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- W2088968569 abstract "Abstract A compact, low costs and high-power excimer lamp system has been developed for industrial applications. 80 W of the maximum continuous radiation power has been achieved for a XeCl lamp of 308 nm wavelength when it was excited by a 2.45 GHz and 10 kW microwave discharge. The irradiation intensity was 200 mW / cm 2 in the focused area of 200 × 10 mm 2 with the lamp lifetime of 160 h while it was excited with 1.5 kW excitation power. The maximum average excitation power was 5 W, in the case of a KrCl lamp of 222 and 258 nm. When it was excited with 35 kW and 1.2 μs pulse, the radiation energies were 1 mJ for the XeCl lamp and 0.28 mJ for the KrCl lamp. Lamp tubes are sealed fused quartz containing a mixture of Xe/Kr, Cl 2 and He/Ne gases and the total pressure is 50 Torr. Further improvement of the radiation power as well as the tube life time is under progress." @default.
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- W2088968569 date "1994-05-01" @default.
- W2088968569 modified "2023-09-26" @default.
- W2088968569 title "A practical high-power excimer lamp excited by a microwave discharge" @default.
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- W2088968569 doi "https://doi.org/10.1016/0169-4332(94)90463-4" @default.
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