsByYear W20888935332020 @default.
• W2088893533 countsByYear W20888935332021 @default.
• W2088893533 countsByYear W20888935332022 @default.
• W2088893533 countsByYear W20888935332023 @default.
• W2088893533 crossrefType "journal-article" @default.
• W2088893533 hasAuthorship W2088893533A5016785291 @default.
• W2088893533 hasAuthorship W2088893533A5041040505 @default.
• W2088893533 hasAuthorship W2088893533A5060525702 @default.
• W2088893533 hasAuthorship W2088893533A5065208631 @default.
• W2088893533 hasAuthorship W2088893533A5067671469 @default.
• W2088893533 hasAuthorship W2088893533A5071900339 @default.
• W2088893533 hasAuthorship W2088893533A5089170586 @default.
• W2088893533 hasConcept C100460472 @default.
• W2088893533 hasConcept C120665830 @default.
• W2088893533 hasConcept C121332964 @default.
• W2088893533 hasConcept C124634506 @default.
• W2088893533 hasConcept C1291036 @default.
• W2088893533 hasConcept C130472188 @default.
• W2088893533 hasConcept C136525101 @default.
• W2088893533 hasConcept C142724271 @default.
• W2088893533 hasConcept C159985019 @default.
• W2088893533 hasConcept C171250308 @default.
• W2088893533 hasConcept C171635847 @default.
• W2088893533 hasConcept C184050105 @default.
• W2088893533 hasConcept C192562407 @default.
• W2088893533 hasConcept C195065555 @default.
• W2088893533 hasConcept C204787440 @default.
• W2088893533 hasConcept C2524010 @default.
• W2088893533 hasConcept C2779227376 @default.
• W2088893533 hasConcept C2780841128 @default.
• W2088893533 hasConcept C33220542 @default.
• W2088893533 hasConcept C33923547 @default.
• W2088893533 hasConcept C49040817 @default.
• W2088893533 hasConcept C544956773 @default.
• W2088893533 hasConcept C71924100 @default.
• W2088893533 hasConceptScore W2088893533C100460472 @default.
• W2088893533 hasConceptScore W2088893533C120665830 @default.
• W2088893533 hasConceptScore W2088893533C121332964 @default.
• W2088893533 hasConceptScore W2088893533C124634506 @default.
• W2088893533 hasConceptScore W2088893533C1291036 @default.
• W2088893533 hasConceptScore W2088893533C130472188 @default.
• W2088893533 hasConceptScore W2088893533C136525101 @default.
• W2088893533 hasConceptScore W2088893533C142724271 @default.
• W2088893533 hasConceptScore W2088893533C159985019 @default.
• W2088893533 hasConceptScore W2088893533C171250308 @default.
• W2088893533 hasConceptScore W2088893533C171635847 @default.
• W2088893533 hasConceptScore W2088893533C184050105 @default.
• W2088893533 hasConceptScore W2088893533C192562407 @default.
• W2088893533 hasConceptScore W2088893533C195065555 @default.
• W2088893533 hasConceptScore W2088893533C204787440 @default.
• W2088893533 hasConceptScore W2088893533C2524010 @default.
• W2088893533 hasConceptScore W2088893533C2779227376 @default.
• W2088893533 hasConceptScore W2088893533C2780841128 @default.
• W2088893533 hasConceptScore W2088893533C33220542 @default.
• W2088893533 hasConceptScore W2088893533C33923547 @default.
• W2088893533 hasConceptScore W2088893533C49040817 @default.
• W2088893533 hasConceptScore W2088893533C544956773 @default.

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