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• W2088916627 abstract "Lateral thermal wet oxidization of the AlAs layer in a GaAs/AlAs/GaAs sandwiched structure is studied by Raman spectroscopy and Nomarski microscopy. A significant improvement in thermal stability of the oxidized AlAs layer has been achieved by optimizing the oxidation conditions, which can be used to fabricate reliable devices. We show that the thermal stability is strongly related to the removal of volatile products, such as As and As2O3, as evidenced by the Raman spectroscopy measurement." @default.
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• W2088916627 date "2002-02-11" @default.
• W2088916627 modified "2023-10-05" @default.
• W2088916627 title "Improved thermal stability of wet-oxidized AlAs" @default.
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• W2088916627 doi "https://doi.org/10.1063/1.1448166" @default.
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