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• W2088894002 endingPage "2676" @default.
• W2088894002 startingPage "2670" @default.
• W2088894002 abstract "The influence of the driving frequency on the absolute oxygen atom density in an O2 radio frequency (RF) capacitively coupled plasma (CCP) was investigated using vacuum ultraviolet absorption spectroscopy with pulse modulation of the main plasma. A low-power operation of a compact inductively coupled plasma light source was enabled to avoid the significant measurement errors caused by self-absorption in the light source. The pulse modulation of the main plasma enabled accurate absorption measurement for high plasma density conditions by eliminating background signals due to light emission from the main plasma. As for the effects of the driving frequency, the effect of VHF (100 MHz) drive on oxygen atom production was small because of the modest increase in plasma density of electronegative O2 in contrast to the significant increase in electron density previously observed for electropositive Ar. The recombination coefficient of oxygen atoms on the electrode surface was obtained from a decay rate in the afterglow by comparison with a diffusion model, and it showed agreement with previously reported values for several electrode materials." @default.
• W2088894002 created "2016-06-24" @default.
• W2088894002 creator A5046895944 @default.
• W2088894002 creator A5051187319 @default.
• W2088894002 creator A5077262398 @default.
• W2088894002 creator A5087919950 @default.
• W2088894002 date "2004-09-16" @default.
• W2088894002 modified "2023-09-23" @default.
• W2088894002 title "Influence of driving frequency on oxygen atom density in O₂radio frequency capacitively coupled plasma" @default.
• W2088894002 cites W1963637437 @default.
• W2088894002 cites W1967091255 @default.
• W2088894002 cites W1967259629 @default.
• W2088894002 cites W1968187052 @default.
• W2088894002 cites W1974450316 @default.
• W2088894002 cites W1979509242 @default.
• W2088894002 cites W1983245683 @default.
• W2088894002 cites W1984291837 @default.
• W2088894002 cites W1990097706 @default.
• W2088894002 cites W1993052523 @default.
• W2088894002 cites W1994645666 @default.
• W2088894002 cites W2003734696 @default.
• W2088894002 cites W2010296074 @default.
• W2088894002 cites W2027066175 @default.
• W2088894002 cites W2028561827 @default.
• W2088894002 cites W2031688765 @default.
• W2088894002 cites W2036792969 @default.
• W2088894002 cites W2045167077 @default.
• W2088894002 cites W2045177118 @default.
• W2088894002 cites W2045865073 @default.
• W2088894002 cites W2048481888 @default.
• W2088894002 cites W2048635495 @default.
• W2088894002 cites W2049741693 @default.
• W2088894002 cites W2055775054 @default.
• W2088894002 cites W2056182579 @default.
• W2088894002 cites W2074661492 @default.
• W2088894002 cites W2135082207 @default.
• W2088894002 doi "https://doi.org/10.1088/0022-3727/37/19/010" @default.
• W2088894002 hasPublicationYear "2004" @default.
• W2088894002 type Work @default.
• W2088894002 sameAs 2088894002 @default.
• W2088894002 citedByCount "21" @default.
• W2088894002 countsByYear W20888940022013 @default.
• W2088894002 countsByYear W20888940022015 @default.
• W2088894002 countsByYear W20888940022016 @default.
• W2088894002 countsByYear W20888940022017 @default.
• W2088894002 countsByYear W20888940022018 @default.
• W2088894002 countsByYear W20888940022020 @default.
• W2088894002 countsByYear W20888940022021 @default.
• W2088894002 countsByYear W20888940022022 @default.
• W2088894002 crossrefType "journal-article" @default.
• W2088894002 hasAuthorship W2088894002A5046895944 @default.
• W2088894002 hasAuthorship W2088894002A5051187319 @default.
• W2088894002 hasAuthorship W2088894002A5077262398 @default.
• W2088894002 hasAuthorship W2088894002A5087919950 @default.
• W2088894002 hasConcept C121332964 @default.
• W2088894002 hasConcept C127413603 @default.
• W2088894002 hasConcept C149635348 @default.
• W2088894002 hasConcept C184779094 @default.
• W2088894002 hasConcept C185544564 @default.
• W2088894002 hasConcept C185592680 @default.
• W2088894002 hasConcept C192562407 @default.
• W2088894002 hasConcept C540031477 @default.
• W2088894002 hasConcept C58312451 @default.
• W2088894002 hasConcept C62520636 @default.
• W2088894002 hasConcept C68687820 @default.
• W2088894002 hasConcept C74064498 @default.
• W2088894002 hasConcept C76155785 @default.
• W2088894002 hasConcept C82706917 @default.
• W2088894002 hasConcept C95974651 @default.
• W2088894002 hasConceptScore W2088894002C121332964 @default.
• W2088894002 hasConceptScore W2088894002C127413603 @default.
• W2088894002 hasConceptScore W2088894002C149635348 @default.
• W2088894002 hasConceptScore W2088894002C184779094 @default.
• W2088894002 hasConceptScore W2088894002C185544564 @default.
• W2088894002 hasConceptScore W2088894002C185592680 @default.
• W2088894002 hasConceptScore W2088894002C192562407 @default.
• W2088894002 hasConceptScore W2088894002C540031477 @default.
• W2088894002 hasConceptScore W2088894002C58312451 @default.
• W2088894002 hasConceptScore W2088894002C62520636 @default.
• W2088894002 hasConceptScore W2088894002C68687820 @default.
• W2088894002 hasConceptScore W2088894002C74064498 @default.
• W2088894002 hasConceptScore W2088894002C76155785 @default.
• W2088894002 hasConceptScore W2088894002C82706917 @default.
• W2088894002 hasConceptScore W2088894002C95974651 @default.
• W2088894002 hasIssue "19" @default.
• W2088894002 hasLocation W20888940021 @default.
• W2088894002 hasOpenAccess W2088894002 @default.
• W2088894002 hasPrimaryLocation W20888940021 @default.
• W2088894002 hasRelatedWork W1520289904 @default.
• W2088894002 hasRelatedWork W1988752274 @default.
• W2088894002 hasRelatedWork W1993028534 @default.
• W2088894002 hasRelatedWork W2020978889 @default.
• W2088894002 hasRelatedWork W2069507702 @default.
• W2088894002 hasRelatedWork W2744568639 @default.
• W2088894002 hasRelatedWork W3166206513 @default.
• W2088894002 hasRelatedWork W4318952669 @default.
• W2088894002 hasRelatedWork W4319459596 @default.
• W2088894002 hasRelatedWork W2019437472 @default.

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