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• W2089342864 abstract "Laser absorption at 355nm is used to monitor the time variations of the Cl2 density in high-density industrial inductively coupled plasma. This technique is combined with the measurement of the gas temperature from the Doppler width of the 811.5nm line of argon, added as a trace gas and with the measurement of the total gas pressure with a Baratron gauge. These measurements permit to estimate the mole fractions of Cl2 and Cl species in Cl2 inductively coupled plasmas in a waferless reactor. The impact of the chemical nature of the reactor wall coatings on the Cl and Cl2 mole fractions is studied systematically. We show that under otherwise identical plasma conditions, the Cl mole fraction is completely different when the plasma is operated in SiOCl, AlF, CCl, or TiOCl coated reactors, because the homogeneous recombination probability of Cl atoms is strongly surface dependant. The Cl atom mole fraction reached at 100W radiofrequency power in SiOCl coated reactor (80%) is much higher than that obtained at 900W in a “clean” AlF reactor (40%). A simple zero-dimensional model permits to provide the recombination coefficient of Cl atoms, γrec: 0.005 on SiOCl film and about 0.3 on the other three coatings. It is proposed to get benefit of this very high sensitivity of Cl2 dissociation rate to the wall coating for the control of the chamber wall status from the Cl2 density measurements in standard conditions." @default.
• W2089342864 created "2016-06-24" @default.
• W2089342864 creator A5000189425 @default.
• W2089342864 creator A5039293335 @default.
• W2089342864 creator A5084262464 @default.
• W2089342864 date "2007-11-01" @default.
• W2089342864 modified "2023-09-25" @default.
• W2089342864 title "Influence of the reactor wall composition on radicals' densities and total pressure in Cl2 inductively coupled plasmas: I. Without silicon etching" @default.
• W2089342864 cites W1517593839 @default.
• W2089342864 cites W1964562179 @default.
• W2089342864 cites W1969405884 @default.
• W2089342864 cites W1971363695 @default.
• W2089342864 cites W1975267305 @default.
• W2089342864 cites W1985927315 @default.
• W2089342864 cites W1997932919 @default.
• W2089342864 cites W1998811991 @default.
• W2089342864 cites W1999811101 @default.
• W2089342864 cites W2000461969 @default.
• W2089342864 cites W2003086875 @default.
• W2089342864 cites W2005871931 @default.
• W2089342864 cites W2014658906 @default.
• W2089342864 cites W2016143389 @default.
• W2089342864 cites W2031105674 @default.
• W2089342864 cites W2032111236 @default.
• W2089342864 cites W2035637653 @default.
• W2089342864 cites W2037327969 @default.
• W2089342864 cites W2038499633 @default.
• W2089342864 cites W2039308205 @default.
• W2089342864 cites W2040727769 @default.
• W2089342864 cites W2049887443 @default.
• W2089342864 cites W2056938791 @default.
• W2089342864 cites W2059533467 @default.
• W2089342864 cites W2065719590 @default.
• W2089342864 cites W2067954047 @default.
• W2089342864 cites W2072646455 @default.
• W2089342864 cites W2073808997 @default.
• W2089342864 cites W2077374023 @default.
• W2089342864 cites W2079887642 @default.
• W2089342864 cites W2083436876 @default.
• W2089342864 cites W2086722021 @default.
• W2089342864 cites W2093750845 @default.
• W2089342864 cites W2094974064 @default.
• W2089342864 cites W4243030950 @default.
• W2089342864 cites W4255224944 @default.
• W2089342864 cites W4297206384 @default.
• W2089342864 cites W4299316334 @default.
• W2089342864 cites W4319053994 @default.
• W2089342864 doi "https://doi.org/10.1063/1.2803880" @default.
• W2089342864 hasPublicationYear "2007" @default.
• W2089342864 type Work @default.
• W2089342864 sameAs 2089342864 @default.
• W2089342864 citedByCount "33" @default.
• W2089342864 countsByYear W20893428642012 @default.
• W2089342864 countsByYear W20893428642013 @default.
• W2089342864 countsByYear W20893428642014 @default.
• W2089342864 countsByYear W20893428642015 @default.
• W2089342864 countsByYear W20893428642016 @default.
• W2089342864 countsByYear W20893428642017 @default.
• W2089342864 countsByYear W20893428642019 @default.
• W2089342864 crossrefType "journal-article" @default.
• W2089342864 hasAuthorship W2089342864A5000189425 @default.
• W2089342864 hasAuthorship W2089342864A5039293335 @default.
• W2089342864 hasAuthorship W2089342864A5084262464 @default.
• W2089342864 hasConcept C102931765 @default.
• W2089342864 hasConcept C113196181 @default.
• W2089342864 hasConcept C121332964 @default.
• W2089342864 hasConcept C147789679 @default.
• W2089342864 hasConcept C178790620 @default.
• W2089342864 hasConcept C184779094 @default.
• W2089342864 hasConcept C185592680 @default.
• W2089342864 hasConcept C36591836 @default.
• W2089342864 hasConcept C43617362 @default.
• W2089342864 hasConcept C547737533 @default.
• W2089342864 hasConcept C62520636 @default.
• W2089342864 hasConcept C82706917 @default.
• W2089342864 hasConcept C95974651 @default.
• W2089342864 hasConceptScore W2089342864C102931765 @default.
• W2089342864 hasConceptScore W2089342864C113196181 @default.
• W2089342864 hasConceptScore W2089342864C121332964 @default.
• W2089342864 hasConceptScore W2089342864C147789679 @default.
• W2089342864 hasConceptScore W2089342864C178790620 @default.
• W2089342864 hasConceptScore W2089342864C184779094 @default.
• W2089342864 hasConceptScore W2089342864C185592680 @default.
• W2089342864 hasConceptScore W2089342864C36591836 @default.
• W2089342864 hasConceptScore W2089342864C43617362 @default.
• W2089342864 hasConceptScore W2089342864C547737533 @default.
• W2089342864 hasConceptScore W2089342864C62520636 @default.
• W2089342864 hasConceptScore W2089342864C82706917 @default.
• W2089342864 hasConceptScore W2089342864C95974651 @default.
• W2089342864 hasIssue "9" @default.
• W2089342864 hasLocation W20893428641 @default.
• W2089342864 hasOpenAccess W2089342864 @default.
• W2089342864 hasPrimaryLocation W20893428641 @default.
• W2089342864 hasRelatedWork W1619276345 @default.
• W2089342864 hasRelatedWork W1996716935 @default.
• W2089342864 hasRelatedWork W1997830337 @default.
• W2089342864 hasRelatedWork W2332497334 @default.
• W2089342864 hasRelatedWork W2376272890 @default.
• W2089342864 hasRelatedWork W2385573060 @default.
• W2089342864 hasRelatedWork W2388101971 @default.

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