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- W2089271194 abstract "An experimental procedure to investigate the spatiotemporal characteristics of electrons in the vicinity of mean energy in a radiofrequency plasma is proposed by using optical emission and absorption spectroscopy in Ar. The method employs optical kinetics of long-lived metastable atom Ar(1s5) and short-lived excited Ar(2p9). The electron density distribution ne(z,t) is demonstrated in a typical condition in a two-frequency capacitively coupled plasma, excited at 100MHz and biased at 500kHz in pure Ar. The density shows almost time independent characteristics in the bulk plasma and a strong time dependence in the sheath in front of the bias electrode." @default.
- W2089271194 created "2016-06-24" @default.
- W2089271194 creator A5017652186 @default.
- W2089271194 creator A5051187319 @default.
- W2089271194 creator A5053880237 @default.
- W2089271194 creator A5066241094 @default.
- W2089271194 creator A5074830442 @default.
- W2089271194 creator A5077262398 @default.
- W2089271194 date "2008-02-18" @default.
- W2089271194 modified "2023-10-16" @default.
- W2089271194 title "Diagnostics for low-energy electrons in a two-frequency capacitively coupled plasma in Ar" @default.
- W2089271194 cites W1995510561 @default.
- W2089271194 cites W2003354694 @default.
- W2089271194 cites W2010741193 @default.
- W2089271194 cites W2016813840 @default.
- W2089271194 cites W2030857277 @default.
- W2089271194 cites W2055414011 @default.
- W2089271194 cites W2063998246 @default.
- W2089271194 cites W2079573315 @default.
- W2089271194 doi "https://doi.org/10.1063/1.2844890" @default.
- W2089271194 hasPublicationYear "2008" @default.
- W2089271194 type Work @default.
- W2089271194 sameAs 2089271194 @default.
- W2089271194 citedByCount "17" @default.
- W2089271194 countsByYear W20892711942012 @default.
- W2089271194 countsByYear W20892711942014 @default.
- W2089271194 countsByYear W20892711942015 @default.
- W2089271194 countsByYear W20892711942018 @default.
- W2089271194 countsByYear W20892711942020 @default.
- W2089271194 countsByYear W20892711942022 @default.
- W2089271194 crossrefType "journal-article" @default.
- W2089271194 hasAuthorship W2089271194A5017652186 @default.
- W2089271194 hasAuthorship W2089271194A5051187319 @default.
- W2089271194 hasAuthorship W2089271194A5053880237 @default.
- W2089271194 hasAuthorship W2089271194A5066241094 @default.
- W2089271194 hasAuthorship W2089271194A5074830442 @default.
- W2089271194 hasAuthorship W2089271194A5077262398 @default.
- W2089271194 hasConcept C121332964 @default.
- W2089271194 hasConcept C125287762 @default.
- W2089271194 hasConcept C125485243 @default.
- W2089271194 hasConcept C147120987 @default.
- W2089271194 hasConcept C149635348 @default.
- W2089271194 hasConcept C159985019 @default.
- W2089271194 hasConcept C178790620 @default.
- W2089271194 hasConcept C181500209 @default.
- W2089271194 hasConcept C184779094 @default.
- W2089271194 hasConcept C185592680 @default.
- W2089271194 hasConcept C192039680 @default.
- W2089271194 hasConcept C192562407 @default.
- W2089271194 hasConcept C32891209 @default.
- W2089271194 hasConcept C41008148 @default.
- W2089271194 hasConcept C43503373 @default.
- W2089271194 hasConcept C58312451 @default.
- W2089271194 hasConcept C62520636 @default.
- W2089271194 hasConcept C68687820 @default.
- W2089271194 hasConcept C82706917 @default.
- W2089271194 hasConcept C89464430 @default.
- W2089271194 hasConcept C95974651 @default.
- W2089271194 hasConceptScore W2089271194C121332964 @default.
- W2089271194 hasConceptScore W2089271194C125287762 @default.
- W2089271194 hasConceptScore W2089271194C125485243 @default.
- W2089271194 hasConceptScore W2089271194C147120987 @default.
- W2089271194 hasConceptScore W2089271194C149635348 @default.
- W2089271194 hasConceptScore W2089271194C159985019 @default.
- W2089271194 hasConceptScore W2089271194C178790620 @default.
- W2089271194 hasConceptScore W2089271194C181500209 @default.
- W2089271194 hasConceptScore W2089271194C184779094 @default.
- W2089271194 hasConceptScore W2089271194C185592680 @default.
- W2089271194 hasConceptScore W2089271194C192039680 @default.
- W2089271194 hasConceptScore W2089271194C192562407 @default.
- W2089271194 hasConceptScore W2089271194C32891209 @default.
- W2089271194 hasConceptScore W2089271194C41008148 @default.
- W2089271194 hasConceptScore W2089271194C43503373 @default.
- W2089271194 hasConceptScore W2089271194C58312451 @default.
- W2089271194 hasConceptScore W2089271194C62520636 @default.
- W2089271194 hasConceptScore W2089271194C68687820 @default.
- W2089271194 hasConceptScore W2089271194C82706917 @default.
- W2089271194 hasConceptScore W2089271194C89464430 @default.
- W2089271194 hasConceptScore W2089271194C95974651 @default.
- W2089271194 hasIssue "7" @default.
- W2089271194 hasLocation W20892711941 @default.
- W2089271194 hasOpenAccess W2089271194 @default.
- W2089271194 hasPrimaryLocation W20892711941 @default.
- W2089271194 hasRelatedWork W1676253050 @default.
- W2089271194 hasRelatedWork W2013888519 @default.
- W2089271194 hasRelatedWork W2069397480 @default.
- W2089271194 hasRelatedWork W2090910010 @default.
- W2089271194 hasRelatedWork W2330478120 @default.
- W2089271194 hasRelatedWork W2335671780 @default.
- W2089271194 hasRelatedWork W2790125938 @default.
- W2089271194 hasRelatedWork W2803245209 @default.
- W2089271194 hasRelatedWork W2900091209 @default.
- W2089271194 hasRelatedWork W4367186977 @default.
- W2089271194 hasVolume "92" @default.
- W2089271194 isParatext "false" @default.
- W2089271194 isRetracted "false" @default.
- W2089271194 magId "2089271194" @default.
- W2089271194 workType "article" @default.