Matches in SemOpenAlex for { <https://semopenalex.org/work/W2088897296> ?p ?o ?g. }
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94
with 100 items per page.
- W2088897296 endingPage "L1644" @default.
- W2088897296 startingPage "L1644" @default.
- W2088897296 abstract "A quick adjustment of quadrupole-lens excitation for a high energy ion microbeam was realized by a computerized knife-edge method using a secondary-electron intensity profile for a thin metal pattern on a silicon substrate delineated by lithography and lift-off techniques. Minimum processing time required for measurement of a beam profile with 64 data points was 0.3 s, which was shorter than any other method using a resist exposure or a secondary-electron image." @default.
- W2088897296 created "2016-06-24" @default.
- W2088897296 creator A5002176402 @default.
- W2088897296 creator A5010757568 @default.
- W2088897296 creator A5056213756 @default.
- W2088897296 date "1989-09-01" @default.
- W2088897296 modified "2023-10-14" @default.
- W2088897296 title "Quick Focus Adjustment for Quadrupole Lens System to Form High-Energy Ion Microbeam" @default.
- W2088897296 cites W2013506982 @default.
- W2088897296 cites W2057620582 @default.
- W2088897296 cites W2061942502 @default.
- W2088897296 cites W2071146786 @default.
- W2088897296 cites W2079667939 @default.
- W2088897296 cites W2109606373 @default.
- W2088897296 doi "https://doi.org/10.1143/jjap.28.l1644" @default.
- W2088897296 hasPublicationYear "1989" @default.
- W2088897296 type Work @default.
- W2088897296 sameAs 2088897296 @default.
- W2088897296 citedByCount "7" @default.
- W2088897296 crossrefType "journal-article" @default.
- W2088897296 hasAuthorship W2088897296A5002176402 @default.
- W2088897296 hasAuthorship W2088897296A5010757568 @default.
- W2088897296 hasAuthorship W2088897296A5056213756 @default.
- W2088897296 hasConcept C111368507 @default.
- W2088897296 hasConcept C120665830 @default.
- W2088897296 hasConcept C121332964 @default.
- W2088897296 hasConcept C127313418 @default.
- W2088897296 hasConcept C131397105 @default.
- W2088897296 hasConcept C147120987 @default.
- W2088897296 hasConcept C15336307 @default.
- W2088897296 hasConcept C168834538 @default.
- W2088897296 hasConcept C171250308 @default.
- W2088897296 hasConcept C184779094 @default.
- W2088897296 hasConcept C185544564 @default.
- W2088897296 hasConcept C192562407 @default.
- W2088897296 hasConcept C200274948 @default.
- W2088897296 hasConcept C204223013 @default.
- W2088897296 hasConcept C2777152588 @default.
- W2088897296 hasConcept C2777289219 @default.
- W2088897296 hasConcept C2779227376 @default.
- W2088897296 hasConcept C34667332 @default.
- W2088897296 hasConcept C39984356 @default.
- W2088897296 hasConcept C49040817 @default.
- W2088897296 hasConcept C50774322 @default.
- W2088897296 hasConcept C53524968 @default.
- W2088897296 hasConcept C544956773 @default.
- W2088897296 hasConcept C62520636 @default.
- W2088897296 hasConcept C83581075 @default.
- W2088897296 hasConceptScore W2088897296C111368507 @default.
- W2088897296 hasConceptScore W2088897296C120665830 @default.
- W2088897296 hasConceptScore W2088897296C121332964 @default.
- W2088897296 hasConceptScore W2088897296C127313418 @default.
- W2088897296 hasConceptScore W2088897296C131397105 @default.
- W2088897296 hasConceptScore W2088897296C147120987 @default.
- W2088897296 hasConceptScore W2088897296C15336307 @default.
- W2088897296 hasConceptScore W2088897296C168834538 @default.
- W2088897296 hasConceptScore W2088897296C171250308 @default.
- W2088897296 hasConceptScore W2088897296C184779094 @default.
- W2088897296 hasConceptScore W2088897296C185544564 @default.
- W2088897296 hasConceptScore W2088897296C192562407 @default.
- W2088897296 hasConceptScore W2088897296C200274948 @default.
- W2088897296 hasConceptScore W2088897296C204223013 @default.
- W2088897296 hasConceptScore W2088897296C2777152588 @default.
- W2088897296 hasConceptScore W2088897296C2777289219 @default.
- W2088897296 hasConceptScore W2088897296C2779227376 @default.
- W2088897296 hasConceptScore W2088897296C34667332 @default.
- W2088897296 hasConceptScore W2088897296C39984356 @default.
- W2088897296 hasConceptScore W2088897296C49040817 @default.
- W2088897296 hasConceptScore W2088897296C50774322 @default.
- W2088897296 hasConceptScore W2088897296C53524968 @default.
- W2088897296 hasConceptScore W2088897296C544956773 @default.
- W2088897296 hasConceptScore W2088897296C62520636 @default.
- W2088897296 hasConceptScore W2088897296C83581075 @default.
- W2088897296 hasIssue "9A" @default.
- W2088897296 hasLocation W20888972961 @default.
- W2088897296 hasOpenAccess W2088897296 @default.
- W2088897296 hasPrimaryLocation W20888972961 @default.
- W2088897296 hasRelatedWork W1978603681 @default.
- W2088897296 hasRelatedWork W2002429540 @default.
- W2088897296 hasRelatedWork W2017069861 @default.
- W2088897296 hasRelatedWork W2045370251 @default.
- W2088897296 hasRelatedWork W2053038540 @default.
- W2088897296 hasRelatedWork W2088897296 @default.
- W2088897296 hasRelatedWork W2109615308 @default.
- W2088897296 hasRelatedWork W2597005070 @default.
- W2088897296 hasRelatedWork W2984324614 @default.
- W2088897296 hasRelatedWork W4249668346 @default.
- W2088897296 hasVolume "28" @default.
- W2088897296 isParatext "false" @default.
- W2088897296 isRetracted "false" @default.
- W2088897296 magId "2088897296" @default.
- W2088897296 workType "article" @default.