Matches in SemOpenAlex for { <https://semopenalex.org/work/W2088949350> ?p ?o ?g. }
Showing items 1 to 82 of
82
with 100 items per page.
- W2088949350 endingPage "774" @default.
- W2088949350 startingPage "770" @default.
- W2088949350 abstract "The application of separation-by-implantation-of-oxygen (SIMOX) for silicon–germanium-on-insulator (SGOI) fabrication is always limited by the Ge loss caused by the high temperature annealing. A unique SIMOX method was introduced to fabricate SGOI and resolve the problem of Ge loss. During the process, a SiO2 layer was formed pre-annealing to block the Ge out-diffusion. As the x-ray rocking curve and Raman spectra studies show, the Ge fraction of the SGOI was improved to 17 at.%. The final sample exhibits a planar and continuous buried oxide layer, sharp interfaces and a defect free top SiGe layer as the cross-sectional transmission-electron- microscopy (XTEM) and secondary-ion-mass-spectrometry studies show. The Rutherford backscattering spectroscopy demonstrated that the superficial SiGe layer was superior in quality (derived channelling yield of 10%). The results indicate that the additional step of thermal oxidation pre-annealing is vital to resolve the problem of Ge loss and the modified SIMOX process is applicable for SGOI fabrication." @default.
- W2088949350 created "2016-06-24" @default.
- W2088949350 creator A5016796073 @default.
- W2088949350 creator A5021428067 @default.
- W2088949350 creator A5042815955 @default.
- W2088949350 creator A5044657310 @default.
- W2088949350 creator A5048379858 @default.
- W2088949350 creator A5052135530 @default.
- W2088949350 creator A5066084536 @default.
- W2088949350 creator A5068521890 @default.
- W2088949350 date "2005-06-16" @default.
- W2088949350 modified "2023-10-17" @default.
- W2088949350 title "Relaxed silicon–germanium-on-insulator fabricated by oxygen implantation and oxidation-enhanced annealing" @default.
- W2088949350 cites W1654986771 @default.
- W2088949350 cites W1967997246 @default.
- W2088949350 cites W1972836222 @default.
- W2088949350 cites W1974675817 @default.
- W2088949350 cites W2012363401 @default.
- W2088949350 cites W2024906284 @default.
- W2088949350 cites W2036516915 @default.
- W2088949350 cites W2060137939 @default.
- W2088949350 cites W2061266999 @default.
- W2088949350 cites W2073720450 @default.
- W2088949350 cites W2076338761 @default.
- W2088949350 cites W2090800313 @default.
- W2088949350 cites W2123210027 @default.
- W2088949350 cites W2167300113 @default.
- W2088949350 doi "https://doi.org/10.1088/0268-1242/20/8/021" @default.
- W2088949350 hasPublicationYear "2005" @default.
- W2088949350 type Work @default.
- W2088949350 sameAs 2088949350 @default.
- W2088949350 citedByCount "2" @default.
- W2088949350 crossrefType "journal-article" @default.
- W2088949350 hasAuthorship W2088949350A5016796073 @default.
- W2088949350 hasAuthorship W2088949350A5021428067 @default.
- W2088949350 hasAuthorship W2088949350A5042815955 @default.
- W2088949350 hasAuthorship W2088949350A5044657310 @default.
- W2088949350 hasAuthorship W2088949350A5048379858 @default.
- W2088949350 hasAuthorship W2088949350A5052135530 @default.
- W2088949350 hasAuthorship W2088949350A5066084536 @default.
- W2088949350 hasAuthorship W2088949350A5068521890 @default.
- W2088949350 hasConcept C178790620 @default.
- W2088949350 hasConcept C185592680 @default.
- W2088949350 hasConcept C191897082 @default.
- W2088949350 hasConcept C192562407 @default.
- W2088949350 hasConcept C2777855556 @default.
- W2088949350 hasConcept C49040817 @default.
- W2088949350 hasConcept C53143962 @default.
- W2088949350 hasConcept C540031477 @default.
- W2088949350 hasConcept C544956773 @default.
- W2088949350 hasConcept C550623735 @default.
- W2088949350 hasConceptScore W2088949350C178790620 @default.
- W2088949350 hasConceptScore W2088949350C185592680 @default.
- W2088949350 hasConceptScore W2088949350C191897082 @default.
- W2088949350 hasConceptScore W2088949350C192562407 @default.
- W2088949350 hasConceptScore W2088949350C2777855556 @default.
- W2088949350 hasConceptScore W2088949350C49040817 @default.
- W2088949350 hasConceptScore W2088949350C53143962 @default.
- W2088949350 hasConceptScore W2088949350C540031477 @default.
- W2088949350 hasConceptScore W2088949350C544956773 @default.
- W2088949350 hasConceptScore W2088949350C550623735 @default.
- W2088949350 hasIssue "8" @default.
- W2088949350 hasLocation W20889493501 @default.
- W2088949350 hasOpenAccess W2088949350 @default.
- W2088949350 hasPrimaryLocation W20889493501 @default.
- W2088949350 hasRelatedWork W1970603466 @default.
- W2088949350 hasRelatedWork W2021810307 @default.
- W2088949350 hasRelatedWork W2050041811 @default.
- W2088949350 hasRelatedWork W2058560667 @default.
- W2088949350 hasRelatedWork W2061975843 @default.
- W2088949350 hasRelatedWork W2072581800 @default.
- W2088949350 hasRelatedWork W2317679397 @default.
- W2088949350 hasRelatedWork W2501711701 @default.
- W2088949350 hasRelatedWork W2940927672 @default.
- W2088949350 hasRelatedWork W2512571230 @default.
- W2088949350 hasVolume "20" @default.
- W2088949350 isParatext "false" @default.
- W2088949350 isRetracted "false" @default.
- W2088949350 magId "2088949350" @default.
- W2088949350 workType "article" @default.